薄膜晶体管(Thin film transistor,TFT)的栅极在截面方向上是一个台阶,栅极绝缘层(Gate Insulator,GI)和源漏极(Source和Data电极,SD电极)依次覆盖于台阶之上,覆盖程度以台阶覆盖率(台阶处GI层水平厚度与竖直厚度的比值)进行衡量。本文...薄膜晶体管(Thin film transistor,TFT)的栅极在截面方向上是一个台阶,栅极绝缘层(Gate Insulator,GI)和源漏极(Source和Data电极,SD电极)依次覆盖于台阶之上,覆盖程度以台阶覆盖率(台阶处GI层水平厚度与竖直厚度的比值)进行衡量。本文结合重庆京东方的HADS产品工艺制程,探究了栅极厚度、坡度角对GI层的台阶覆盖率的影响。同时,在覆盖率的基础上研究了台阶处和非台阶处的SD膜层刻蚀程度差异。结合量产中的不良,分析栅极坡度角、覆盖率、栅极腐蚀等相关不良的关系,并提出相应的良率提升措施。实验结果表明坡度角是影响GI覆盖率的关键因素,且栅极坡度角与GI覆盖率呈负线性关系。当栅极厚度在280~500 nm范围变化时,栅极坡度角每增加10°,GI层台阶覆盖率下降约20%。SD膜层覆盖在台阶上,因台阶的存在造成此处的SD层减薄,最终导致该处的SD膜层刻蚀程度加大。如果栅极坡度角偏大,会导致台阶处GI层减薄或者产生微裂纹,工艺制程中的腐蚀介质会透过减薄的GI层进而腐蚀栅极;此外,偏大的栅极坡度角会导致台阶处的SD电极有断线的风险。通过刻蚀液种类变更、刻蚀液成分微调、刻蚀工艺的优化可以降低栅极坡度角,规避上述良率风险。此外,对于栅极腐蚀型不良,也可以通过调整GI层的成膜参数来提升覆盖率。对于SD电极断线风险,可尝试增加光刻胶粘附力、台阶处SD线加宽等措施规避风险。展开更多
Objective： The aim of our study was to investigate the value of dynamic contrast-enhanced MRI for evaluating differential diagnosis of pulmonary isolated lesions. Methods： Twenty-nine consecutive patients enrolled i...Objective： The aim of our study was to investigate the value of dynamic contrast-enhanced MRI for evaluating differential diagnosis of pulmonary isolated lesions. Methods： Twenty-nine consecutive patients enrolled in this study, all of whom underwent DCE-MRI examinations and received a histologic and clinical diagnosis. Among these, lung tuberculoma 7 cases, harmatoma 3 cases, peripheral lung cancer 19 cases. DCE-MRI was acquired with 3D LAVA technique, total 18 phases were acquired, scanner time of per phase was 5-7″. After contrasting agent, twice successive scanning was acquired at 10″ and 50″. Then 1′30″, 2′, 2′30″, 3′, 3′30″, 4′, 5′, 6′, 7′, 8′, 9′, 10′, 11′, 12′ performed scanning. Region of interest was placed on the Maximum level in the tumors. According to Schaefer＇s standard, four types of time signal intensity curve （TIC） were classified, which were A, B, C and D. Compared the dynamic parameters between benign and malignant nodules. Results： Lung tuberculoma may display three curves： A type 1 case, ring-shaped enhancement 4 cases （periphery ring A type, central region D type）, D type 2 cases. Harmatoma may display three curves： A type 1 case, C type 2 case. Peripheral lung cancer may display A type. Except 2 cases D type lung tuberculoma, we compared curve data of 8 cases benign nodules （including tuberculoma Atype and periphery ring Atype, harmatoma Atype and C type） and lung cancer. SlEP%： benign nodules 0.7885 ±0.5543, lung cancer 1.2623 ±0.3059, P 〈 0.05; MER： benign nodules 1.0007 ± 0.4251, lung cancer 1.3694 ±0.2740, P 〈 0.05; washout： P 〉 0.05. Conclusion： Lung MR imaging is helpful to diagnosis and differential diagnosis of isolated benign and malignant nodules. SIEP% and MER could offer valuable information. The evolution of global tuberculosis may be from A type to ring-shaped ennoblement to D type. It was easy to do right diagnosis to lung tuberculoma with ring-shaped ennoblement and D type. Peripheral lung cancer commonly displayed A type and needed identification with acute inflammation. So, it is important to anti-inflammatory follow-up for a few A type nodules.展开更多
In this paper, we investigate a two-way relaying power line communication （PLC） network with analog network coding. We focus on the analysis of the system outage probability, symbol error rate, and average capacity....In this paper, we investigate a two-way relaying power line communication （PLC） network with analog network coding. We focus on the analysis of the system outage probability, symbol error rate, and average capacity. Specifically, we first derive the probability density function （PDF） of the received signal-to-noise ratio （SNR） with a closed form, by exploiting the statistical properties of the PLC channel. Then with the help of this PDF, we develop the outage probability, symbol error rate, and average capacity with closed forms, based on the Hermite polynomial. Simulations show that the derived analytical results are consistent with those by Monte Carlo simulation.展开更多
