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微结构成型的革命化技术——全息微光刻术
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作者 大舟 《光机电信息》 1996年第8期18-20,共3页
不久前,针对传统的光学微光刻术,出现一种效率更高的技术,这就是利用全息图而不是一般用透镜,将掩模的结构复制在芯片上.按此方法,可利用常规的紫外激光,在大的照明范围内达到0.25μm的分辨率.随着电子存储元件不断地小型化,而基底面积... 不久前,针对传统的光学微光刻术,出现一种效率更高的技术,这就是利用全息图而不是一般用透镜,将掩模的结构复制在芯片上.按此方法,可利用常规的紫外激光,在大的照明范围内达到0.25μm的分辨率.随着电子存储元件不断地小型化,而基底面积越来越增大,传统的光刻方法,碰到了它们工艺上的极限.透镜不断增大的同时,像差也增大,这就引起了图像的畸变,到目前为止还不能够大于25×25mm^2的视场,在高分辨率应用情况进行一次性照明.有一种不用透镜也行的光刻方法,它与传统方法相比,有很多优点,也许能够使光学光刻的结束期延长.这种无透镜方法是以全息术为基础的. 展开更多
关键词 集成电路 微结构成型 全息微光刻术
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一种聚合物表面微结构平板热压印连续成型的方法 被引量:8
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作者 敬鹏生 刘颖 +4 位作者 许红 赵中里 吴大鸣 杨振洲 郑秀婷 《塑料》 CAS CSCD 北大核心 2015年第1期83-86,共4页
提出1种聚合物表面微结构平板热压印连续成型方法,该方法是将聚合物基片从挤出机挤出后,通过两辊对基片进行初步压平定型,再利用表面快速加热装置对聚合物表面进行快速加热,使聚合物表面温度迅速高于其熔融温度使其熔融,然后进入联动式... 提出1种聚合物表面微结构平板热压印连续成型方法,该方法是将聚合物基片从挤出机挤出后,通过两辊对基片进行初步压平定型,再利用表面快速加热装置对聚合物表面进行快速加热,使聚合物表面温度迅速高于其熔融温度使其熔融,然后进入联动式平板热压印,设备压印制备出具有表面微结构聚合物片材。该方法的主要特点是将聚合物挤出成型设备和微结构平板热压印设备实现联动,一步法实现平板热压印聚合物表面微结构的连续成型。 展开更多
关键词 聚合物表面微结构 连续平板热压印 压印设备 微结构连续成型 成型方法
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塑料薄膜表面微结构热压印成型的研究进展 被引量:1
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作者 李文俊 张勇 《上海塑料》 2016年第1期6-11,共6页
介绍了塑料薄膜表面微结构热压印成型的工艺和特点;阐述了热压印工艺和材料性质对微结构成型的影响;综述了近几年来塑料薄膜表面微结构热压印成型的研究进展。
关键词 塑料薄膜 热压印 微结构成型
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聚碳酸酯/聚对苯二甲酸丁二醇酯共混物形态结构对微结构注塑制品性能的影响 被引量:1
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作者 吕文强 辛勇 《材料导报》 EI CAS CSCD 北大核心 2020年第10期10201-10205,共5页
为了得到综合性能较好的微结构注塑制品,采用熔融共混法制备了聚碳酸酯(PC)/聚对苯二甲酸丁二醇酯(PBT)共混物,并以PC/PBT共混物为原料加工成型微结构注塑制品。研究了PC/PBT共混物的形态结构对微结构制品性能的影响,结果表明:随着PBT... 为了得到综合性能较好的微结构注塑制品,采用熔融共混法制备了聚碳酸酯(PC)/聚对苯二甲酸丁二醇酯(PBT)共混物,并以PC/PBT共混物为原料加工成型微结构注塑制品。研究了PC/PBT共混物的形态结构对微结构制品性能的影响,结果表明:随着PBT含量的增大,注塑制品的缺口冲击强度显著提高,拉伸强度呈下降趋势,当PBT质量分数达到30%时,注塑制品的综合力学性能达到最佳。利用流变仪、非等温结晶测试(DSC)仪研究了微结构制品的流变行为以及结晶行为,随着PBT含量的提高,共混体系的柔性链越来越多,加工流动性得到显著改善,更利于微结构制品的加工。当PBT质量分数达到30%时,微结构制品兼具良好的流变性能与力学性能。DSC测试结果表明,少量PC的存在可以促进共混体系的结晶。 展开更多
关键词 微结构成型 PC/PBT共混物 形态结构 力学性能 流变行为
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Micro-optical structures formed by a mask moving method 被引量:1
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作者 DU Chun-lei DONG Xiao-chun DENG Qi-ling LUO Xian-gang 《Optoelectronics Letters》 EI 2007年第2期95-98,共4页
An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for ... An unique mask moving method is developed for forming effective micro-optical structures with continuous profile. The mechanism for forming different micro-optical profiles is disclosed, and the designed approach for binary moving mask is described. Finally some concrete micro-optical components with typical microstructures are presented for demonstrating the validity of the method. 展开更多
关键词 掩模移动法 微光学结构 成型 设计
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Microstructure of aluminum/copper clad composite fabricated by casting-cold extrusion forming 被引量:6
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作者 骆俊廷 赵双敬 张春祥 《Journal of Central South University》 SCIE EI CAS 2011年第4期1013-1017,共5页
An aluminum/copper clad composite was fabricated by the casting-cold extrusion forming technology and the microstructures of the products were observed and analyzed.It is found that aluminum grains at the interface ar... An aluminum/copper clad composite was fabricated by the casting-cold extrusion forming technology and the microstructures of the products were observed and analyzed.It is found that aluminum grains at the interface are refined in the radial profiles of cone-shaped deformation zone,but the grains in the center maintain the original state and the grain size is non-uniform.A clear boundary presents between the refined area and center area.In contrast,the copper grains in the radial profiles have been significantly refined.In the center area of the copper,the grains are bigger than those at the boundary.On the surface of the deformable body,the grain size is the smallest,but with irregular grain morphology.After the product is entirely extruded,all the copper and aluminum grains are refined with small and uniform morphology.In the center area,the average diameter of aluminum grains is smaller than 5 μm,and the copper grain on the surface is about 10 μm.At the interface,the grain size is very small,with a good combination of copper and aluminum.The thickness of interface is in the range of 10-15 μm.Energy spectrum analysis shows that CuAl3 phase presents at the interface. 展开更多
