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低频射电望远镜阵列宽视场成像技术研究 被引量:5
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作者 劳保强 安涛 +2 位作者 陈骁 伍筱聪 陆扬 《天文学报》 CSCD 北大核心 2017年第5期108-129,共22页
低频射电望远镜阵列宽视场成像正面临着一系列难点问题,其中最关键的问题是非共面基线效应.它的存在使得忽略w项将导致最终图像出现畸变,且随着视场的增大而加重.综述并剖析了几种w项改正算法及其技术原理,并分析了它们的计算成本和计... 低频射电望远镜阵列宽视场成像正面临着一系列难点问题,其中最关键的问题是非共面基线效应.它的存在使得忽略w项将导致最终图像出现畸变,且随着视场的增大而加重.综述并剖析了几种w项改正算法及其技术原理,并分析了它们的计算成本和计算复杂度,进而分析比较了它们的优缺点.以平方公里阵(Square Kilometre Array,SKA)射电望远镜第1阶段低频阵列为研究对象,选取faceting和w-projection成像算法进行了仿真实验.与传统的二维傅立叶变换成像算法进行对比,分析了它们的成像质量和正确性,结果表明这两种算法在宽视场成像方面均明显优于二维傅立叶变换方法.还具体分析了分面(facet)的数目对faceting成像质量和运行时间的影响,以及w步数对w-projection成像质量和运行时间的影响,表明facet数目和w步数的选择必须合理.最后,分析了数据量大小对这两种成像算法运行时间的影响,表明这两种算法在进行海量数据处理前,需要作算法优化改进.研究结果为后续进一步综合分析宽视场成像技术以及这些技术的实用性研究提供了有价值的参考. 展开更多
关键词 仪器:干涉 方法:观测 技术:干涉测量 技术:图像处理 射电连续谱:普通
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基于天文开源软件的卫星干涉测量数据处理系统 被引量:1
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作者 朱梦祎 吴元伟 +7 位作者 姚当 弓剑军 刘佳 李西顺 马浪明 韦沛 雷辉 杨旭海 《天文学报》 CAS CSCD 北大核心 2021年第4期84-101,共18页
VLBI(Very Long Baseline Interferometry)技术观测卫星需要对干涉测量数据进行相关和后处理,通过相关、时延校准、条纹搜索,最终得到卫星的基线几何时延.基于天文开源软件建立起一套卫星干涉测量数据处理系统.该系统可工作在实时和事... VLBI(Very Long Baseline Interferometry)技术观测卫星需要对干涉测量数据进行相关和后处理,通过相关、时延校准、条纹搜索,最终得到卫星的基线几何时延.基于天文开源软件建立起一套卫星干涉测量数据处理系统.该系统可工作在实时和事后两种状态,实现相关、中性大气、电离层、钟模型以及仪器硬件的时延校准、条纹搜索、生成基线时延和时延率序列.使用该系统处理北斗GEO(Geosynchronous Earth Orbit)卫星的干涉测量试验数据,得到了精度在1-2 ns量级的卫星基线时延序列. 展开更多
关键词 仪器:干涉 方法:数据分析 方法:观测 技术:干涉测量
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基于精密光程差调制的时域干涉信号闭合相位检测方法研究 被引量:1
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作者 唐琳琳 侯永辉 +1 位作者 魏炜 徐腾 《天文学报》 CSCD 北大核心 2019年第6期70-81,共12页
闭合相位法是实现长基线恒星光干涉高分辨成像的重要技术手段之一,获得精确的闭合相位信息是进行光干涉图像重构的先决条件.提出一种基于精密光程差调制的时域干涉信号闭合相位检测方法,在3路干涉臂上进行非冗余精密光程调制,并通过多... 闭合相位法是实现长基线恒星光干涉高分辨成像的重要技术手段之一,获得精确的闭合相位信息是进行光干涉图像重构的先决条件.提出一种基于精密光程差调制的时域干涉信号闭合相位检测方法,在3路干涉臂上进行非冗余精密光程调制,并通过多次干涉测量结合数据拟合的方法消除光程差调制中存在的正弦误差,使得光程调制的精度达到20 nm以内.引入高速探测器件提升时域干涉信号的采样频率,对探测器上获得的时域干涉信号进行傅立叶变换处理,获得3路干涉臂精确的闭合相位信息.室内实验结果表明,基于精密光程调制的时域信号闭合相位计算精度可以达到1/50波长以内. 展开更多
关键词 仪器:探测器 技术:干涉测量 闭合相位 光程差调制
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基于分布式执行框架的低频射电干涉阵列成像管线优化 被引量:1
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作者 韦耀杰 符杰林 劳保强 《天文学报》 CAS CSCD 北大核心 2023年第6期99-112,共14页
