为分析光学平面面形偏差,以直径100mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的...为分析光学平面面形偏差,以直径100mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的面形偏差。计算并分析了波面偏差指标峰谷值PV和均方根值RMS,将计算结果与利用ZYGO斐索干涉仪测得的数据对比,偏差为10-3λ,符合光学检测要求。综合考虑可操作性和计算精度,这种基于ASTM的方法是一种行之有效的光学检测分析方法。展开更多
A polarization Fizeau interferometer based on birefringent thin film is presented. The interferometer adopts a birefringent thin film to obtain orthogonally polarized and strictly common-path reference and test beams....A polarization Fizeau interferometer based on birefringent thin film is presented. The interferometer adopts a birefringent thin film to obtain orthogonally polarized and strictly common-path reference and test beams. Advantages include ease of implementation on large-aperture interferometer, measuring test optics from long distance, and achieving high fringe visibility. The phase shift is obtained by combining a quarterwave plate and an analyzer. The concepts illustrated are verified experimentally.展开更多
文摘为分析光学平面面形偏差,以直径100mm光学平晶为检测对象,利用斐索干涉仪采集了被测光学平面的波面干涉图,按照美国材料与试验协会(American Society for Testing and Materials,ASTM)标准方法,通过分析,能够定性反映出被测光学平面的面形偏差。计算并分析了波面偏差指标峰谷值PV和均方根值RMS,将计算结果与利用ZYGO斐索干涉仪测得的数据对比,偏差为10-3λ,符合光学检测要求。综合考虑可操作性和计算精度,这种基于ASTM的方法是一种行之有效的光学检测分析方法。
基金supportedby the National Natural Science Foundation of China(No. 60808018)the State Key Laboratory of Applied Optics, China (No. Y1Q03FQK06)
文摘A polarization Fizeau interferometer based on birefringent thin film is presented. The interferometer adopts a birefringent thin film to obtain orthogonally polarized and strictly common-path reference and test beams. Advantages include ease of implementation on large-aperture interferometer, measuring test optics from long distance, and achieving high fringe visibility. The phase shift is obtained by combining a quarterwave plate and an analyzer. The concepts illustrated are verified experimentally.