在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后...在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。展开更多
Nano/microcrystalline composite diamond films were deposited on the holes of WC-6%Co drawing dies by a two-step procedure using alternative carbon sources, i.e., methane for the microcrystalline diamond（MCD） layer a...Nano/microcrystalline composite diamond films were deposited on the holes of WC-6%Co drawing dies by a two-step procedure using alternative carbon sources, i.e., methane for the microcrystalline diamond（MCD） layer and acetone for the nanocrystalline diamond（NCD） layer. Moreover, the monolayer methane-MCD and acetone-NCD coated drawing dies were fabricated as comparisons. The adhesion and wear rates of the diamond coated drawing dies were also tested by an inner hole polishing apparatus. Compared with mono-layer diamond coated drawing die, the composite diamond coated one exhibits better comprehensive performance, including higher adhesive strength and better wear resistance than the NCD one, and smoother surface（Ra=65.3 nm） than the MCD one（Ra=95.6 nm） after polishing at the same time. Compared with the NCD coated drawing die, the working lifetime of the composite diamond coated one is increased by nearly 20 times.展开更多
文摘在30kW级直流电弧等离子体喷射化学气相沉积(DC Arc P lasm a Jet CVD)设备上,采用Ar-H2-CH4混合气体,通过调节甲烷浓度以及控制其他沉积参数,在Mo衬底上沉积出微/纳米复合自支撑金刚石膜。实验表明,当微米金刚石膜层沉积结束后,在随后的沉积中,随着甲烷浓度的增加,金刚石膜表面的晶粒大小是逐渐减小的。当甲烷浓度达到20%以上时,金刚石膜生长面晶粒呈现菜花状的小晶团,膜体侧面已经没有了粗大的柱状晶,而是呈现出光滑的断口,对该层进行拉曼谱分析显示,位于1145 cm-1附近有一定强度的散射峰出现。这说明所沉积的晶粒全部变为纳米级尺寸。
基金Project(51275302) supported by the National Natural Science Foundation of China
文摘Nano/microcrystalline composite diamond films were deposited on the holes of WC-6%Co drawing dies by a two-step procedure using alternative carbon sources, i.e., methane for the microcrystalline diamond（MCD） layer and acetone for the nanocrystalline diamond（NCD） layer. Moreover, the monolayer methane-MCD and acetone-NCD coated drawing dies were fabricated as comparisons. The adhesion and wear rates of the diamond coated drawing dies were also tested by an inner hole polishing apparatus. Compared with mono-layer diamond coated drawing die, the composite diamond coated one exhibits better comprehensive performance, including higher adhesive strength and better wear resistance than the NCD one, and smoother surface（Ra=65.3 nm） than the MCD one（Ra=95.6 nm） after polishing at the same time. Compared with the NCD coated drawing die, the working lifetime of the composite diamond coated one is increased by nearly 20 times.
