A new scheduling algorithm called deferrable scheduling with time slice exchange (DS-EXC) was proposed to maintain the temporal validity of real-time data. In DS-EXC, the time slice exchange method was designed to fur...A new scheduling algorithm called deferrable scheduling with time slice exchange (DS-EXC) was proposed to maintain the temporal validity of real-time data. In DS-EXC, the time slice exchange method was designed to further defer the release time of transaction instances derived by the deferrable scheduling algorithm (DS-FP). In this way, more CPU time would be left for lower priority transactions and other transactions. In order to minimize the scheduling overhead, an off-line scheme was designed. In particular, the schedule for a transaction set is generated off-line until a repeating pattern is found, and then the pattern is used to construct the schedule on-line. The performance of DS-EXC was evaluated by sets of experiments. The results show that DS-EXC outperforms DS-FP in terms of increasing schedulable ratio. It also provides better performance under mixed workloads.展开更多
In order to optimize the transitional time during the successive exposure scans for a step-and-scan lithography and improve the productivity in a wafer production process, an investigation of the motion trajectory pla...In order to optimize the transitional time during the successive exposure scans for a step-and-scan lithography and improve the productivity in a wafer production process, an investigation of the motion trajectory planning along the scanning direction for wafer stage was carried out. The motions of wafer stage were divided into two respective logical moves （i. e. step-move and scan-move） and the multi-motionoverlap algorithms （MMOA） were presented for optimizing the transitional time between the successive exposure scans. The conventional motion planning method, the Hazelton method and the MMOA were analyzed theoretically and simulated using MATLAB under four different exposure field sizes. The results show that the total time between two successive scans consumed by MMOA is reduced by 4.82%, 2.62%, 3.06% and 3.96%, compared with those of the conventional motion planning method; and reduced by 2.58%, 0.76%, 1.63% and 2.92%, compared with those of the Hazehon method respectively. The theoretical analyses and simulation results illuminate that the MMOA can effectively minimize the transitional step time between successive exposure scans and therefore increase the wafer fabricating productivity.展开更多
基金Project(60873030) supported by the National Natural Science Foundation of China
文摘A new scheduling algorithm called deferrable scheduling with time slice exchange (DS-EXC) was proposed to maintain the temporal validity of real-time data. In DS-EXC, the time slice exchange method was designed to further defer the release time of transaction instances derived by the deferrable scheduling algorithm (DS-FP). In this way, more CPU time would be left for lower priority transactions and other transactions. In order to minimize the scheduling overhead, an off-line scheme was designed. In particular, the schedule for a transaction set is generated off-line until a repeating pattern is found, and then the pattern is used to construct the schedule on-line. The performance of DS-EXC was evaluated by sets of experiments. The results show that DS-EXC outperforms DS-FP in terms of increasing schedulable ratio. It also provides better performance under mixed workloads.
基金the National Basic Research Program of China(No.2003CB716206)the National Natural Science Foundation of China(No.50605025)
文摘In order to optimize the transitional time during the successive exposure scans for a step-and-scan lithography and improve the productivity in a wafer production process, an investigation of the motion trajectory planning along the scanning direction for wafer stage was carried out. The motions of wafer stage were divided into two respective logical moves （i. e. step-move and scan-move） and the multi-motionoverlap algorithms （MMOA） were presented for optimizing the transitional time between the successive exposure scans. The conventional motion planning method, the Hazelton method and the MMOA were analyzed theoretically and simulated using MATLAB under four different exposure field sizes. The results show that the total time between two successive scans consumed by MMOA is reduced by 4.82%, 2.62%, 3.06% and 3.96%, compared with those of the conventional motion planning method; and reduced by 2.58%, 0.76%, 1.63% and 2.92%, compared with those of the Hazehon method respectively. The theoretical analyses and simulation results illuminate that the MMOA can effectively minimize the transitional step time between successive exposure scans and therefore increase the wafer fabricating productivity.
