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扫描探针声显微镜原理及其应用 被引量:3
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作者 占左玲 刘世国 +1 位作者 蔡微 徐平 《电子显微学报》 CAS CSCD 2008年第2期167-171,共5页
将声学检测技术与扫描探针显微术相结合,构成的扫描探针声显微镜,不仅可以检测材料表面、亚表面和内部的微小缺陷,还可以分析样品的弹性特性、电特性等物理性能,同时还具有分辨率高的特点,在材料科学和生命科学等领域具有很高的应用价... 将声学检测技术与扫描探针显微术相结合,构成的扫描探针声显微镜,不仅可以检测材料表面、亚表面和内部的微小缺陷,还可以分析样品的弹性特性、电特性等物理性能,同时还具有分辨率高的特点,在材料科学和生命科学等领域具有很高的应用价值。目前,得到实际应用的扫描探针声显微镜主要有扫描隧道声显微镜和原子力声显微镜。本文介绍了这两类显微镜的基本工作原理,并对扫描探针声显微镜今后的发展方向进行了探讨。 展开更多
关键词 扫描探针声显微镜 扫描隧道显微镜 原子力显微镜
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Scanning near-field acoustic microscope and its application
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作者 XU Ping,CAI Wei & WANG RongMing Key Laboratory of Micro-nano Measurement-Manipulation and Physics (Ministry of Education) Department of Physics,Beihang University,Beijing 100191,China 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第1期126-130,共5页
Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or de... Scanning near-field acoustic microscope (SNAM) combines the ultrasonic detection technology with scanning near-field microscopy. The main characteristic of such microscope is that the acoustic wave is produced or detected in near-field area whether ultrasonic transducer acts as generator or detector. The resolution of SNAM can reach to nanometer scale. First, two typical SNAMs, scanning electron acoustic Inicroscope and scanning probe acoustic microscope, will be introduced in this paper. The working principle of our homemade SNAM based on a commercial scanning probe microscope will be reported, together with some recent results from this homemade SNAM. 展开更多
关键词 scanning near-field acoustic microscope ultrasonic detection technology scanning probe microscopy
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