关键词 aluminum/copper clad composite CASTING cold extrusion MICROSTRUCTURE
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Simulation of Morphologies and Mechanical Properties of A/B Polymer Blend Film 被引量:2
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作者 ZHAO Xuezhe DENG Shengwei HUANG Yongmin LIU Honglai HU Ying 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2011年第4期549-557,共9页
The effects of blend composition and micro-phase structure on the mechanical behavior of A/B polymer blend film are studied by coupling the Monte Carlo(MC) simulation of morphology with the lattice spring model(LSM) o... The effects of blend composition and micro-phase structure on the mechanical behavior of A/B polymer blend film are studied by coupling the Monte Carlo(MC) simulation of morphology with the lattice spring model(LSM) of micro mechanics of materials.The MC method with bond length fluctuation and cavity diffusion algorithm on cubic lattice is adopted to simulate the micro-phase structure of A/B polymer blend.The information of morphology and structure is then inputted to the LSM composed of a three-dimensional network of springs to obtain the mechanical properties of polymer blend film.Simulated results show that the mechanical response is mainly affected by the density and the composition of polymer blend film through the morphology transition.When a force is applied on the outer boundary of polymer blend film,the vicinity of the inner cavities experiences higher stresses and strains responsible for the onset of crack propagation and the premature failure of the entire system. 展开更多
关键词 polymer blend film mechanical behavior Monte Carlo lattice spring model
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Manufacture of porous metallic glass using dissolvable templates
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作者 Jianan Fu Zhen Li +10 位作者 Zehang Liu Xin Li Wenxin Wen Fei Sun Luyao Li Jinbiao Huang Wenqing Ruan Shuai Ren Zhenxuan Zhang Xiong Liang Jiang Ma 《Science China Materials》 SCIE EI CAS CSCD 2022年第10期2833-2841,共9页
A facile,precise,and controllable manufacturing technology is desired for hierarchical functional surfaces.In this work,we successfully manufactured porous metallic glass using a water-dissolution material as template... A facile,precise,and controllable manufacturing technology is desired for hierarchical functional surfaces.In this work,we successfully manufactured porous metallic glass using a water-dissolution material as template and the excellent thermoplastic property of metallic glass.The prepared micro/nanostructures have excellent tunability,and the proposed approach can be used to prepare large-area disordered porous structures and ordered regular arrays with nanoscale replication accuracy.In particular,the disordered porous structure prepared by the dissolvable template strategy exhibits a water contact angle of~140°and an oil contact angle of~0°,making it suitable for oil/water separation.It also shows stable wettability after being soaked in strong acid or alkali environments and maintains a~130°water contact angle and a~4°oil contact angle even after severe wear.The proposed strategy also possesses excellent recycling properties.We reconstructed porous structures on the same surface three times and found no significant change in wettability for each reconstructed porous structure.Our research provides a facile and controllable approach for the preparation of hierarchical porous structures and paves the way for the design of other functional surfaces. 展开更多
关键词 dissolvable templates metallic glass porous structure WETTABILITY recycling properties
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