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碘过饱和KOH溶液对硅(110)晶面腐蚀的改善 被引量:3
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作者 景玉鹏 前中一介 +1 位作者 藤田孝之 高山洋一郎 《微纳电子技术》 CAS 2003年第6期33-38,共6页
将非金属元素碘作为硅的KOH腐蚀液的添加物,在对(100)和(110)单晶硅片的各向异性腐蚀中,获得了更为丰富的异向腐蚀特性和更为光滑的腐蚀表面.当温度在95℃,KOH腐蚀液中碘的摩尔比为0.5时,得到了粗糙度均小于10 nm的Si-(100)和(110)光洁... 将非金属元素碘作为硅的KOH腐蚀液的添加物,在对(100)和(110)单晶硅片的各向异性腐蚀中,获得了更为丰富的异向腐蚀特性和更为光滑的腐蚀表面.当温度在95℃,KOH腐蚀液中碘的摩尔比为0.5时,得到了粗糙度均小于10 nm的Si-(100)和(110)光洁表面,两晶面的腐蚀速率均为1.4μm/min.这两晶面在相同的条件下同时达到最佳光洁度,说明腐蚀速率是获得高光洁度表面的关键.实验还证明碘在热碱溶液中的稳定性和持久性要高于现在已被大量研究的双氧水和过硫等,尤其是对硅(110)表面光洁度的改善具有积极的促进作用. 展开更多
关键词 碘添加物 氢氧化钾刻蚀 表面光洁度 各向异性腐蚀 KOH 110晶面 晶面腐蚀
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Microstructure, mechanical and corrosion properties of magnesium alloy bone plate treated by high-energy shot peening 被引量:11
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作者 Shu-xu WU Shou-ren WANG +4 位作者 Gao-qi WANG Xiu-chun YU Wen-tao LIU Zheng-qi CHANG Dao-sheng WEN 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2019年第8期1641-1652,共12页
To enhance the mechanical properties and corrosion resistance of magnesium alloys,high-energy shot peening(HESP)was used.According to the results,the in-situ surface nanocrystallization(ISNC)microstructure was fabrica... To enhance the mechanical properties and corrosion resistance of magnesium alloys,high-energy shot peening(HESP)was used.According to the results,the in-situ surface nanocrystallization(ISNC)microstructure was fabricated on the magnesium alloy surface,and its formation mechanism was the coordination among twins,dislocations,subgrain boundary formation and dynamic recrystallization.Under the released surface stress of sample,the residual compressive stress and microhardness rose,thus enhancing compactness of the surface passivation film Mg(OH)2.Besides,the corrosion rate dropped by 29.2% in maximum.In the polarization curve,the maximum positive shift of the corrosion potential of sample was 203 mV, and the corrosion current density decreased by 31.25% in maximum.Moreover,the compression resistance and bending resistance of the bone plate were enhanced,and the maximum improvement rates were 18.2% and 23.1%,respectively.Accordingly,HESP significantly enhanced mechanical properties and corrosion resistance of magnesium alloys. 展开更多
关键词 magnesium alloys high energy shot peening in-situ surface nanocrystallization mechanical properties corrosion properties
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Electrochemical Performance of Zn(002) and Zn(100) Single Crystals in 6.0mol·L^-1 KOH 被引量:3
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作者 王华清 周上祺 +1 位作者 陈昌国 王秋虹 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2006年第4期551-554,共4页
In this article, the electrochemical performance of the electrodes of zinc polycrystal, Zn(002) and Zn(100) single crystals were studied by the Tafel line extrapolation of the potentio-dynamic polarization curves,... In this article, the electrochemical performance of the electrodes of zinc polycrystal, Zn(002) and Zn(100) single crystals were studied by the Tafel line extrapolation of the potentio-dynamic polarization curves, the cyclic voltammetry and the charge/discharge experiment. The results shows that in 6.0 mol·L^-1 KOH solution the corrosion rate of Zn polycrystal, Zn(100) and Zn(002) single crystals decreases in turn; and the reversibility and the charge/discharge performance of Zn single crystal was superior to Zn polycrystal. The dendrite growth of the surface of Zn polycrvstal was easier than Zn single crystal during the stages of charge/discharge. 展开更多
关键词 zinc single crystal electrode alkaline solution corrosion cyclic voltammetry DENDRITE
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