The analysis and calculating method of dynamic errors of CMMs during probing are discussed.To relate the dynamic displacement errors with the dynamic rotational errors a method for obtaining the displacement errors at...The analysis and calculating method of dynamic errors of CMMs during probing are discussed.To relate the dynamic displacement errors with the dynamic rotational errors a method for obtaining the displacement errors at the probing position from dynamic rotational errors is presented.It is pointed out that the finite element method might be used for modeling dynamic errors.However,dynamic errors are difficult to be modeled so a combined practical and theoretical approach is needed.In addition,the dynamic errors are measured with inductive position sensors.展开更多
The representation of a cylindrical helix by Non-Uniform Rational B-Spline (NURBS) curves is presented in this paper. A method is proposed to assess the influences produced by different ways to determine the control v...The representation of a cylindrical helix by Non-Uniform Rational B-Spline (NURBS) curves is presented in this paper. A method is proposed to assess the influences produced by different ways to determine the control ver-texes positions of helix. The error distribution cases between the helix approximated by NURBS curves and the original theoretical one are also analyzed. Meanwhile a computational method that guarantees the precision requirements is presented.展开更多
In acoustic logging-while-drilling （ALWD） finite difference in time domain （FDTD） simulations, large drill collar occupies, most of the fluid-filled borehole and divides the borehole fluid into two thin fluid colu...In acoustic logging-while-drilling （ALWD） finite difference in time domain （FDTD） simulations, large drill collar occupies, most of the fluid-filled borehole and divides the borehole fluid into two thin fluid columns （radius -27 mm）. Fine grids and large computational models are required to model the thin fluid region between the tool and the formation. As a result, small time step and more iterations are needed, which increases the cumulative numerical error. Furthermore, due to high impedance contrast between the drill collar and fluid in the borehole （the difference is 〉30 times）, the stability and efficiency of the perfectly matched layer （PML） scheme is critical to simulate complicated wave modes accurately. In this paper, we compared four different PML implementations in a staggered grid finite difference in time domain （FDTD） in the ALWD simulation, including field-splitting PML （SPML）, multiaxial PML（M- PML）, non-splitting PML （NPML）, and complex frequency-shifted PML （CFS-PML）. The comparison indicated that NPML and CFS-PML can absorb the guided wave reflection from the computational boundaries more efficiently than SPML and M-PML. For large simulation time, SPML, M-PML, and NPML are numerically unstable. However, the stability of M-PML can be improved further to some extent. Based on the analysis, we proposed that the CFS-PML method is used in FDTD to eliminate the numerical instability and to improve the efficiency of absorption in the PML layers for LWD modeling. The optimal values of CFS-PML parameters in the LWD simulation were investigated based on thousands of 3D simulations. For typical LWD cases, the best maximum value of the quadratic damping profile was obtained using one do. The optimal parameter space for the maximum value of the linear frequency-shifted factor （a0） and the scaling factor （β0） depended on the thickness of the PML layer. For typical formations, if the PML thickness is 10 grid points, the global error can be reduced to 〈1% using the optimal PML parameters, and the error will decrease as the PML thickness increases.展开更多
In this paper, we define a new class of biased linear estimators of the vector of unknown parameters in the deficient_rank linear model based on the spectral decomposition expression of the best linear minimun bias es...In this paper, we define a new class of biased linear estimators of the vector of unknown parameters in the deficient_rank linear model based on the spectral decomposition expression of the best linear minimun bias estimator. Some important properties are discussed. By appropriate choices of bias parameters, we construct many interested and useful biased linear estimators, which are the extension of ordinary biased linear estimators in the full_rank linear model to the deficient_rank linear model. At last, we give a numerical example in geodetic adjustment.展开更多
This paper proposes a design of internal model control systems for process with delay by using support vector regression(SVR).The proposed system fully uses the excellent nonlinear estimation performance of SVR with t...This paper proposes a design of internal model control systems for process with delay by using support vector regression(SVR).The proposed system fully uses the excellent nonlinear estimation performance of SVR with the structural risk minimization principle.Closed-system stability and steady error are analyzed for the existence of modeling errors.The simulations show that the proposed control systems have the better control performance than that by neural networks in the cases of the training samples with small size and noises.展开更多
The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1...The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.展开更多
文摘The analysis and calculating method of dynamic errors of CMMs during probing are discussed.To relate the dynamic displacement errors with the dynamic rotational errors a method for obtaining the displacement errors at the probing position from dynamic rotational errors is presented.It is pointed out that the finite element method might be used for modeling dynamic errors.However,dynamic errors are difficult to be modeled so a combined practical and theoretical approach is needed.In addition,the dynamic errors are measured with inductive position sensors.
