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微型光电机械系统(2)
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作者 王世昌 《光机电信息》 1995年第5期15-18,共4页
微机械、微电子技术是三微系统工程的组成部分,本刊第4期已阐述了微光学技术的发展。本文的第二部分介绍微机械和微电子集成系统的技术现状和应用前景。
关键词 微型光电机械系统 微光学技术 微机械 微电子集成系统
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Experimental study on high-power LEDs integrated with micro heat pipe 被引量:3
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作者 李聪明 周传鹏 +3 位作者 罗怡 Mohammad Hamidnia 王晓东 由博 《Optoelectronics Letters》 EI 2016年第1期31-34,共4页
Micro heat pipe(MHP) is applied to implement the efficient heat transfer of light emitting diode(LED) device.The fabrication of MHP is based on micro-electro-mechanical-system(MEMS) technique,15 micro grooves were etc... Micro heat pipe(MHP) is applied to implement the efficient heat transfer of light emitting diode(LED) device.The fabrication of MHP is based on micro-electro-mechanical-system(MEMS) technique,15 micro grooves were etched on one side of silicon(Si) substrate,which was then packaged with aluminum heat sink to form an MHP.On the other side of Si substrate,three LED chips were fixed by die bonding.Then experiments were performed to study the thermal performance of this LED device.The results show that the LED device with higher filling ratio is better when the input power is 1.0 W; with the increase of input power,the optimum filling ratio changes from 30% to 48%,and the time reaching stable state is reduced; when the input power is equal to 2.5 W,only the LED device with filling ratio of 48% can work normally.So integrating MHP into high-power LED device can implement the effective control of junction temperature. 展开更多
关键词 Capillary flow FILLING Heat pipes Heat transfer MEMS
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