A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q-factor,UV-LIGA,dry etching technique,fine...A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q-factor,UV-LIGA,dry etching technique,fine polishing and electroplating technique are adopted.The dimensions of the inductor are 1500μm×900μm×70μm,having 41 turns with a coil width of 20μm separated by 20μm spaces and a high aspect ratio of 3.5∶1.The maximum measured inductance of the inductor is 6.17nH with a Q-factor of about 6.展开更多
We study the quantum fluctuations of the charge and current of two L-C dissipative mesoscopic circuit with the mutual inductance in the vacuum state.Our results show that the system state will evolve to a squeezed coh...We study the quantum fluctuations of the charge and current of two L-C dissipative mesoscopic circuit with the mutual inductance in the vacuum state.Our results show that the system state will evolve to a squeezed coherent state under the effect of external source.We find that the squeezing amplitude parameter is relative to the parameters of circuit and the mutual-inductance coefficient in the existence of dissipation.When the circuit has no dissipation or there is complete coupling between two meshes,the squeezing amplitude parameter only depends on the capacitance's ratio.展开更多
Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transf...Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transformers. In the process of fabrication, UV-LIGA, dry. etching technique, fine polishing and eleetroplating techniques have been adopted to achieve high performance mieminduetor. Experimental results show that both types of the induetors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.展开更多
文摘A solenoid-type inductor for high frequency application is realized using a micro-electro-mechanical systems (MEMS) technique.In order to achieve a high inductance value and Q-factor,UV-LIGA,dry etching technique,fine polishing and electroplating technique are adopted.The dimensions of the inductor are 1500μm×900μm×70μm,having 41 turns with a coil width of 20μm separated by 20μm spaces and a high aspect ratio of 3.5∶1.The maximum measured inductance of the inductor is 6.17nH with a Q-factor of about 6.
文摘We study the quantum fluctuations of the charge and current of two L-C dissipative mesoscopic circuit with the mutual inductance in the vacuum state.Our results show that the system state will evolve to a squeezed coherent state under the effect of external source.We find that the squeezing amplitude parameter is relative to the parameters of circuit and the mutual-inductance coefficient in the existence of dissipation.When the circuit has no dissipation or there is complete coupling between two meshes,the squeezing amplitude parameter only depends on the capacitance's ratio.
基金Supported by High Technology. Research and Development Program （No. 2004AA302042）, the Nanotechnology Program of Shanghai Science ＆ Technology Committee （No. 0352nm014）, the National Natural Science Foundation of China （No. 50275096）, Samsung Advanced Institute of Technology. （SALT）, Sansung Electronics Co., Ltd., and Shanghai-Applied Materials Research and Development Fund （No.0515）.
文摘Two micromachined solenoid-type inductors with different electroplated core structures, ellipse and rectangle, were fabricated, tested and compared in order to reach optimum designs for integrated induetoes and transformers. In the process of fabrication, UV-LIGA, dry. etching technique, fine polishing and eleetroplating techniques have been adopted to achieve high performance mieminduetor. Experimental results show that both types of the induetors are characterized by high inductance, Q-factor and low electrical resistance. While the inductance of the inductor with rectangular magnetic core is slightly higher than that with elliptical magnetic core, the quality factor of the latter is larger than that of the former.
