Black carbon （BC） aerosol, accounting for a minor fraction of atmospheric aerosols, is attracting increased attentio1 due to its impact on air quality, human health, and climate change. Focusing on BC emission reduc...Black carbon （BC） aerosol, accounting for a minor fraction of atmospheric aerosols, is attracting increased attentio1 due to its impact on air quality, human health, and climate change. Focusing on BC emission reduction, this paper give1 a brief introduction to the sources and global distribution of BC. Along with the decrease of BC emissions from sue1 actions as the reduction of global greenhouse gases （GHGs） and regulating local air quality, it also highlights othet BC reduction approaches such as control and improvement of combustion conditions, the elimination of open biomas burning, and the sequestration of BC by biomass pyrolysis. Finally, it is stressed that at this moment there is no enougt reason to push BC reduction into any climate change related negotiations, although BC has been included in some o so-called win-win reduction targets for the quick response to both climate and non-climate appeals.展开更多
A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of thi...A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.展开更多
基金co-supported by China 973 project of MOST(2011CB403401)China Postdoctoral Science Foundation(20080440463,200902157)
文摘Black carbon （BC） aerosol, accounting for a minor fraction of atmospheric aerosols, is attracting increased attentio1 due to its impact on air quality, human health, and climate change. Focusing on BC emission reduction, this paper give1 a brief introduction to the sources and global distribution of BC. Along with the decrease of BC emissions from sue1 actions as the reduction of global greenhouse gases （GHGs） and regulating local air quality, it also highlights othet BC reduction approaches such as control and improvement of combustion conditions, the elimination of open biomas burning, and the sequestration of BC by biomass pyrolysis. Finally, it is stressed that at this moment there is no enougt reason to push BC reduction into any climate change related negotiations, although BC has been included in some o so-called win-win reduction targets for the quick response to both climate and non-climate appeals.
文摘A various effective resist diffusion lengths methodology for OPC model calibration is proposed,which considers the discrepancy of effective resist diffusion lengths between 1D and 2D patterns. An important step of this methodology is to set up a new calibration flow that lets 1D and 2D patterns have the same optical parameters but different effective diffusion lengths. Furthermore, a design for manufacturing （DFM） interaction is suggested in the calibration flow of the pro- posed model. From the CD errors of fitting results and the comparison between simulated contours and SEM images,it is found that the various effective resist diffusion lengths model calibration methodology results in a more accurate and stable model.
