Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted...Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted along the urtiaxial or biaxial direction,which limited the range of light reflection.In this·paper,a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established.The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory.The results of three kinds of mirror deflection directions are compared and analyzed.The results show the significant differences in the torsion models with different deflection axis directions.When the deflection angle along the oblique axis reaches 45°,the instability voltage is the smallest.The pull-in instability voltage increases with the increment ofphonon-phason coupling elastic modulus and phason elastic modulus.The perrriittivity of quasicrystal,the strain gradient parameter,and the air damping influence the torsion of the micromirror dynaniic system.A larger pull-in instability voltage generates with the decrease of surface distributed forces.展开更多
基金supported by the National Natural Science Foundation of China(Grant Nos.11572191,51701117,and 51779139).
文摘Electrostatic torsional micromirrors are widely applied in the fields·of micro-optical switches,optical attenuators,optical scanners,and optical displays.In previous lectures,most of the micromirrors were twisted along the urtiaxial or biaxial direction,which limited the range of light reflection.In this·paper,a quasicrystal torsional micromirror that can be deflected in any direction is designed and the dynamic model of the electrostatically driven micromirror is established.The static and dynamic phenomena and pull-in characteristics are analyzed through the numerical solution of the strain gradient theory.The results of three kinds of mirror deflection directions are compared and analyzed.The results show the significant differences in the torsion models with different deflection axis directions.When the deflection angle along the oblique axis reaches 45°,the instability voltage is the smallest.The pull-in instability voltage increases with the increment ofphonon-phason coupling elastic modulus and phason elastic modulus.The perrriittivity of quasicrystal,the strain gradient parameter,and the air damping influence the torsion of the micromirror dynaniic system.A larger pull-in instability voltage generates with the decrease of surface distributed forces.