平方公里阵列(Square Kilometre Array,SKA)项目是建设全球最大射电望远镜的国际合作项目,其灵敏度和测量速度将比当前所有的射电望远镜都要高出一个数量级.连续谱巡天是SKA的主要观测模式之一,基于连续谱成像建立巡天区域的标准星图,... 平方公里阵列(Square Kilometre Array,SKA)项目是建设全球最大射电望远镜的国际合作项目,其灵敏度和测量速度将比当前所有的射电望远镜都要高出一个数量级.连续谱巡天是SKA的主要观测模式之一,基于连续谱成像建立巡天区域的标准星图,将能为后续天文科学研究奠定重要基础.银河系与河外星系全天默奇森宽场阵列拓展巡天(GaLactic and Extragalactic All-sky Murchison Widefield Array survey eXtended,GLEAM-X)是2018--2020年利用SKA先导望远镜默奇森宽场阵列(Murchison Wide-field Array,MWA)二期拓展阵列开展的新的射电连续谱巡天项目,观测期间积累了大量的低频巡天观测数据.海量观测数据的自动化、大批量处理是SKA望远镜项目所面临的的最大挑战和难题之一,基于分布式执行框架的成像管线优化经验将有助于解决海量数据处理问题.详细介绍了GLEAM-X成像管线并对其进行整合和改进,在中国SKA区域中心原型机(China SKA Regional Centre Prototype,CSRC-P)上实现了多条管线并行处理,使用GLEAM-X观测数据验证成像管线系统的部署和测试其正确性.随后为了优化管线提高处理效率,使用数据激活流图形引擎(Data Activated Liu Graph Engine,DALiuGE),将成像管线集成入DALiuGE执行框架中实现了管线的自动化分布式并行处理.通过性能测试与结果分析表明,基于DALiuGE执行框架进行优化的成像管线相较于传统的并行方式具有更好的性能优势、更灵活的适配性和可扩展性,可支持未来SKA第一阶段试运行期间的大规模连续谱成像实验. 展开更多
关键词 仪器:干涉 方法:观测 技术:干涉测量 技术:图像处理 射电连续谱:普通
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基于调频广播信号的空间碎片探测方法
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作者 张翔 HANCOCK Paul +2 位作者 WAYTH Randall 季江徽 马月华 《天文学报》 CSCD 北大核心 2018年第5期109-121,共13页
空间碎片对人造卫星和飞船的威胁日益增长.为了保持一个安全的空间环境,需要寻找成本低而又准确的空间天体探测和追踪方法.前些年,使用射电望远镜作为被动雷达,探测空间碎片反射的调频广播信号的可能性已经被讨论过,并且月球和国际空间... 空间碎片对人造卫星和飞船的威胁日益增长.为了保持一个安全的空间环境,需要寻找成本低而又准确的空间天体探测和追踪方法.前些年,使用射电望远镜作为被动雷达,探测空间碎片反射的调频广播信号的可能性已经被讨论过,并且月球和国际空间站反射的信号已经被默奇森大视场射电阵(MWA)探测到.介绍MWA探测到的卫星反射广播信号事件,论证MWA有能力探测600 km高度处0.1 m量级大小的空间碎片,位置误差在10 km左右. 展开更多
关键词 射电连续辐射:普通 空间碎片 技术:干涉
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uv-faceting成像并行算法研究 被引量:2
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作者 劳保强 安涛 +1 位作者 于昂 郭绍光 《天文学报》 CSCD 北大核心 2019年第2期25-40,共16页
uv-faceting成像是目前广泛使用的大视场成像技术之一,将被考虑应用于平方公里阵列(Square Kilometre Array, SKA)第1阶段(简称SKA1)低频阵列的数据处理当中.由于SKA1产生的原始数据规模空前巨大,直接使用uv-faceting成像进行数据处理... uv-faceting成像是目前广泛使用的大视场成像技术之一,将被考虑应用于平方公里阵列(Square Kilometre Array, SKA)第1阶段(简称SKA1)低频阵列的数据处理当中.由于SKA1产生的原始数据规模空前巨大,直接使用uv-faceting成像进行数据处理效率将会非常低.为此,提出了基于MPI (Message Passing Interface)+OpenMP (Open MultiProcessing)的uv-faceting成像算法和基于MPI+CUDA (Compute Uni?ed Device Architecture)的uv-facteing成像算法,对该算法中最耗时的数据读取和栅格化(gridding)这两个步骤进行并行优化.验证性结果显示提出的两种算法得到的结果与当前主流的数据处理软件(Common Astronomy Software Applications, CASA)得到的结果基本相同,表明提出的两种算法基本正确.对准确率和总运行时间的分析表明,无论在正确率还是运行速度上MPI+CUDA的方法比MPI+OpenMP的方法更优.性能测试结果表明提出的算法有效且具有一定的可拓展性. 展开更多
关键词 仪器:干涉 方法:观测 技术:干涉测量 技术:图像处理 射电连续谱:普通
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脉冲星B0329+54的S/X双频CVN观测
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作者 陈文 江悟 +2 位作者 李志玄 徐永华 汪敏 《天文学报》 CSCD 北大核心 2015年第6期658-666,共9页
利用CVN(Chinese VLBI Network)对脉冲星B0329+54进行了首次S/X双频观测,观测采用相位参考模式,频段为S/X双频16通道观测,数据采集终端是CDAS(Chinese Data Acquirement System),单通道带宽16 MHz.使用上海VLBI(very long baseline inte... 利用CVN(Chinese VLBI Network)对脉冲星B0329+54进行了首次S/X双频观测,观测采用相位参考模式,频段为S/X双频16通道观测,数据采集终端是CDAS(Chinese Data Acquirement System),单通道带宽16 MHz.使用上海VLBI(very long baseline interferometry)中心的Di FX(Distributed FX)相关处理机对数据进行相关处理.利用Di FX特有的Pulsar Binning模式,以提高数据信噪比.对观测数据处理后得到了S/X两波段的高分辨率图像和位置信息,与前人VLBI结果对比显示观测结果较为符合. 展开更多
