A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabr...A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.展开更多
In this paper,we report the frequency comb response experimentally and analytically in a rhombic micro-resonator with parametrical modulation.When the electrostatically actuated rhombic micro-resonator is modulated ax...In this paper,we report the frequency comb response experimentally and analytically in a rhombic micro-resonator with parametrical modulation.When the electrostatically actuated rhombic micro-resonator is modulated axially by a low-frequency periodic excitation,a comb-like vibration response with few equidistant positioned fingers in the frequency domain is observed.The finger spacing of frequency comb response is exactly consistent with modulation frequency and the number and amplitude of the fingers can be tuned by modulation strength.A mixed frequency comb with extra comb fingers is further generated when the resonator is modulated simultaneously by two different low-frequency excitation signals.By adjusting the relation of the two modulation frequencies,unequal spacing frequency combs are achieved for the first time,which leads to a more flexible tunability of the comb spacing for different applications.Theoretical analysis based on the dynamic model well explains the corresponding observations.展开更多
文摘A novel into-plane rotating rnicromirror actuated by a hybrid electrostatic driving structure is presented. The hybrid driving structure is made up of a planar plate drive and a vertical comb drive. The device is fabricated in SOI substrate by using a bulk-and-surface mixed silicon micromachining process. As demonstrated by experiment, the novel driving structure can actuate the mirror to achieve large-range continuous rotation as well as spontaneous 90°rotation induced by the pull-in effect. The continuous rotating range of the micromirror is increased to about 46° at an increased yielding voltage. The measured yielding voltages of the mirrors with torsional springs of 1 and 0.5μm in thickness are 390 - 410V and 140 - 160V, respectively. The optical insertion loss has also been measured to be --1.98dB when the mirror serves as an optical switch.
基金the National Natural Science Foundation of China(Grant Nos.12172323 and 52075432)Zhejiang Provincial Natural Science Foundation of China(Grant No.LZ22A020003)+1 种基金Fundamental Research Funds for the Central Universities(Grant No.G2022KY05104)Program for Innovation Team of Shaanxi Province(Grant No.2021TD-23).
文摘In this paper,we report the frequency comb response experimentally and analytically in a rhombic micro-resonator with parametrical modulation.When the electrostatically actuated rhombic micro-resonator is modulated axially by a low-frequency periodic excitation,a comb-like vibration response with few equidistant positioned fingers in the frequency domain is observed.The finger spacing of frequency comb response is exactly consistent with modulation frequency and the number and amplitude of the fingers can be tuned by modulation strength.A mixed frequency comb with extra comb fingers is further generated when the resonator is modulated simultaneously by two different low-frequency excitation signals.By adjusting the relation of the two modulation frequencies,unequal spacing frequency combs are achieved for the first time,which leads to a more flexible tunability of the comb spacing for different applications.Theoretical analysis based on the dynamic model well explains the corresponding observations.
