A VDMOS integrated in a 170V scan-driver chip of a plasma display panel （PDP） is described,which is based on epitaxial bipolar-CMOS-DMOS （BCD） technology. Some key considerations and parameters of the design are d...A VDMOS integrated in a 170V scan-driver chip of a plasma display panel （PDP） is described,which is based on epitaxial bipolar-CMOS-DMOS （BCD） technology. Some key considerations and parameters of the design are discussed. The thickness of epitaxial layer is 17μm, the area of a single VDMOS structure cell is 324μm^2, and only 18 photoetching steps are needed in the development process. It is also compatible with standard CMOS, bipo- lar,and p-LDMOS devices. The breakdown voltage of VDMOS in the process control module （PCM） is more than 200V. Five kinds of VDMOS modules are integrated in 64 channel PDP scan-driver IC, and on-line system verifica- tion is done on a LG-model-42v6 PDP.展开更多
文摘A VDMOS integrated in a 170V scan-driver chip of a plasma display panel （PDP） is described,which is based on epitaxial bipolar-CMOS-DMOS （BCD） technology. Some key considerations and parameters of the design are discussed. The thickness of epitaxial layer is 17μm, the area of a single VDMOS structure cell is 324μm^2, and only 18 photoetching steps are needed in the development process. It is also compatible with standard CMOS, bipo- lar,and p-LDMOS devices. The breakdown voltage of VDMOS in the process control module （PCM） is more than 200V. Five kinds of VDMOS modules are integrated in 64 channel PDP scan-driver IC, and on-line system verifica- tion is done on a LG-model-42v6 PDP.
