A SINGLE-CRYSTAL SILICON SYMMETRICAL AND DECOUPLED GYROSCOPE ON INSULATING SUBSTRATE；ALMINIUM NITRIDE BASED THIN FILM BULK ACOUSTIC RESONATOR USING GERMANIUM SACRIFICIAL LAYER ETCHING； Alteration of Poisson's ra...A SINGLE-CRYSTAL SILICON SYMMETRICAL AND DECOUPLED GYROSCOPE ON INSULATING SUBSTRATE；ALMINIUM NITRIDE BASED THIN FILM BULK ACOUSTIC RESONATOR USING GERMANIUM SACRIFICIAL LAYER ETCHING； Alteration of Poisson's ratio in high coupling piezoelectrics；Capacitance coupling micromechanical filter；Coupled, macro-micro modeling for hot deformation and sintering……展开更多
DYNAMICS OF MECHANICALLY AND ELECTROSTATICALLY COUPLED MICROCANTILEVERS；Effect of adiabatic heating in some processes of plastic deformation；Evaluation of kerfless linear arrays； MECHANICALLY CORNER-COUPLED SQUARE ...DYNAMICS OF MECHANICALLY AND ELECTROSTATICALLY COUPLED MICROCANTILEVERS；Effect of adiabatic heating in some processes of plastic deformation；Evaluation of kerfless linear arrays； MECHANICALLY CORNER-COUPLED SQUARE MICRORESONATOR ARRAY FOR REDUCED SERIES MOTIONAL RESISTANCE；Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays； Medical ultrasonic transducer using composite materials for acoustic matching layers-computer simulations of transducer arrays；展开更多
文摘A SINGLE-CRYSTAL SILICON SYMMETRICAL AND DECOUPLED GYROSCOPE ON INSULATING SUBSTRATE；ALMINIUM NITRIDE BASED THIN FILM BULK ACOUSTIC RESONATOR USING GERMANIUM SACRIFICIAL LAYER ETCHING； Alteration of Poisson's ratio in high coupling piezoelectrics；Capacitance coupling micromechanical filter；Coupled, macro-micro modeling for hot deformation and sintering……
文摘DYNAMICS OF MECHANICALLY AND ELECTROSTATICALLY COUPLED MICROCANTILEVERS；Effect of adiabatic heating in some processes of plastic deformation；Evaluation of kerfless linear arrays； MECHANICALLY CORNER-COUPLED SQUARE MICRORESONATOR ARRAY FOR REDUCED SERIES MOTIONAL RESISTANCE；Finite element modeling of the thermo-electro-mechanical coupling in pyroelectric infrared sensor arrays； Medical ultrasonic transducer using composite materials for acoustic matching layers-computer simulations of transducer arrays；