文摘The representation of a cylindrical helix by Non-Uniform Rational B-Spline (NURBS) curves is presented in this paper. A method is proposed to assess the influences produced by different ways to determine the control ver-texes positions of helix. The error distribution cases between the helix approximated by NURBS curves and the original theoretical one are also analyzed. Meanwhile a computational method that guarantees the precision requirements is presented.
基金supported by NSFC(No.41174118)one of the major state S&T special projects(No.2008ZX05020-004)+1 种基金a Postdoctoral Fellowship of China(No.2013M530106)China Scholarship Council(No.2010644006)
文摘In acoustic logging-while-drilling （ALWD） finite difference in time domain （FDTD） simulations, large drill collar occupies, most of the fluid-filled borehole and divides the borehole fluid into two thin fluid columns （radius -27 mm）. Fine grids and large computational models are required to model the thin fluid region between the tool and the formation. As a result, small time step and more iterations are needed, which increases the cumulative numerical error. Furthermore, due to high impedance contrast between the drill collar and fluid in the borehole （the difference is 〉30 times）, the stability and efficiency of the perfectly matched layer （PML） scheme is critical to simulate complicated wave modes accurately. In this paper, we compared four different PML implementations in a staggered grid finite difference in time domain （FDTD） in the ALWD simulation, including field-splitting PML （SPML）, multiaxial PML（M- PML）, non-splitting PML （NPML）, and complex frequency-shifted PML （CFS-PML）. The comparison indicated that NPML and CFS-PML can absorb the guided wave reflection from the computational boundaries more efficiently than SPML and M-PML. For large simulation time, SPML, M-PML, and NPML are numerically unstable. However, the stability of M-PML can be improved further to some extent. Based on the analysis, we proposed that the CFS-PML method is used in FDTD to eliminate the numerical instability and to improve the efficiency of absorption in the PML layers for LWD modeling. The optimal values of CFS-PML parameters in the LWD simulation were investigated based on thousands of 3D simulations. For typical LWD cases, the best maximum value of the quadratic damping profile was obtained using one do. The optimal parameter space for the maximum value of the linear frequency-shifted factor （a0） and the scaling factor （β0） depended on the thickness of the PML layer. For typical formations, if the PML thickness is 10 grid points, the global error can be reduced to 〈1% using the optimal PML parameters, and the error will decrease as the PML thickness increases.
文摘In this paper, we define a new class of biased linear estimators of the vector of unknown parameters in the deficient_rank linear model based on the spectral decomposition expression of the best linear minimun bias estimator. Some important properties are discussed. By appropriate choices of bias parameters, we construct many interested and useful biased linear estimators, which are the extension of ordinary biased linear estimators in the full_rank linear model to the deficient_rank linear model. At last, we give a numerical example in geodetic adjustment.
文摘This paper proposes a design of internal model control systems for process with delay by using support vector regression(SVR).The proposed system fully uses the excellent nonlinear estimation performance of SVR with the structural risk minimization principle.Closed-system stability and steady error are analyzed for the existence of modeling errors.The simulations show that the proposed control systems have the better control performance than that by neural networks in the cases of the training samples with small size and noises.
文摘The forbidden pitch ＂dip＂ in the critical dimension （CD） through the pitch curve is a well-known optical proximity effect. The CD and CD process window near the ＂dip＂,usually found near a pitch range of 1.1 to 1.4 wavelength/ NA （numerical aperture）,is smaller when compared with other pitches. This is caused by inadequate imaging contrast for an unequal line and space grating. Although this effect is relatively well-known, its relationship with typical process condition parameters,such as the effective image blur caused by the photo-acid diffusion during the post exposure bake or the aberration in the imaging lens, has not been systematically studied. In this paper, we will examine the correlation between the image blur and the effect on the CD, including the decrease in the CD value （the depth of the ＂dip＂） and the CD process window. We find that both the decrease in the CD value and the focus latitude near the forbidden pitch correlate very well with the effective Gaussian image blur. Longer effective diffusion length correlates well with a smaller process window and a deeper CD ＂dip＂. We conclude that the dip depth is very sensitive to the change in image contrast.
