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新型无氨氮微蚀剂在蚀刻工艺中的应用研究
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作者 徐正武 张添淳 +2 位作者 吴康志 周宇阳 吴道新 《精细化工中间体》 CAS 2024年第6期39-45,共7页
在印刷电路板(PCB)的蚀刻工艺中广泛使用的微蚀剂因含有氨氮成分面临十分困难的废水处理问题。在硫酸-过氧化氢体系中研发了一款新型无氨氮微蚀剂,表征了其微蚀效果,并评估了其微蚀性能。结果表明,微蚀处理后的铜面清洁度和光亮度好,表... 在印刷电路板(PCB)的蚀刻工艺中广泛使用的微蚀剂因含有氨氮成分面临十分困难的废水处理问题。在硫酸-过氧化氢体系中研发了一款新型无氨氮微蚀剂,表征了其微蚀效果,并评估了其微蚀性能。结果表明,微蚀处理后的铜面清洁度和光亮度好,表面形貌优异,颗粒分布均匀,粗糙度适中。该微蚀剂具有高达40.0g/L的铜离子容忍率,其速率稳定维持在0.6~1.5μm/min之间。与行业内领先的微蚀剂相比,这款无氨氮微蚀剂处理的覆铜板在镀镍速率和均匀性方面均显示出优势。无氨氮微蚀剂不仅具有优秀的工艺性能,还降低了废水处理的复杂性和成本,减少了工业生产对环境的影响。 展开更多
关键词 无氨氮 硫酸-过氧化氢体系 微蚀剂 镀镍浸金
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光亮微蚀剂PM-05的研制 被引量:1
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作者 陆云 李伟浩 高敏 《广东化工》 CAS 2007年第10期9-11,共3页
随着欧盟ROSH指令的实施,印制电路板(PCB)的可焊性涂覆层由热风整平(HASL)工艺转向化学沉镍金、化学沉锡和化学沉银工艺,同时表面安装技术要求化学镀层具有很高的平坦性,针对这一需求我们开发了一种铜面光亮微蚀剂PM-05。本文着重介绍... 随着欧盟ROSH指令的实施,印制电路板(PCB)的可焊性涂覆层由热风整平(HASL)工艺转向化学沉镍金、化学沉锡和化学沉银工艺,同时表面安装技术要求化学镀层具有很高的平坦性,针对这一需求我们开发了一种铜面光亮微蚀剂PM-05。本文着重介绍了该药水的使用工艺流程,并对该药剂的性能进行测试。通过测试数据表明,PM-05是一种理想的铜面光亮微蚀剂。 展开更多
关键词 双氧水 光亮微蚀剂 印制板(PCB) 粗糙度 光泽度
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铜表面微蚀处理新技术 被引量:2
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作者 郑博 江建平 +3 位作者 寇文鹏 吴荣生 Joe Abys Simon WANG 《电镀与精饰》 CAS 2008年第4期4-7,共4页
采用过硫酸盐和几种特别添加剂配制成的微蚀剂,不仅具有传统微蚀剂的优点,而且拥有其独特的优点:微蚀处理的铜表面比传统微蚀剂处理的光亮;微蚀处理后暴露在空气中10 min,铜表面也不变色;微蚀处理后的元件没有原电池腐蚀现象发生;其工... 采用过硫酸盐和几种特别添加剂配制成的微蚀剂,不仅具有传统微蚀剂的优点,而且拥有其独特的优点:微蚀处理的铜表面比传统微蚀剂处理的光亮;微蚀处理后暴露在空气中10 min,铜表面也不变色;微蚀处理后的元件没有原电池腐蚀现象发生;其工作溶液比传统微蚀剂稳定;微蚀速率容易控制以满足不同的微蚀要求;微蚀处理不影响精密线路板和元件的尺寸。 展开更多
关键词 微蚀剂 速率 抛光 原电池腐
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MEMS加工技术及其工艺设备 被引量:4
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作者 童志义 《电子工业专用设备》 2004年第1期5-11,共7页
微电子机械和纳米技术的研究覆盖了亚微米到纳米尺寸的特征范围,它主要依靠光刻和图形转换设备和工艺获得,但又不仅限于半导体加工范畴。光学光刻设备、感应耦合等离子体刻蚀,金属的溅射涂覆,金属的等离子体增强CVD、介质隔离、掺杂注... 微电子机械和纳米技术的研究覆盖了亚微米到纳米尺寸的特征范围,它主要依靠光刻和图形转换设备和工艺获得,但又不仅限于半导体加工范畴。光学光刻设备、感应耦合等离子体刻蚀,金属的溅射涂覆,金属的等离子体增强CVD、介质隔离、掺杂注入、粒子柬微写设备和X射线源可以看作MEMS和纳米技术的机械加工手段,其各有独具的优势限制。现正被用于定制的MEMS器件到真空微电子器件和新颖的纳米工具的研究与开发应用。抗蚀剂喷涂技术为复杂形貌的MEMS器件光刻提供了高均匀性作图的厚胶基础。对于MEMS技术进入产业化的主要技术瓶颈-MEMS封装技术研究与开发已成为当今世界各国关注的热点。同时,对于MEMS器件的测试技术的研究,目前在国际上也引起了高度的重视。 展开更多
关键词 电子机械系统 纳米技术 光刻 电铸抗喷涂 机械加工 封装 测试
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Fabrication of curved micro structures on photoresist layer 被引量:1
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作者 Jae Sung YOON Tae-Jin JE +2 位作者 Doo-Sun CHOI Sung Hwan CHANG Kyung-Hyun WHANG 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第A01期100-103,共4页
A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension ... A novel fabrication process for micro patterns with curvature was introduced. The curved structures were made by compensating rectangular micro structures with liquid photoresist layer. Because of the surface tension of the liquid in micro scale, various shapes of meniscus can he made on the micro channels. The micro channels were made on the silicon suhstrate in advance, and then the liquid layer was coated on the micro channels. From the nature of liquid behavior, the curved patterns with smooth surface are obtained, which cannot be made easily with the conventional mechanical machining, as well as with the microfabrication processes, such as wet and dry etching. With this principle, it is expected that the smooth and curved surfaces can be made by simple processes and the results can be applied widely, such as optical patterns. 展开更多
