A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on t...A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.展开更多
In this paper,a multiscale problem arising in material science is considered.The problem involves a random coefficient which is assumed to be a perturbation of a deterministic coefficient,in a sense made precisely in ...In this paper,a multiscale problem arising in material science is considered.The problem involves a random coefficient which is assumed to be a perturbation of a deterministic coefficient,in a sense made precisely in the body of the text.The homogenized limit is then computed by using a perturbation approach.This computation requires repeatedly solving a corrector-like equation for various configurations of the material.For this purpose,the reduced basis approach is employed and adapted to the specific context.The authors perform numerical tests that demonstrate the efficiency of the approach.展开更多
文摘A new approach for rules-based optical proximity correction is presented.The discussion addresses on how to select and construct more concise and practical rules-base as well as how to apply that rules-base.Based on those ideas,several primary rules are suggested.The v-support vector regression method is used to generate a mathematical expression according to rule data.It enables to make correction according to any given rules parameters.Experimental results demonstrate applying rules calculated from the expression match well with that from the rule table.
基金Project supported by EOARD(European Office of Aerospace Research and Development) (No.FA865510-C-4002)
文摘In this paper,a multiscale problem arising in material science is considered.The problem involves a random coefficient which is assumed to be a perturbation of a deterministic coefficient,in a sense made precisely in the body of the text.The homogenized limit is then computed by using a perturbation approach.This computation requires repeatedly solving a corrector-like equation for various configurations of the material.For this purpose,the reduced basis approach is employed and adapted to the specific context.The authors perform numerical tests that demonstrate the efficiency of the approach.