关键词 仪器:高角分辨率 仪器:干涉 技术:高角分辨率 技术:干涉 脉冲星:普通
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基于VGOS单基线的UT1测定能力评估
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作者 姚当 张志斌 +1 位作者 李金岭 王广利 《天文学报》 CAS CSCD 北大核心 2023年第1期25-33,共9页
对2021年VLBI (Very Long Baseline Interferometry)全球观测系统(VLBI Global Observing System,VGOS)单基线开展的1 h世界时(Universal Time, UT1)加强观测数据进行分析,结果表明, VGOS单基线测得的UT1与IERS (International Earth Ro... 对2021年VLBI (Very Long Baseline Interferometry)全球观测系统(VLBI Global Observing System,VGOS)单基线开展的1 h世界时(Universal Time, UT1)加强观测数据进行分析,结果表明, VGOS单基线测得的UT1与IERS (International Earth Rotation Service) C04序列提供的UT1之差的RMS (Root Mean Square)为25.3μs,优于传统S/X双频段UT1加强观测(Intensive observation, INT1)试验的28.2μs,且UT1的平均形式精度提高1倍.因VGOS单基线1 h观测数目比INT1多1倍,其测得的UT1受极移误差的影响更加稳定,每100μas的极移误差将对UT1引入2.8μs的偏移.此外分析了VGOS 30 min观测数据,除平均形式精度变差外, UT1测量结果与1 h结果相当,表明VGOS单基线30 min观测可用于UT1的超快速服务.同时分析和评估了2021年国内佘山与南山13 m VGOS基线的UT1加强观测能力,统计得到8次观测的RMS为46.2μs,平均形式误差为17.7μs,相比佘山25 m和南山25 m天线的S/X双频观测有显著提升. 展开更多
关键词 技术:干涉测量 地球 时间 方法:数据分析
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RNAi,a new therapeutic strategy against viral infection 被引量:16
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作者 Fischer L.TAN James Q.YIN 《Cell Research》 SCIE CAS CSCD 2004年第6期460-466,共7页
RNA interference (RNAi) is an adaptive defense mechanism triggered by double-stranded RNA (dsRNA). It is a powerful reverse genetic tool that has been widely employed to silence gene expression in mammalian and human ... RNA interference (RNAi) is an adaptive defense mechanism triggered by double-stranded RNA (dsRNA). It is a powerful reverse genetic tool that has been widely employed to silence gene expression in mammalian and human cells.RNAi-based gene therapies, especially in viral diseases have become more and more interesting and promising. Recently,small interfering RNA (siRNA) can be used to protect host from viral infection, inhibit the expression of viral antigen and accessory genes, control the transcription and replication of viral genome, hinder the assembly of viral particles, and display influences in virus-host interactions. In this review, we attempt to present recent progresses of this breakthrough technology in the above fields and summarize the possibilities of siRNA-based drugs. 展开更多
关键词 RNAI SIRNA viral infection gene therapy.
