A microelectromechanical Digital to Analog Converter (DAC) based on Weighted Gap (WG) principle is described,which is analogous to the weighed resistor DAC in electronic circuits.To convert the input of binary vol...A microelectromechanical Digital to Analog Converter (DAC) based on Weighted Gap (WG) principle is described,which is analogous to the weighed resistor DAC in electronic circuits.To convert the input of binary voltage to the output of analog displacement,the gaps are proposed to be employed as a scale factor.A finite element method is used to simulate the performance of the DAC.To reduce the error,the structure design is optimized and the maximum error of 0 002μm is obtained.展开更多
文摘A microelectromechanical Digital to Analog Converter (DAC) based on Weighted Gap (WG) principle is described,which is analogous to the weighed resistor DAC in electronic circuits.To convert the input of binary voltage to the output of analog displacement,the gaps are proposed to be employed as a scale factor.A finite element method is used to simulate the performance of the DAC.To reduce the error,the structure design is optimized and the maximum error of 0 002μm is obtained.