文摘薄膜晶体管(Thin film transistor,TFT)的栅极在截面方向上是一个台阶,栅极绝缘层(Gate Insulator,GI)和源漏极(Source和Data电极,SD电极)依次覆盖于台阶之上,覆盖程度以台阶覆盖率(台阶处GI层水平厚度与竖直厚度的比值)进行衡量。本文结合重庆京东方的HADS产品工艺制程,探究了栅极厚度、坡度角对GI层的台阶覆盖率的影响。同时,在覆盖率的基础上研究了台阶处和非台阶处的SD膜层刻蚀程度差异。结合量产中的不良,分析栅极坡度角、覆盖率、栅极腐蚀等相关不良的关系,并提出相应的良率提升措施。实验结果表明坡度角是影响GI覆盖率的关键因素,且栅极坡度角与GI覆盖率呈负线性关系。当栅极厚度在280~500 nm范围变化时,栅极坡度角每增加10°,GI层台阶覆盖率下降约20%。SD膜层覆盖在台阶上,因台阶的存在造成此处的SD层减薄,最终导致该处的SD膜层刻蚀程度加大。如果栅极坡度角偏大,会导致台阶处GI层减薄或者产生微裂纹,工艺制程中的腐蚀介质会透过减薄的GI层进而腐蚀栅极;此外,偏大的栅极坡度角会导致台阶处的SD电极有断线的风险。通过刻蚀液种类变更、刻蚀液成分微调、刻蚀工艺的优化可以降低栅极坡度角,规避上述良率风险。此外,对于栅极腐蚀型不良,也可以通过调整GI层的成膜参数来提升覆盖率。对于SD电极断线风险,可尝试增加光刻胶粘附力、台阶处SD线加宽等措施规避风险。
文摘Objective： The aim of our study was to investigate the value of dynamic contrast-enhanced MRI for evaluating differential diagnosis of pulmonary isolated lesions. Methods： Twenty-nine consecutive patients enrolled in this study, all of whom underwent DCE-MRI examinations and received a histologic and clinical diagnosis. Among these, lung tuberculoma 7 cases, harmatoma 3 cases, peripheral lung cancer 19 cases. DCE-MRI was acquired with 3D LAVA technique, total 18 phases were acquired, scanner time of per phase was 5-7″. After contrasting agent, twice successive scanning was acquired at 10″ and 50″. Then 1′30″, 2′, 2′30″, 3′, 3′30″, 4′, 5′, 6′, 7′, 8′, 9′, 10′, 11′, 12′ performed scanning. Region of interest was placed on the Maximum level in the tumors. According to Schaefer＇s standard, four types of time signal intensity curve （TIC） were classified, which were A, B, C and D. Compared the dynamic parameters between benign and malignant nodules. Results： Lung tuberculoma may display three curves： A type 1 case, ring-shaped enhancement 4 cases （periphery ring A type, central region D type）, D type 2 cases. Harmatoma may display three curves： A type 1 case, C type 2 case. Peripheral lung cancer may display A type. Except 2 cases D type lung tuberculoma, we compared curve data of 8 cases benign nodules （including tuberculoma Atype and periphery ring Atype, harmatoma Atype and C type） and lung cancer. SlEP%： benign nodules 0.7885 ±0.5543, lung cancer 1.2623 ±0.3059, P 〈 0.05; MER： benign nodules 1.0007 ± 0.4251, lung cancer 1.3694 ±0.2740, P 〈 0.05; washout： P 〉 0.05. Conclusion： Lung MR imaging is helpful to diagnosis and differential diagnosis of isolated benign and malignant nodules. SIEP% and MER could offer valuable information. The evolution of global tuberculosis may be from A type to ring-shaped ennoblement to D type. It was easy to do right diagnosis to lung tuberculoma with ring-shaped ennoblement and D type. Peripheral lung cancer commonly displayed A type and needed identification with acute inflammation. So, it is important to anti-inflammatory follow-up for a few A type nodules.
基金Project supported by the Open Research Fund of National Mobile Communications Research Laboratory,Southeast University,China(No.2013D02)the National Natural Science Foundation of China(Nos.61271230 and 61472190)
文摘In this paper, we investigate a two-way relaying power line communication （PLC） network with analog network coding. We focus on the analysis of the system outage probability, symbol error rate, and average capacity. Specifically, we first derive the probability density function （PDF） of the received signal-to-noise ratio （SNR） with a closed form, by exploiting the statistical properties of the PLC channel. Then with the help of this PDF, we develop the outage probability, symbol error rate, and average capacity with closed forms, based on the Hermite polynomial. Simulations show that the derived analytical results are consistent with those by Monte Carlo simulation.