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Measurement of Concentration Fields near the Interface of a Rising Bubble by Holographic Interference Technique 被引量:11
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作者 马友光 成弘 +1 位作者 YuGuocong 余国琮 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 1999年第4期363-367,共5页
holographic interference, concentration near the interface, bubble , mass transfer
关键词 holographic interference concentration near the interface BUBBLE mass transfer
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Inhibition of genes expression of SARS coronavirus by synthetic small interfering RNAs 被引量:11
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作者 YiSHI DeHuaYANG JieXIONG JieJIA BingHUANG YouXinJIN 《Cell Research》 SCIE CAS CSCD 2005年第3期193-200,共8页
RNA interference (RNAi) is triggered by the presence of a double-stranded RNA (dsRNA), and results in the silencing of homologous gene expression through the specific degradation of an mRNA containing the same sequenc... RNA interference (RNAi) is triggered by the presence of a double-stranded RNA (dsRNA), and results in the silencing of homologous gene expression through the specific degradation of an mRNA containing the same sequence. dsRNAmediated RNAi can be used in a wide variety of eucaryotes to induce the sequence-specific inhibition of gene expression.Synthetic 21-23 nucleotide (nt) small interfering RNA (siRNA) with 2 nt 3' overhangs was recently found to mediate efficient sequence-specific mRNA degradation in mammalian cells. Here, we studied the effects of synthetic siRNA duplexes targeted to SARS coronavirus structural proteins E, M, and N in a cell culture system. Among total 26 siRNA duplexes, we obtained 3 siRNA duplexes which could sequence-specifically reduce target genes expression over 80% at the concentration of 60 nM in Vero E6 cells. The downregulation effect was in correlation with the concentrations of the siRNA duplexes in a range of 0~60 nM. Our results also showed that many inactive siRNA duplexes may be brought to life simply by unpairing the 5' end of the antisense strands. Results suggest that siRNA is capable of inhibiting SARS coronavirus genes expression and thus may be a new therapeutic strategy for treatment of SARS. 展开更多
关键词 SARS small interfering RNA Vero E6 cells EGFP fusion protein antiviral therapy.
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Space-time spreading and space-time coding for correlated frequency-selective channel in the presence of interference 被引量:2
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作者 肖海林 Nie Zaiping Li Xin 《High Technology Letters》 EI CAS 2008年第1期81-84,共4页
The space-time spreading (SIS), superimposed training sequences and space-time coding (STC) are adopted to obtain a closed-form of average error probability upper bound and maximum likelihood esti- mation expressi... The space-time spreading (SIS), superimposed training sequences and space-time coding (STC) are adopted to obtain a closed-form of average error probability upper bound and maximum likelihood esti- mation expression for multiple input and multiple output (MIMO) correlated frequency-selective channel in the presence of interference (colored interference). Moreover, the correlation at both ends of the wire- less link that can be incorporated equivalently into correlation at the transmit end is derived. Finally, the mean square error (MSE) of the maximum likelihood estimate is also derived. 展开更多
关键词 average error probability upper bound Chemoff bound maximum likelihood estimation space-time spreading (SIS) space-time coding (STC) mean square error
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WNK1: analysis of protein kinase structure, downstream targets, and potential roles in hypertension 被引量:4
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作者 Bing-eXU Byung-HoonLEE +5 位作者 XiaoshanMIN LisaLENERTZ CharlesJHEISE SteveSTIPPEC ElizabethJGOLDSMITH MelanieH.COBB 《Cell Research》 SCIE CAS CSCD 2005年第1期6-10,共5页
The WNK kinases are a recently discovered family of serine-threonine kinases that have been shown to play an essential role in the regulation of electrolyte homeostasis. Intronic deletions in the WNK1 gene result in i... The WNK kinases are a recently discovered family of serine-threonine kinases that have been shown to play an essential role in the regulation of electrolyte homeostasis. Intronic deletions in the WNK1 gene result in its overexpression and lead to pseudohypoaldosteronism type II, a disease with salt-sensitive hypertension and hyperkalemia. This review focuses on the recent evidence elucidating the structure of the kinase domain of WNK1 and functions of these kinases in normal and disease physiology. Their functions have implications for understanding the biochemical mechanism that could lead to the retention or insertion of proteins in the plasma membrane. The WNK kinases may be able to influence ion homeostasis through its effects on synaptotagmin function. 展开更多
关键词 KINASE HYPERTENSION SYNAPTOTAGMIN MAP3K MAP4K ERK5 RNAi.
