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硅表面电沉积MoS_2薄膜及其微观摩擦性能研究 被引量:6
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作者 张旭海 蒋建清 江静华 《摩擦学学报》 EI CAS CSCD 北大核心 2007年第4期303-307,共5页
以单晶硅片为基片,采用电化学沉积工艺通过阴极还原硫代钼酸根制备MoS2薄膜,利用光学显微镜、扫描电子显微镜、X射线衍射仪、俄歇电子能谱仪以及原子力显微镜表征薄膜结构,并研究其微观摩擦磨损性能.结果表明:所制备的薄膜为纳米/亚微... 以单晶硅片为基片,采用电化学沉积工艺通过阴极还原硫代钼酸根制备MoS2薄膜,利用光学显微镜、扫描电子显微镜、X射线衍射仪、俄歇电子能谱仪以及原子力显微镜表征薄膜结构,并研究其微观摩擦磨损性能.结果表明:所制备的薄膜为纳米/亚微米厚度,表面光滑致密,结构为非晶态,由钼、硫和氧元素构成;微米厚度的薄膜表面粗糙度增加,薄膜易开裂,结合性差;沉积MoS2薄膜的硅表面的最小摩擦力约为原始硅表面的1/2;沉积MoS2可以使硅表面的粘着能减少50%左右,从而使其微观摩擦力降低. 展开更多
关键词 电化学沉积 MoS2薄膜微机电系统(MEMS) 微观摩擦性能
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类金刚石薄膜微观摩擦性能的FFM评价——针尖尺度效应 被引量:2
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作者 范真 丁建宁 +2 位作者 解国新 凌智勇 李长生 《中国机械工程》 EI CAS CSCD 北大核心 2006年第16期1730-1734,共5页
采用等离子体增强气相沉积制备了类金刚石薄膜,利用原子力显微镜的轻敲模式观察了它们的形貌,并在考虑外加载荷和扫描速度的基础上,用摩擦力显微镜(FFM)对比考察了尖端探针和平头探针对类金刚石薄膜摩擦性能评价的影响。结果表明:类金... 采用等离子体增强气相沉积制备了类金刚石薄膜,利用原子力显微镜的轻敲模式观察了它们的形貌,并在考虑外加载荷和扫描速度的基础上,用摩擦力显微镜(FFM)对比考察了尖端探针和平头探针对类金刚石薄膜摩擦性能评价的影响。结果表明:类金刚石薄膜的表面粗糙度随基底负偏压的增加而减小;存在于探针和类金刚石薄膜之间的水膜对尖端探针的剪切阻力贡献较大,且尖端探针测得的摩擦力变化趋势受扫描速度影响显著;水膜对平头探针起着不同形式的润滑作用,从而导致平头探针和类金刚石薄膜之间摩擦性能的速度效应存在差异;利用摩擦力显微镜考察类金刚石薄膜的摩擦性能时,存在着明显的针尖尺寸效应。 展开更多
关键词 类金刚石薄膜 微观摩擦性能 摩擦力显微镜 针尖尺寸效应
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单晶硅表面改性及其微观摩擦学性能研究进展 被引量:15
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作者 孙蓉 徐洮 薛群基 《摩擦学学报》 EI CAS CSCD 北大核心 2004年第4期382-385,共4页
评述了单晶硅表面改性及其微观摩擦磨损性能研究现状和进展,就单晶硅微观机械性能和摩擦磨损性能、单晶硅表面沉积薄膜和氧化层的微观机械和摩擦学性能及硅材料表面离子注入和表面纳米化等相关研究进行了归纳总结;指出应当继续深化硅材... 评述了单晶硅表面改性及其微观摩擦磨损性能研究现状和进展,就单晶硅微观机械性能和摩擦磨损性能、单晶硅表面沉积薄膜和氧化层的微观机械和摩擦学性能及硅材料表面离子注入和表面纳米化等相关研究进行了归纳总结;指出应当继续深化硅材料表面改性技术及改性层微观摩擦学性能的研究,特别是应当加强硅材料表面离子注入及表面纳米化的研究,从而满足MEMS/NEMS等高技术领域的应用和发展需要. 展开更多
关键词 MEMs/NEMs 硅材料 表面改性 微观摩擦性能
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十八烯反应膜的制备及其微观摩擦学性能研究 被引量:1
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作者 周金芳 任忠海 杨生荣 《摩擦学学报》 EI CAS CSCD 北大核心 2002年第5期399-401,共3页
通过紫外激发在氢终止的单晶硅表面制得了十八烯的反应膜 ,并采用接触角测定仪、红外光谱仪、椭圆偏光仪及原子力显微镜等表征了薄膜的结构和摩擦学特性 .结果表明 ,在紫外光照射下 ,十八烯在硅表面通过键合生成有序反应膜 。
关键词 微观摩擦性能 十八烯 反应膜 氢终止硅表面 AFM 微型机械
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氨基表面组装薄膜的构筑及其微观摩擦学特性 被引量:1
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作者 陈丽 《润滑与密封》 CAS CSCD 北大核心 2013年第5期41-45,共5页
以二乙烯三胺基丙基三甲氧基硅烷(TA)作为分子底层,采用两步组装的方法在单晶硅基底表面制备一系列相同结构不同分子链长的自组装双层薄膜。利用椭圆偏光测厚仪、接触角测定仪、原子力显微镜(AFM)等对薄膜的形成及微观摩擦力进行表征。... 以二乙烯三胺基丙基三甲氧基硅烷(TA)作为分子底层,采用两步组装的方法在单晶硅基底表面制备一系列相同结构不同分子链长的自组装双层薄膜。利用椭圆偏光测厚仪、接触角测定仪、原子力显微镜(AFM)等对薄膜的形成及微观摩擦力进行表征。研究结果表明,低表面能的疏水性末端基团有利于降低薄膜的摩擦力和摩擦因数;组装分子碳链长度的增加有助于形成有序性强和致密度高的组装薄膜,从而减小薄膜表面的摩擦力和摩擦因数。 展开更多
关键词 自组装膜 堆积密度 表面能 微观摩擦性能
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Influence of Ti target current on microstructure and properties of Ti-doped graphite-like carbon films 被引量:7
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作者 王永欣 王立平 薛群基 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第6期1372-1380,共9页
Ti-doped graphite-like carbon (Ti-GLC) films were synthesized successfully by magnetron sputtering technique. The compositions, microstructures and properties of the Ti-doped GLC films dependent on the parameter of ... Ti-doped graphite-like carbon (Ti-GLC) films were synthesized successfully by magnetron sputtering technique. The compositions, microstructures and properties of the Ti-doped GLC films dependent on the parameter of Ti target current were systemically investigated by Raman spectra, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD), scanning electron microscopy (SEM), atomic force microscopy (AFM), nanoindentation and ball-on-disk tribometer. With the increase of the