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一种高性能多晶硅振动环形陀螺的设计与制造
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作者 Ayazi.,F 马宝国 《战术导弹控制技术》 1999年第1期37-46,共10页
本文对振动环形陀螺的设计和定标限度及采用复合整体和表面微加工技术的完成情况作了详细分析。采用高纵横比p++(深层硼扩散)/多晶硅沟槽填充制造技术,能够实现30-40μm厚的多晶硅环形结构,其环-电极间隙为0.9μm。
关键词 陀螺仪 偏航速率传感器 多晶硅 振动环形
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MEMS环形振动陀螺结构设计与仿真分析 被引量:10
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作者 寇志伟 曹慧亮 +3 位作者 刘俊 冯恒振 任建军 连树仁 《微纳电子技术》 北大核心 2017年第7期479-484,491,共7页
针对轴对称壳形振动陀螺的工作机理与振动特性,提出了一种新颖的全对称U型梁MEMS环形波动陀螺,并分析了其工作原理、振动特性与敏感工作方式。在此基础上应用ANSYS有限元分析软件建立了该环形振动陀螺谐振结构的有限元模型,分别进行了... 针对轴对称壳形振动陀螺的工作机理与振动特性,提出了一种新颖的全对称U型梁MEMS环形波动陀螺,并分析了其工作原理、振动特性与敏感工作方式。在此基础上应用ANSYS有限元分析软件建立了该环形振动陀螺谐振结构的有限元模型,分别进行了模态分析、谐响应分析、瞬态冲击响应分析与静力分析。仿真分析结果显示该环形陀螺驱动与敏感模态固有频率的频差为33 Hz,工作模态的频率匹配性较好;工作模态与其他振动模态的最小频差为1 032 Hz,能够有效抵抗环境振动的干扰;谐振结构在10 000g的瞬态冲击作用下最大应力为39.5 MPa,可以正常稳定工作。 展开更多
关键词 微电子机械系统(MEMS) 环形振动陀螺 振动特性 有限元分析 工作模态 模态分析
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电容式MEMS环形振动陀螺结构设计及加工 被引量:4
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作者 李建华 徐立新 +1 位作者 付博 王凤芹 《中国惯性技术学报》 EI CSCD 北大核心 2017年第2期240-243,共4页
微机械环形振动陀螺仪采用四波腹工作原理,具有精度高、抗冲击性能好等优点。通常情况下为了提高电容值和信噪比,环形结构会采用高深宽比方案,因此带来的footing效应直接影响了结构加工的成品率。本文在设计环形结构的基础上提出了一种... 微机械环形振动陀螺仪采用四波腹工作原理,具有精度高、抗冲击性能好等优点。通常情况下为了提高电容值和信噪比,环形结构会采用高深宽比方案,因此带来的footing效应直接影响了结构加工的成品率。本文在设计环形结构的基础上提出了一种在硅下表面溅射一层Al金属层的方法,能够避免footing效应的发生。实验结果表明,该方法有效提高了结构加工精度。同时,为了验证所设计结构的正确性,对加工出的结构进行了扫频测试,结构驱动模态谐振频率与设计值相差仅0.13%,并在此基础上搭建了测控系统,进一步进行了静态实验,结果表明其零偏稳定性指标为101(°)/h证明了设计和加工的可行性。 展开更多
关键词 硅微环形振动结构 footing效应 加工工艺 性能测试 零偏稳定性
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玻璃基环形振动微陀螺谐振子的设计与制造工艺 被引量:1
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作者 王风娇 李新坤 +3 位作者 吴浩越 刘福民 徐宇新 王学锋 《飞控与探测》 2020年第1期75-79,共5页
针对传统单晶硅材料热胀系数不稳定引起的硅基环形振动微陀螺的温度漂移问题,开展了玻璃基环形振动微陀螺谐振子的设计,并提出了一种新型的玻璃基准三维微结构制造工艺,借助微型电子机械系统(MEMS)工艺中成熟的深硅刻蚀、阳极键合、化... 针对传统单晶硅材料热胀系数不稳定引起的硅基环形振动微陀螺的温度漂移问题,开展了玻璃基环形振动微陀螺谐振子的设计,并提出了一种新型的玻璃基准三维微结构制造工艺,借助微型电子机械系统(MEMS)工艺中成熟的深硅刻蚀、阳极键合、化学机械抛光等通用加工技术,融合玻璃熔融工艺,解决了玻璃基准三维微结构的制造工艺难题,同时保证了高的加工精度,实现了玻璃基环形振动微陀螺谐振子的高精度批量制造。 展开更多
关键词 环形振动微陀螺 玻璃基准三维微结构 MEMS工艺
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用于同步激发P波和S波井间地震采集的环形振动器震源 被引量:2
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作者 ThomasM.Daley 李海峰 代东 《物探装备》 2004年第2期79-83,101,共6页
井中地震震源———环形振动器已成功地用于裂缝型玄武岩含水层的井间地震勘探。这种地震震源采用离心质量旋转地震能量 ,在每个震源点记录下顺时针转动和逆时针转动所产生的扫描信号。由于该震源产生的是环形极化波 ,可以通过唯一的处... 井中地震震源———环形振动器已成功地用于裂缝型玄武岩含水层的井间地震勘探。这种地震震源采用离心质量旋转地震能量 ,在每个震源点记录下顺时针转动和逆时针转动所产生的扫描信号。由于该震源产生的是环形极化波 ,可以通过唯一的处理算法 ,将记录分解成两个等同而相互垂直的线性振荡地震源波。这样环形振动器就同时产生全方位角的P波和S波。采用P波粒子振动的坐标旋转 ,可使不同深度的震源分量对齐。在野外实践中 ,使用流体耦合的水听器 (也叫海底丰———译者注 )检波器来记录P波和S波。处理后的野外资料显示 ,从主测线和联络测线分量中分别分离出清晰的P波和S波。分解处理的张量卷积方法还用于多分量处理。 展开更多
关键词 P波 S波 环形振动 震源 井间地震 数据采集系统 耦合传感器
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新型大功率阶梯环形变幅器弯曲振动特性研究
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作者 张宁宁 《机械设计》 CSCD 北大核心 2018年第9期93-99,共7页
阶梯型辐射体因其辐射面积大、辐射效率高等优点在大功率超声领域获得了广泛的应用。从声学工程应用角度,基于Mindlin理论推导了新型大功率阶梯环形弯曲振动变幅器在内外自由、内外固定、内自由外固定、内固定外自由4种边界条件下的频... 阶梯型辐射体因其辐射面积大、辐射效率高等优点在大功率超声领域获得了广泛的应用。从声学工程应用角度,基于Mindlin理论推导了新型大功率阶梯环形弯曲振动变幅器在内外自由、内外固定、内自由外固定、内固定外自由4种边界条件下的频率方程,并分别进行数值求解。结果表明,4种边界条件下有限元模拟结果与厚板理论计算结果及试验测试结果误差较小;当其他参数一定时,在厚板范围内各阶频率都随圆盘基底厚度、圆盘厚度的增加而增加,随内径的增加减小;当变幅器结构参数保持不变所取的3种材料前3阶频率比较,可得45钢的频率最大,铜的频率最小,铝的频率居中。该结论对大功率阶梯型辐射体的弯曲振动辐射器的设计提供理论参考和频率调试依据。 展开更多
关键词 Mindlin理论 厚阶梯环形弯曲振动变幅器 频率方程
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Free vibration of piezoelectric annular plate
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作者 王云 徐荣桥 丁皓江 《Journal of Zhejiang University Science》 EI CSCD 2003年第4期379-387,共9页
