A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact ...A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.展开更多
Piezoelectric actuator has high stiffness, high frequency and infinite control precision, but a short output displacement which is often 1/1 000 of its length. In order to meet the requirements that tools feeding shou...Piezoelectric actuator has high stiffness, high frequency and infinite control precision, but a short output displacement which is often 1/1 000 of its length. In order to meet the requirements that tools feeding should be long-travel, high-frequency and high-precision in non-circular precision turning, a new one-freedom flexure hinge structure is put forward to amplify the output displacement of piezoelectric actuator. Theoretical analysis is done on the static and dynamic characteristics of the structure, differential equations are presented, and it is also verified by the finite element method. It's proved by experiments that the output displacement of the structure is 293 μm and its resonant frequency is 312 Hz.展开更多
This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can ...This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.展开更多
An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant fre...An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor.展开更多
According to the principle of bionics, a prototype of the earthworm-like micro robot was developed and manufactured for entering the small tube. Based on the process of the action and mechanics analysis, the controlle...According to the principle of bionics, a prototype of the earthworm-like micro robot was developed and manufactured for entering the small tube. Based on the process of the action and mechanics analysis, the controller was designed. This micro robot with 6mm diameter was driven directly by three electromagnetic linear drivers. Mobile cells were joined with two degree-of-freedom joint and the whole body was flexible and soft. The driving force reached 10.8g in normal working condition. The direction of movement and the angle of imaging can be controlled by the shape memory alloy （SMA）. The driving force, velocity and movement of micro robot in flexural tube were tested through experiments, which indicated that the driving force was in proportion to the range of frequency, and the micro robot could current, and the velocity reached a maximum in certain move in the thin tube flexibly.展开更多
This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity a...This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.展开更多
This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages,...This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.展开更多
文摘A new switching circuit is presented for the application in the frequency range of 0 to 8 GHz. This switch is electro-thermally actuated and exhibits high radio frequency （RF） performance due to its lateral contact mechanism, It composes of electroplated nickel and silicon nitride as structural materials. The isolation between bias and signal ports is realized by using silicon nitride. In the case of a small deformation, the relation between the displacement of the vertex and the pre-bending angle is analyzed. The metal contact is realized by in-plane motion and sidewall connection. The switches were fabricated using the MetalMUMPs process from MEMSCAP. The RF testing results show that the switch has a low insertion loss of 0. 9 dB at 8 GHz and a high isolation of 30 dB below 8 GHz.
文摘Piezoelectric actuator has high stiffness, high frequency and infinite control precision, but a short output displacement which is often 1/1 000 of its length. In order to meet the requirements that tools feeding should be long-travel, high-frequency and high-precision in non-circular precision turning, a new one-freedom flexure hinge structure is put forward to amplify the output displacement of piezoelectric actuator. Theoretical analysis is done on the static and dynamic characteristics of the structure, differential equations are presented, and it is also verified by the finite element method. It's proved by experiments that the output displacement of the structure is 293 μm and its resonant frequency is 312 Hz.
文摘This paper reports on the design, fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS （micro-electro-mechanical system） 16 × 16 optical switches. The mirror in the array can enlarge its rotation an- gles up to 90° and keep a steady state to steer the optical signal. According to the large-rotation behavior, an electro- mechanical model of the mirror is presented. By monolithic integration of fiber grooves and mirrors fabricated by a sur- face and bulk hybrid micromachining process, the coarse passive alignment of fiber-mirror-fiber can be achieved. The re- flectivity of the mirror is measured to be 93.1% ~96.3%. The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2. ldB using OptiFocusTM collimating lensed fibers. Moreover,only about ＋- 0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5-90Hz in the vertical vibration amplitude of 3mm.
文摘An idea to make up the vibrating body of ultrasonic motor with anisotropic composite is proposed and a linear piezoelectric motor is developed in this paper. Relative problems such as actuating mechanism, resonant frequency are discussed theoretically. According to the feature that impulse exists between the elastic body of composite ultrasonic linear motor and the base, an impulse analysis is presented to calculate the motor′s friction driving force and frictional conversion efficiency. The impulse analysis essentially explains the reason why the ultrasonic motor has great driving force, and can be applied to analyze the non-linear ultrasonic motor.
文摘According to the principle of bionics, a prototype of the earthworm-like micro robot was developed and manufactured for entering the small tube. Based on the process of the action and mechanics analysis, the controller was designed. This micro robot with 6mm diameter was driven directly by three electromagnetic linear drivers. Mobile cells were joined with two degree-of-freedom joint and the whole body was flexible and soft. The driving force reached 10.8g in normal working condition. The direction of movement and the angle of imaging can be controlled by the shape memory alloy （SMA）. The driving force, velocity and movement of micro robot in flexural tube were tested through experiments, which indicated that the driving force was in proportion to the range of frequency, and the micro robot could current, and the velocity reached a maximum in certain move in the thin tube flexibly.
文摘This paper shows an analysis ofMEM S （micro electro mechanical systems） due to Lorentz force and mechanical shock. The formulation is based on a modified couple stress theory, the von Karman geometric nonlinearity and Reynolds equation as well. The model contains a silicon microbeam, which is encircled by a stationary plate. The non-dimensional governing equations and associated boundary conditions are then solved iteratively through the Galerkin weighted method. The results show that pull-in voltage is dependent on the geometry nonlinearity. It is also demonstrated that by increasing voltage between the silicon microbeam and stationary plate, the pull-in instability happens.
文摘This paper describes the incremental PID control algorithm and the basic principles of motor soft start, and introduced STM32F103RB8 basic performance microcontroller, combined with incremental PID control advantages, and gives MCU in motor soft start process control application. Practice shows that the incremental PID applications, simplifying the control ideas to improve the performance of the current loop control, limiting the starting current, smooth start-up speed, and achieved good results motor start.