Ti target current, the ratio of sp2 bond and the content of Ti as well as the film hardness and compressive internal stress increase, but the high content of the Ti would result in the loose film due to the formation of the squamose structure. Less incorporated Ti reduces the friction of the GLC film in dry-sliding condition, while pure GLC film exhibits the lowest friction coefficient in water-lubricated condition. Ti-GLC film deposited with low Ti target current shows high wear resistance in both dry-sliding and water-lubricated conditions. 展开更多
关键词 Ti-doped graphite-like carbon film MICROSTRUCTURE tribological performance target current
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Preparation and mechanical properties of in situ Al_2O_3/Al composites by adding NH_4AlO(OH)HCO_3
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作者 姜澜 崔焱洲 +2 位作者 史玉娟 丁友东 袁芳兰 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2011年第10期2181-2185,共5页
Aluminium matrix composite reinforced by Al2O3 particles was produced by adding NH4AlO(OH)HCO3 into molten aluminum.The mechanical properties and wear behavior of the as-fabricated composites were studied.The result... Aluminium matrix composite reinforced by Al2O3 particles was produced by adding NH4AlO(OH)HCO3 into molten aluminum.The mechanical properties and wear behavior of the as-fabricated composites were studied.The results show that during stirring γ-Al2O3 particles were formed via decomposition reaction of NH4AlO(OH)HCO3,and the distribution of Al2O3 particles is more uniform in the matrix aluminum than directly added Al2O3 into molten aluminum.The density and the hardness values of the as-fabricated composites increase with increasing the particle volume fraction,while the tensile strength of the composites decreases with increasing the volume fraction of the Al2O3 particles.The wear rate of the composites decreases with increasing the volume fraction of the particle and loading.The in situ formed Al2O3/Al composite by adding NH4AlO(OH)HCO3 shows more superior mechanical and wear behaviors than that prepared by directly adding Al2O3 particles. 展开更多
关键词 aluminum matrix composite NH4AlO(OH)HCO3 A12O3 particles microstructure HARDNESS tensile strength wear behavior
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Achieving High-Quality Aluminium Alloy Welded Joint with Fine Grains Using Submerged Friction Stir Welding
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作者 YOUSSEF Elmeknasssi CAO Fujun +1 位作者 FENG Xiaomei SHEN Yifu 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI CSCD 2022年第S01期59-64,共6页
The purpose of this study is to reveal the microstructure and mechanical properties of friction stir welding(FSW)joints prepared in water/air.For comparable analysis,the submerged FSW(SFSW)and conventional FSW are bot... The purpose of this study is to reveal the microstructure and mechanical properties of friction stir welding(FSW)joints prepared in water/air.For comparable analysis,the submerged FSW(SFSW)and conventional FSW are both conducted on 6061-T6 aluminum alloy plates at the combination rotation speed of 800 r/min and the traverse rate of 50 mm/min.The results show that a greatest grain refinement is achieved by SFSW,which is remarkably smaller than that of the base material(BM)and air FSW(AFSW)samples,leading to a significant improvement of tensile strength from 202.5 MPa in the AFSW sample to 232 MPa in the SFSW sample. 展开更多
关键词 submerged friction stir welding(SFSW) air friction stir welding(AFSW) mechanical properties MICRO-STRUCTURE
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