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The Mechanism of Interfacial Mass Transfer in Gas Absorption Process 被引量:2
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作者 马友光 冯惠生 +1 位作者 徐世昌 余国琮 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2003年第2期227-230,共4页
Based on the method of molecular thermodynamics, the mass transfer mechanism at gas-liquid interface is studied theoretically, and a new mathematical model is proposed. Using laser holographic interference technique, ... Based on the method of molecular thermodynamics, the mass transfer mechanism at gas-liquid interface is studied theoretically, and a new mathematical model is proposed. Using laser holographic interference technique, the hydrodynamics and mass transfer characteristics of CO2 absorption are measured. It is shown that the calculated results are in good agreement with the experimental data. 展开更多
关键词 laser holographic interference mass transfer gas-liquid interface ABSORPTION
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Land subsidence monitoring by D-InSAR technique 被引量:15
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作者 Fan Hongdong Deng Kazhong Ju Chengyu Zhu Chuanguang Xue Jiqun China 《Mining Science and Technology》 EI CAS 2011年第6期869-872,共4页
Nowadays, the researches of using Differential Interferometric Synthetic Aperture Radar (D-InSAR) tech- nique to monitor the land subsidence are mainly on how to qualitatively analyze the subsidence areas and values, ... Nowadays, the researches of using Differential Interferometric Synthetic Aperture Radar (D-InSAR) tech- nique to monitor the land subsidence are mainly on how to qualitatively analyze the subsidence areas and values, but the analysis of subsidence process and mechanism are insufficient. In order to resolve these problems, 6 scenes of ERS1/2 images captured during 1995 and 2000 in a certain place of Jiangsu province were selected to obtain the subsidence and velocities in three time segments by ''two-pass'' D- InSAR method. Then the relationships among distributions of pumping wells, exploitation quantity of groundwater, and confined water levels were studied and the subsidence mechanism was systematically analyzed. The results show that using D-InSAR technique to monitor the deformation of large area can obtain high accuracies, the disadvantages of classical observation methods can be remedied and there is a linear relationship among the velocities of land subsidence, the water level and the exploitation quantity. 展开更多
关键词 InSAR "Two-pass" differential Land subsidence Confined water level Groundwater
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Optical Measurement System for Motion Characterization of Surface Mount Technology 被引量:1
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作者 LI Song AN Bing +1 位作者 ZHANG Tong-jun XIE Yong-jun 《Semiconductor Photonics and Technology》 CAS 2006年第3期173-177,210,共6页
Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures... Advanced testing methods for the dynamics of mechanical microdevices are necessary to develop reliable, marketable microelectromechanical systems. A system for measuring the nanometer motions of microscopic structures has been demonstrated. Stop-action images of a target have been obtained with computer microvision, microscopic interferometry, and stroboscopic illuminator. It can be developed for measuring the in-plane-rigid-body motions, surface shapes, out-of-plane motions and deformations of microstructures. A new algorithm of sub-pixel step length correlation template matching is proposed to extract the in-plane displacement from vision images. Hariharan five-step phase-shift interferometry algorithm and unwrapping algorithms are adopted to measure the out-of-plane motions. It is demonstrated that the system can measure the motions of solder wetting in surface mount technology(SMT). 展开更多
关键词 INTERFEROMETRY Stroboscopic imaging Computer microvision Dynamic measurement MEMS reliability Solder wetting
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Preparation of Entanglement and Schrdinger Cat States of Superconducting Quantum Interference Devices Qubits via Coupling to a Microwave Cavity
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作者 YANG Wen-Xing 《Communications in Theoretical Physics》 SCIE CAS CSCD 2008年第3期643-648,共6页
