微电子-机械系统传感器及其应用

微电子-机械系统(Microelectro-mechanical system)MEMS,或日微机电系统传感技术,已逐步应用于地球物理勘探领域。利用MEMS技术开发的新一代全数字地震传感器,其输出从直流到千赫兹范围内(如1kHz),均呈现加速度检波器的特性,且具有极低的固有噪声和畸变、直接的数字输出、高的矢量保真度和良好的低频响应。文章着重介绍MEMS的基本加工原理,基本电原理以及MEMS芯片使用安装的注意事项。

A DC-to-32GHz 2Bit MEMS Phase Shifter

A two-bit phase shifter with distributed microelectromechanical system (MEMS) transmission line (DMTL) is developed,and a novel structure which be actuated by coplanar waveguide transmission line (CPW-actuation structure) is proposed,which can reduce the actuation voltage significantly.The measured result,with actuation voltage less than 20V,0°/20.1°/41.9°/68.2° phase shift and -1.2dB insert loss at 20GHz,is demonstrated,and insertion loss/return loss is better than -1.8dB/-11dB from DC to 32GHz.The experimental results highlight the potential of a low-loss and broadband digital MEMS phase shifter on a high-permittivity substrate.

Modified Reynolds Equation for Squeeze-Film Air Damping of Slotted Plates in MEMS Devices

A differential equation for calculating squeeze-film air damping in slotted plates is developed by modifying the Reynolds equation. A term is added to account for the effect of airflow through the slots on the air damping of the plate. The end effect of the airflow in the slots is also treated by substituting an effective channel length for the geometric channel length （i. e. the thickness of the plate）..The damping pressure distribution, damping force, and damping force coefficient of the slotted plates can be found by solving the equation under appropriate boundary conditions. With restrictions on the thickness and the lateral dimensions of the slotted plate removed,the equation provides a useful tool for analysing the squeeze-film air damping effect of slotted plates with finite thickness and finite lateral dimensions. For a typical slotted plate structure, the damping force coefficient obtained by this equation agrees well with that generated by ANSYS.

温度对悬臂梁静电驱动RF-MEMS开关性能的影响

介绍了温度对悬臂梁式RF-MEMS开关的影响。以南京电子器件研究所研制的悬臂梁式RF-MEMS开关为实验样品,常温下(25°C)先测定样品的驱动电压和射频特性,再将样品置于温度恒定的烘箱中热烘1h,取出后在常温条件下测定其机械形貌及电学性能。烘箱的温度从50°C变化到200°C,步进50°C。针对每个温度做一轮实验,最后将所得数据进行对比。实验结果表明,温度对于开关的射频性能影响极其微弱,但驱动电压对于温度却有较强的依赖性。分析认为,当温度变化时,悬臂梁结构的翘曲是影响驱动电压变化的主要因素。最后提出了几种可以提高结构温度稳定性的方法。

Simulation and Design Optimization of Novel Microelectromechanical Digital-to-Analog Converter

A microelectromechanical Digital to Analog Converter (DAC) based on Weighted Gap (WG) principle is described,which is analogous to the weighed resistor DAC in electronic circuits.To convert the input of binary voltage to the output of analog displacement,the gaps are proposed to be employed as a scale factor.A finite element method is used to simulate the performance of the DAC.To reduce the error,the structure design is optimized and the maximum error of 0 002μm is obtained.

Measuring In-Plane Micro-Motion of Micro-Structure Using Optical Flow

Optical flow method is one of the most important methods of analyzing motion images. Optical flow field is used to analyze characteristics of motion objects. According to motion features of micro-electronic mechani-cal system (MEMS) micro-structure, the optical algorithm based on label field and neighborhood optimization is presented to analyze the in-plane micro-motion of micro-structure. Firstly, high speed motion states for each fre-quency segment of micro-structure in cyclic motion are frozen based on stroboscopic principle. Thus a series of dynamic images of micro-structure are obtained. Secondly, the presented optical algorithm is used to analyze the image sequences, and can obtain reliable and precise optical field and reduce computing time. As micro-resonator of testing object, the phase-amplitude curve of micro-structure is derived. Experimental results indicate that the meas-urement precision of the presented algorithm is high, and measurement repeatability reaches 40 nm under the same experiment condition.

DC—20GHz RF MEMS Switch

The design and fabrication of a RF MEMS switch is reported for the first time in China.The switching element consists of a thin metallic membrane,which has the metal-isolator-metal contact and a capacitive shunt switch as single-pole single-throw.When an electrostatic potential is applied to the membrane and the bottom electrode,the attractive electrostatic force pulls the metal membrane down onto the bottom dielectric.The switch characteristics,such as insertion loss and isolation,depend on the off and on-capacitance.The test results are as follows:the pulldown voltage is about 20V;the insertion loss is less than 0 69dB from DC to 20GHz in the up-state;the isolation is more than 13dB from 14 to 18GHz and 16dB from 18 to 20GHz in the down-state.

Applying Double Electric Fields to Avoid Deteriorating Movable Sensitive Parts in MEMS During Anodic Bonding

Anodic bonding between silicon and glass with dou bl e electric fields is presented.By this means,the damage caused by the electric f ield to the movable part during bonding can be avoided and the experiment result s show that.

