期刊文献+
共找到3篇文章
< 1 >
每页显示 20 50 100
0.18μm以下低k介质材料上的低离子等离子体去胶工艺
1
作者 AxcelisTechnologies QingyuanHan CarloWaldfried OrlandoExcorcia 《中国集成电路》 2003年第46期81-85,共5页
本文论述了下游式等离子体在多种Cu/低k材料上去胶及去残留物的工艺应用,主要有3类低k材料的实验数据——有机类、掺氮氧化物和多孔性低k材料,同时论述了在这些对应低k材料上新的等离子体气氛:(1)中性等离子体;(2)无氧和还原性等... 本文论述了下游式等离子体在多种Cu/低k材料上去胶及去残留物的工艺应用,主要有3类低k材料的实验数据——有机类、掺氮氧化物和多孔性低k材料,同时论述了在这些对应低k材料上新的等离子体气氛:(1)中性等离子体;(2)无氧和还原性等离子体;(3)无氧和无氮等离子体。 展开更多
关键词 下游式等离子体 低K介质材料 去胶工艺 掺氮氧化物 多孔性低k材料 等离子体气氛
下载PDF
Promotional effects of Er incorporation in CeO_2(ZrO_2)/TiO_2 for selective catalytic reduction of NO by NH_3 被引量:4
2
作者 Qijie Jin Yuesong Shen +2 位作者 Shemin Zhu Xihong Li Min Hu 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 北大核心 2016年第9期1521-1529,共9页
A series CeO2(ZrO2)/TiO2 catalysts were modified with Er using a sol-gel method.The catalytic activity of the obtained catalysts in the selective catalytic reduction(SCR) of NO with NH3 was investigated to determi... A series CeO2(ZrO2)/TiO2 catalysts were modified with Er using a sol-gel method.The catalytic activity of the obtained catalysts in the selective catalytic reduction(SCR) of NO with NH3 was investigated to determine the appropriate Er dosage.The catalysts were characterized using X-ray diffraction,N2 adsorption,NH3 temperature-programmed desorption,H2 temperature-programmed reduction,photoluminescence spectroscopy,electron paramagnetic resonance spectroscopy,and X-ray photoelectron spectroscopy.The results showed that the optimum Er/Ce molar ratio was 0.10;this catalyst had excellent resistance to catalyst poisoning caused by vapor and sulfur and gave more than 90% NO conversion at 220–395 ℃ and a gas hourly space velocity of 71 400 h^-1.Er incorporation increased the Ti^3+ concentrations,oxygen storage capacities,and oxygen vacancy concentrations of the catalysts,resulting in excellent catalytic performance.Er incorporation also decreased the acid strength and inhibited growth of TiO2 and CeO2 crystal particles,which increased the catalytic activity.The results show that high oxygen vacancy concentrations and oxygen storage capacities,large amounts of Ti^3+,and low acid strengths give excellent SCR activity. 展开更多
关键词 CeO2(ZrO2)/TiO2 Erbium incorporation Selective catalytic reduction Nitrogen oxide Catalytic performance
下载PDF
Nitrogen-doped black titania for high performance supercapacitors 被引量:3
3
作者 Chongyin Yang Xin Wang +6 位作者 Wujie Dong I-Wei Chen Zhou Wang Jijian Xu Tianquan Lin Hui Gu Fuqiang Huang 《Science China Materials》 SCIE EI CSCD 2020年第7期1227-1234,共8页
For energy storage system,it is still a huge challenge to achieve high energy density and high power density simultaneously.One potential solution is to fabricate electrochemical capacitors(ECs),which store electric e... For energy storage system,it is still a huge challenge to achieve high energy density and high power density simultaneously.One potential solution is to fabricate electrochemical capacitors(ECs),which store electric energy through surface ion adsorption or redox reactions.Here we report a new electrode material,heavy nitrogen-doped(9.29 at.%)black titania(TiO2-x:N).This unique hybrid material,consisting of conductive amorphous shells supported on nanocrystalline cores,has rapid N-mediated redox reaction(TiO2-xNy+zH++ze■-TiO2-xNyHz),especially in acidic solutions,providing a specific capacitance of 750 Fg-1at 2 m V s-1(707 Fg-1at 1 A g-1),great rate capability(503 F g-1at 20 Ag-1),and maintain stable after initial fading.Being a new developed supercapacitor material,nitrogen-doped black titania may revive the oxide-based supercapacitors. 展开更多
关键词 black titania SUPERCAPACITOR nitrogen-dopant N-mediated redox reactions
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部