An alternative scheme is proposed for the generation of n-qubit W states of superconducting quantum interference devices (SQUID) in cavity QED. In this scheme, Raman coupling of two lower flux states of SQUID system... An alternative scheme is proposed for the generation of n-qubit W states of superconducting quantum interference devices (SQUID) in cavity QED. In this scheme, Raman coupling of two lower flux states of SQUID system is achieved via a microwave pulse and the cavity mode. Conditioned on no photon leakage from the cavity, the n-qubit W state can be generated whether the effective coupling parameters of the SQUID to cavity mode and classical microwave fields are the same or different. Our strictly numerical simulations of the time evolution of the system including decay show that the success probability of our scheme is almost unity and the interaction time is on the order of 10-9 s. The scheme can also be used to generate the Schrodinger cat states of multi-SQUID. 展开更多
关键词 ENTANGLEMENT SUPERCONDUCTING CAVITY
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3-D profile measurement for complex micro-structures
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作者 HU Chun-guang HU Xiao-dong XU Lin-yan GUO Tong HU Xiao-tang 《Optoelectronics Letters》 EI 2005年第3期205-208,共4页
Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which g... Micro-structures 3-D profile measurement is an important measurement content for research on micro-machining and characterization of micro-dimension. In this paper,a new method involved 2-D structure template, which guides phase unwrapping,is proposed based on phase-shifting microscopic interferometry.It is fit not only for static measurement, but also for dynamic measurement,especially for motion of MEMS devices.3-D profile of active comb of micro-resonator is obtained by using the method.The theoretic precision in out-of-plane direction is better than 0.5 nm.The in-plane theoretic precision in micro-structures is better than 0.5 μm.But at the edge of micro-structures,it is on the level of micrometer mainly caused by imprecise edge analysis.Finally,its disadvantages and the following development are discussed. 展开更多
关键词 微观结构 光检测技术 三维测量 干涉测量
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Determination of interference fit value on entire roller embedded shapemeter roll 被引量:5
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作者 吴海淼 刘宏民 +1 位作者 于丙强 杨利坡 《Journal of Central South University》 SCIE EI CAS 2014年第12期4503-4508,共6页
For entire roller embedded shapemeter roll, the relationship between the value of interference fit and the sensor pre-pressure, and the pressure transfer performance of shapemeter roll were analyzed by elasticity theo... For entire roller embedded shapemeter roll, the relationship between the value of interference fit and the sensor pre-pressure, and the pressure transfer performance of shapemeter roll were analyzed by elasticity theory during the cold reversible rolling process. Considering the influence of strip temperature on the interference fit, the distributions of contact pressure of the framework's top surface and the sensor pre-pressure on different values of interference fit were analyzed by the finite element technology. The results show that the contact pressure of the framework's top surface and the sensor pre-pressure increase with the increase of the value of interference fit. When the value of interference fit is between 0.05 mm and 0.09 mm, roll body's inner hole surface, the framework and pressure magnetic sensitive component don't separate from each other, and the sensor works in the linear segment of characteristic curve, so the normal operation of shapemeter roll is guaranteed. 展开更多
关键词 reversible rolling shapemeter roll value of interference fit contact pressure finite element
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Advanced approaches to high precision MEMS metrology based on interferometric,confocal,and tactile techniques
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作者 Peter Lehmann 《Optoelectronics Letters》 EI 2008年第2期143-146,共4页
Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instrum... Geometrical features of micro-systems can be determined by either tactile or optical profiling techniques, which show different non-linear transfer characteristics. This has to be considered especially, if the instruments operate close to their physical limitations. Depending on the specific measuring task either point-wise or areal optical measurement may be advantageous. Hence, examples for both approaches are discussed. Furthermore, systematic effects, which are related to the measuring principle have to be taken into account, e.g. if sharp edges or slopes are present on the measuring object. As it is shown, for white-light interferometry these difficulties can be solved by a two-wavelength technique. 展开更多
关键词 精密度 MEMS 计量方法 干涉测量 触摸技术
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