关键词 micro pattern liquid layer MEMS micro channel silicon substrate
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Adsorption isotherm and inhibition effect of a synthesized di-(m-Formylphenol)-1,2-cyclohexandiimine on corrosion of steel X52 in HCl solution 被引量:5
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作者 A.karimi I.Danaee +1 位作者 H.Eskandari M.RashvanAvei 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第2期249-257,共9页
The potential of di-(m-Formylphenol)-1,2-cyclohexandiimine as an environmentally friendly corrosion inhibitor for steel was investigated in 1 mol/L HCl using potentiodynamic polarization, electrochemical impedance spe... The potential of di-(m-Formylphenol)-1,2-cyclohexandiimine as an environmentally friendly corrosion inhibitor for steel was investigated in 1 mol/L HCl using potentiodynamic polarization, electrochemical impedance spectroscopy and chronoamperometry measurements. All electrochemical measurements suggest that this compound is an excellent corrosion inhibitor for mild steel and the inhibition efficiency increases with the increase in inhibitor concentration. The effect of temperature on the corrosion behavior of mild steel with the addition of the Schiff base was studied in the temperature range from 25 °C to 65 °C. It is found that the adsorption of this inhibitor follows the Langmuir adsorption isotherms. The value of activation energy and the thermodynamic parameters such as ΔHads, ΔSads, Kads and ΔGads were calculated by the corrosion currents at different temperatures using the adsorption isotherm. The morphology of mild steel surface in the absence and presence of inhibitor was examined by scanning electron microscopy(SEM) images. 展开更多
关键词 CORROSION INHIBITOR Schiffbase adsorption Langmuir adsorption isotherm
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Feasible Development of a Carbon-Based MEMS Using a MEMS Fabrication Process
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作者 Junji Sone 《Journal of Chemistry and Chemical Engineering》 2014年第11期1082-1088,共7页
We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG (highly oriented pyrolytic graphite) c... We aimed to develop a process technology for constructing a carbon-based micro-electromechanical system that does not require a high-temperature and high-energy process. A HOPG (highly oriented pyrolytic graphite) crystal microsheet was prepared by exfoliation. Cantilevers and doubly clamped beams were patterned using a photoresist. The HOPG microsheet was attached by using a tantalum layer. We fabricated cantilevers and a doubly clamped beam by controlling the thickness of the HOPG microsheet and then measured the first resonance frequency. The measurements suggest a need to improve the stiffness of the beam. 展开更多
关键词 Carbou-MEMS (micro-electromechanical systems) CANTILEVER trial fabrication resonance frequency Raman spectra HOPG.
