连线设计对四端法小电阻测试准确性的影响

阐述对于半导体晶圆的小电阻结构,通常采用四端法进行封装前的电性测试。在测试过程中,探针卡上的悬臂针会向前滑行到与其针痕方向垂直的金属引线位置,严重影响电性测试的准确性。通过连线设计改变传统的测试结构,避免在悬臂针前方的金属走线,有效降低非正常测试的发生。实验结果表明,改进后的结构在进行四端法测试时准确性增加38.5%,显著提高晶圆验收测试机台的测试效率和产能。

Transmission Properties of Fiber Probes

Transmission properties of tapered fiber including right cone fiber and bend optical fiber are discussed.The transmission efficiency of the tapered fiber is measured.The curve of transmission efficiency versus taper cone angle is given.By the scalar wave equation and Gaussian approximation,transmission properties of the two kinds of tapered fibers are analyzed,the power losses caused by taper cone angle and by the bending are also calculated.From the experiments and theoretical analysis,it could come to a conclusion that the wider the taper cone angle is,the higher the transmission efficiency will be.