General solutions for coupled three dimensional equations of piezoelectric media were used in this work to obtain some analytical solutions for free vibration of piezoelectric annular plates. These solutions not only... General solutions for coupled three dimensional equations of piezoelectric media were used in this work to obtain some analytical solutions for free vibration of piezoelectric annular plates. These solutions not only satisfy the governing equations at every point in the concerned region but also satisfy the prescribed boundary conditions at every point on the boundaries. Therefore, they are three-dimensional exact. Numerical results are finally tabulated. 展开更多
关键词 Piezoelectric media Sectorial annular plate Free vibration
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Dynamics of mechanical system for electromechanical integrated toroidal drive under electric disturbance 被引量:1
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作者 许立忠 郝秀红 《Journal of Central South University》 SCIE EI CAS 2014年第4期1296-1306,共11页
Based on electromagnetics and mechanics, electromechanical coupled dynamic equations for the drive were developed. Using method of perturbation, free vibrations of the mechanical system under electric disturbance were... Based on electromagnetics and mechanics, electromechanical coupled dynamic equations for the drive were developed. Using method of perturbation, free vibrations of the mechanical system under electric disturbance were investigated. The forced responses of the mechanical system to mechanical excitation under electric disturbance were also presented. It is known that for the system with electric disturbance, as time grows, beat occurs. When electric disturbing frequency is near to the natural frequencies of the mechanical system or their integer multiple, resonance vibrations occur. The forced responses of the mechanical system to mechanical excitation under electric disturbance are compound vibrations decided by mechanical excitation, electric disturbance and parameters of the system. The coupled resonance vibration caused by electric disturbance and mechanical excitation was discussed as well. The conditions under which above coupled resonance occurs were presented. The results show that when the difference of the excitation frequency and the perturbation frequency is equal to some order of natural frequency, coupled resonance vibrations occur. 展开更多
关键词 toroidal drive electromechanical integration dynamics free vibration forced response
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A novel ring vibrating gyroscope based on side piezo-electrodes 被引量:4
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作者 周鑫 吴宇列 +2 位作者 吴学忠 张勇猛 郑煜 《Journal of Central South University》 SCIE EI CAS CSCD 2016年第3期555-561,共7页
Solid-state wave gyroscope is one kind of high-performance vibrating gyroscopes. The present work develops a new type of solid-state wave gyroscope—a ring vibrating gyroscope driven by piezo-electrodes located on the... Solid-state wave gyroscope is one kind of high-performance vibrating gyroscopes. The present work develops a new type of solid-state wave gyroscope—a ring vibrating gyroscope driven by piezo-electrodes located on the sidewall of the structure. It has advantages of large vibrating amplitude, high energy conversion efficiency and compact structure. The working principle of the piezoelectric ring vibrating gyroscope is based on the inertia effect of the standing wave in the axisymmetric resonator caused by Coriolis force. The finite element method(FEM) analysis has been implemented to characterize the ring type resonator. The prototypal gyroscope was manufactured and has been trimmed by mechanical way. The harmonic response of the ring vibrating gyroscope has been tested. The resonating frequency of the ring type resonator is 3715.6 Hz and the frequency split of the two working modes before trimming was about 5 Hz and was reduced to sub-0.01 Hz after trimming procedure. The Q-factor of the ring type resonator was 2504. Then, the turntable experiment was implemented. The measured scale factor k is 9.24 m V/[(°)·s] and the full scale range of the gyroscope is larger than ±300(°)/s. 展开更多