A planar parallel manipulator based novel MEMS device bonding system

A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y table. In addition, the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm. As a resuh, the manipulator＇s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. A quite ideal trade-off between the system＇ s flexibility and efficiency is got. Finally, some verified motion specification of the manipulator, the bonding experimental results and the verified qualities of the bonded devices are provided.

Silicon Deep Etching Techniques for MEMS Devices

Silicon deep etching technique is the key fabrication step in the development of MEMS. The mask selectivity and the lateral etching control are the two primary factors that decide the result of deep etching process. These two factors are studied in this paper. The experimental results show that the higher selectivity can be gotten when F - gas is used as etching gas and Al is introduced as mask layer. The lateral etching problems can be solved by adjusting the etching condition, such as increasing the RF power, changing the gas composition and flow volume of etching machine.

The Performance Evaluation of the Integration of Inertial Navigation System and Global Navigation Satellite System with Analytic Constraints

The integration of GNSS （Global Navigation Satellite System） and INS （Inertial Navigation System） using IMU （Inertial Measurement Unit） is now widely used for MMS （Mobile Mapping System） and navigation applications to seamlessly determine position, velocity and attitude of the mobile platform. With low cost, small size, ligh weight and low power consumtion, the MEMS （Micro-Electro-Mechanical System） IMU and low cost GPS （Global Positioning System） receivers are now the trend in research and using for many applications. However, researchs in the literature indicated that the the performance of the low cost INS/GPS systems is still poor, particularly, in case of GNSS-noise environment. To overcome this problem, this research applies analytic contrains including non-holonomic constraint and zero velocity update in the data fusion engine such as Extended Kalman Filter to improve the performance of the system. The benefit of the proposed method will be demonstrated through experiments and data analysis.

Modeling and Analysis of Electrostatically Actuated MEMS under Combined Nonlinearities, Lorentz Force, and Mechanical Shock

This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.

Experimental study on high-power LEDs integrated with micro heat pipe

Micro heat pipe(MHP) is applied to implement the efficient heat transfer of light emitting diode(LED) device.The fabrication of MHP is based on micro-electro-mechanical-system(MEMS) technique,15 micro grooves were etched on one side of silicon(Si) substrate,which was then packaged with aluminum heat sink to form an MHP.On the other side of Si substrate,three LED chips were fixed by die bonding.Then experiments were performed to study the thermal performance of this LED device.The results show that the LED device with higher filling ratio is better when the input power is 1.0 W; with the increase of input power,the optimum filling ratio changes from 30% to 48%,and the time reaching stable state is reduced; when the input power is equal to 2.5 W,only the LED device with filling ratio of 48% can work normally.So integrating MHP into high-power LED device can implement the effective control of junction temperature.

Experimental investigation on cumulative propagation of thin film buckling under cyclic load

As instrument technology is needed for rapid determination of the smaller,thinner and lighter specimens,more stringent demands are related to thin films such as micro-electro-mechanical systems(MEMS),dielectric coatings and electronic packaging.Therefore,the requirement for testing platforms for rapidly determine the mechanical properties of thin films is increasing.Buckling of a film/substrate system could offer a variety of applications,ranging from stretchable electronics to micro-nanoscale metrology.In this paper,a fatigue-loading device has been designed to make the cyclic loading available for investigating the cumulative propagation of thin film buckling.The straight side buckling of thin compressed titanium film with the thickness of 50 nm deposited on organic glass substrates is investigated by using an optical microscope.The cumulative buckling propagation under the cyclic loading of a sequence of peak compression with the frequency 1 Hz is recorded by CCD camera.The buckling extension lengths are calculated by digital image measurement technology.

Stress control of silicon nitride films deposited by plasma enhanced chemical vapor deposition

Stress controllable silicon nitride(Si Nx) films deposited by plasma enhanced chemical vapor deposition(PECVD) are reported. Low stress Si Nx films were deposited in both high frequency(HF) mode and dual frequency(HF/LF) mode. By optimizing process parameters, stress free(-0.27 MPa) Si Nx films were obtained with the deposition rate of 45.5 nm/min and the refractive index of 2.06. Furthermore, at HF/LF mode, the stress is significantly influenced by LF ratio and LF power, and can be controlled to be 10 MPa with the LF ratio of 17% and LF power of 150 W. However, LF power has a little effect on the deposition rate due to the interaction between HF power and LF power. The deposited Si Nx films have good mechanical and optical properties, low deposition temperature and controllable stress, and can be widely used in integrated circuit(IC), micro-electro-mechanical systems(MEMS) and bio-MEMS.

Application of Novel Rotation Angular Model for 3D Mouse System Based on MEMS Accelerometers

A new scheme is proposed to model 3D angular motion of a revolving regular object with miniature, low-cost micro electro mechanical systems(MEMS) accelerometers(instead of gyroscope),which is employed in 3D mouse system.To sense 3D angular motion,the static property of MEMS accelerometer,sensitive to gravity acceleration,is exploited.With the three outputs of configured accelerometers,the proposed model is implemented to get the rotary motion of the rigid object.In order to validate the effectiveness of the proposed model,an input device is developed with the configuration of the scheme.Experimental results show that a simulated 3D cube can accurately track the rotation of the input device.The result indicates the feasibility and effectiveness of the proposed model in the 3D mouse system.