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Protection and Functionalizing of Stainless Steel Surface by Graphene Oxide-Polypyrrole Composite Coating 被引量:1
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作者 Jayanta Mondal Margus Marandi +3 位作者 Jekaterina Kozlova Maido Merisalu Ahti Niilisk Vaino Sammelselg 《Journal of Chemistry and Chemical Engineering》 2014年第8期786-793,共8页
The corrosion inhibition of metallic substrates is a prime issue for many potential applications where corrosion plays a crucial role. The development of carbon based on functionalized coatings could increase the life... The corrosion inhibition of metallic substrates is a prime issue for many potential applications where corrosion plays a crucial role. The development of carbon based on functionalized coatings could increase the lifetime of metallic substrates by inhibiting the corrosion process. Present work is an effort to develop a corrosion inhibiting composite coating of graphene oxide and polypyrrole for AISI (American Iron and Steel Institute) type 304 stainless steel substrates. The electrochemical galvanostatic deposition process was applied for coating development. The coating morphology and ability to cover the substrate surface was analyzed with a high-resolution scanning electron microscope. The coating's structural and electronic properties were analyzed with Raman spectroscopy. The investigation of corrosion inhibition involved open circuit potential, Tafel, and voltammetry analysis. The standard salt test ASTM (American Society for Testing and Materials) G48A for stainless steel substrate has also been studied. Significant enhancement of corrosion potential as well as pitting potential for the composite coated substrates has been noted. Furthermore, corrosion and breakdown potential increased upon changing the material from graphene oxide to its composite coating. During the salt test analysis, the durability of the composite coating was noted up to 72 h, which is the standard time scale. Based on experimental analysis, this composite material can be used as an effective carbon based on functionalized corrosion inhibitor for stainless steel substrates to increase their lifetime. 展开更多
关键词 Graphene oxide graphene oxide-polypyrrole composite corrosion inhibition.
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A novel restricted-flow etching method for glass
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作者 Hai-bo XIE Yi ZHENG +2 位作者 Yu-run FAN Xin FU Hua-yong YANG 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2009年第11期1601-1608,共8页
This paper presents a novel micro fabrication method based on the laminar characteristics of micro-scale flows. Therein the separator and etchant are alternatively arranged in micro channels to form multiple laminar s... This paper presents a novel micro fabrication method based on the laminar characteristics of micro-scale flows. Therein the separator and etchant are alternatively arranged in micro channels to form multiple laminar streams, and the etchant is located at the site where the reaction is supposed to occur. This new micro fabrication process can be used for the high aspect ratio etching inside a microchannel on glass substrates. Furthermore, the topography of microstructure patterned by this method can be controlled by changing the flow parameters of the separator and etchant. Experiments on the effects of flow parameters on the aspect ratio, side wall profile and etching rate were carried out on a glass substrate. The effect of flow rates on the etching rate and the micro topography was analyzed. In addition, experiments with dynamical changes of the flow rate ratio of the separator and etchant showed that the verticality of the side walls of microstructures can be significantly improved. The restricted flowing etching technique not only abates the isotropic effect in the traditional wet etching but also significantly reduces the dependence on expensive photolithographic equipment. 展开更多
关键词 MICROFLUIDICS Micro fabrication ETCHING Laminar flow
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