Three-dimensional model of chemical vapor deposition reaction in polysilicon reduction furnace was established by considering mass, momentum and energy transfer simultaneously. Then, CFD software was used to simulate ...Three-dimensional model of chemical vapor deposition reaction in polysilicon reduction furnace was established by considering mass, momentum and energy transfer simultaneously. Then, CFD software was used to simulate the flow, heat transfer and chemical reaction process in reduction furnace and to analyze the change law of deposition characteristic along with the H_2 mole fraction, silicon rod height and silicon rod diameter. The results show that with the increase of H_2 mole fraction, silicon growth rate increases firstly and then decreases. On the contrary, SiHCl_3 conversion rate and unit energy consumption decrease firstly and then increase. Silicon production rate increases constantly. The optimal H_2 mole fraction is 0.8-0.85. With the growth of silicon rod height, Si HCl3 conversion rate, silicon production rate and silicon growth rate increase, while unit energy consumption decreases. In terms of chemical reaction, the higher the silicon rod is, the better the performance is. In the view of the top-heavy situation, the actual silicon rod height is limited to be below 3 m. With the increase of silicon rod diameter, silicon growth rate decreases firstly and then increases. Besides, SiHCl_3 conversion rate and silicon production rate increase, while unit energy consumption first decreases sharply, then becomes steady. In practice, the bigger silicon rod diameter is more suitable. The optimal silicon rod diameter must be over 120 mm.展开更多
Synthesis and kinetics of dichloro-methoxybenzenes were studied from 1,2,4-trichlorobenzene and sodium methoxide in a temperature range of 353--383 K. Effects of molar ratio of reactants, solvent and reaction temperat...Synthesis and kinetics of dichloro-methoxybenzenes were studied from 1,2,4-trichlorobenzene and sodium methoxide in a temperature range of 353--383 K. Effects of molar ratio of reactants, solvent and reaction temperature were investigated. Reaction products include three isomers. The order of selectivity for the three isomers was 1,4-dichloro-2-methoxybenzene〉〉2,4-dichoro-1-methoxybenzene〉,2-dichoro-4-methoxybenzene. Kinetic equations for the parallel liquid-solid interface reaction between 1,2,4-trichlorobenzene and sodium methoxide were established in the absence of catalyst. Kinetic parameters such as the pre-exponential factors and the activation energy were deter- mined with the Arrhenius equation.展开更多
基金Project(12C0379) supported by Scientific Research Fund of Hunan Province,China
文摘Three-dimensional model of chemical vapor deposition reaction in polysilicon reduction furnace was established by considering mass, momentum and energy transfer simultaneously. Then, CFD software was used to simulate the flow, heat transfer and chemical reaction process in reduction furnace and to analyze the change law of deposition characteristic along with the H_2 mole fraction, silicon rod height and silicon rod diameter. The results show that with the increase of H_2 mole fraction, silicon growth rate increases firstly and then decreases. On the contrary, SiHCl_3 conversion rate and unit energy consumption decrease firstly and then increase. Silicon production rate increases constantly. The optimal H_2 mole fraction is 0.8-0.85. With the growth of silicon rod height, Si HCl3 conversion rate, silicon production rate and silicon growth rate increase, while unit energy consumption decreases. In terms of chemical reaction, the higher the silicon rod is, the better the performance is. In the view of the top-heavy situation, the actual silicon rod height is limited to be below 3 m. With the increase of silicon rod diameter, silicon growth rate decreases firstly and then increases. Besides, SiHCl_3 conversion rate and silicon production rate increase, while unit energy consumption first decreases sharply, then becomes steady. In practice, the bigger silicon rod diameter is more suitable. The optimal silicon rod diameter must be over 120 mm.
文摘Synthesis and kinetics of dichloro-methoxybenzenes were studied from 1,2,4-trichlorobenzene and sodium methoxide in a temperature range of 353--383 K. Effects of molar ratio of reactants, solvent and reaction temperature were investigated. Reaction products include three isomers. The order of selectivity for the three isomers was 1,4-dichloro-2-methoxybenzene〉〉2,4-dichoro-1-methoxybenzene〉,2-dichoro-4-methoxybenzene. Kinetic equations for the parallel liquid-solid interface reaction between 1,2,4-trichlorobenzene and sodium methoxide were established in the absence of catalyst. Kinetic parameters such as the pre-exponential factors and the activation energy were deter- mined with the Arrhenius equation.