关键词 solid-state wave gyroscope piezoelectric gyroscope side drive ring vibrating gyroscope
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Study on coupled vibration characteristics of a cylindrical container with multiple elastic annular baffles 被引量:2
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作者 WANG JiaDong ZHOU Ding LIU WeiQing 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第12期3292-3301,共10页
The coupled vibration characteristics of multiple elastic annular baffles of the same inner radius in a partially liquid-filled rigid cylindrical container were studied. The liquid domain was divided into several simp... The coupled vibration characteristics of multiple elastic annular baffles of the same inner radius in a partially liquid-filled rigid cylindrical container were studied. The liquid domain was divided into several simple sub-domains so that the liquid velocity potential in each liquid sub-domain was of class C 1 with continuous boundary conditions. Based on the superposition principle, the general solution of the liquid velocity potential corresponding to each liquid sub-domain was obtained by means of the method of separation of variables. The coupled modes of the multiple elastic annular baffles were expressed in terms of dry-modal functions. The free surface condition, the interface conditions and coupled vibration conditions were expressed in terms of Fourier series along the liquid height and Bessel series in the radial direction, respectively. Stable and fast numerical computations were investigated by the convergence study. Excellent agreements have been achieved in the comparison of re- suits obtained by the proposed approach with those given by the finite element software ADINA. The natural frequencies and mode shapes versus the position, the inner radius and the number of the annular baffles were thoroughly discussed. 展开更多
关键词 liquid-container interaction sub-domains multiple baffles sloshing mode bulging mode
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A Study of the Impulse Wave Discharged from the Exits of Two Parallel Tubes
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作者 Yong-Hun Kweon Heuy-Dong Kim +1 位作者 Toshiaki Setoguchi Toshiyuki Aoki 《Journal of Thermal Science》 SCIE EI CAS CSCD 2003年第4期332-336,356,共6页
The twin impulse wave leads to very complicated flow fields, such as Mach stem, spherical waves, and vortex ring. The twin impulse wave discharged from the exits of the two tubes placed in parallel is investigated to ... The twin impulse wave leads to very complicated flow fields, such as Mach stem, spherical waves, and vortex ring. The twin impulse wave discharged from the exits of the two tubes placed in parallel is investigated to understand the detailed flow physics associated with the twin impulse wave, compared with those in a single impulse wave. In the current study, the merging phenomena and propagation characteristics of the impulse waves are investigated using a shock tube experiment and by numerical computations. The Harten-Yee''s total variation diminishing (TVD) scheme is used to solve the unsteady two-dimensional compressible Euler equations. The Mach number Ms of incident shock wave is changed below 1.5 and the distance between two-parallel tubes, L/d, is changed from 1.2 to 4.0. In the shock tube experiment, the twin impulse waves are visualized by a Schlieren optical system for the purpose of validation of computational work. The results obtained show that on the symmetric axis between two-parallel tubes, the peak pressure produced by the twin impulse waves and its location strongly depend upon the distance between two-parallel tubes, L/d and the incident shock Mach number, Ms. The predicted Schlieren images represent the measured twin-impulse wave with a good accuracy. 展开更多
关键词 compressible flow unsteady flow impulse wave shock wave shock tube.
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