随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感...随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。展开更多
With the increase of mining depth, the temperature of the original rock in deep mines increases. High temperature heat hazards at working surfaces and driving faces are becoming increasingly more serious. Given the pr...With the increase of mining depth, the temperature of the original rock in deep mines increases. High temperature heat hazards at working surfaces and driving faces are becoming increasingly more serious. Given the problem of mine cooling technologies at China and abroad and the actual conditions of a coal mine, we developed HEMS （High Temperature Exchange Machinery System） with inrushing mine water as the source of cold energy. Combined with the characteristics of a shortage of inrushing water in the coal mine, we proposed the Sanhejian model of HEMS with its lack of a cold source. The cooling engineer- ing construction, given the present conditions in the Sanhejian Coal Mine, consisted of two phases. In phase 1 horizontal water circulation was used as cold energy, while phase II was the geothermal utiliza- tion project. For the key equipment of HEMS-PT or HEMS-T, we provided the operational principle from theory and an actual application. Finally, we analyzed the operational effect of HEMS. After cooling, the temperature at the working face was below 30 ~C, which meets the national regulations. This system opens up new technology to solve the problem of deep mine heat hazards, which makes good sense in energy conservation and pollution reduction, improves the environment and realizes sustainable eco- nomic development.展开更多
Given the actual working of a fully mechanized plough at a mining face, we have proposed a formula for running constraints between powered supports and a coal plough under assumed geological conditions of the coal fac...Given the actual working of a fully mechanized plough at a mining face, we have proposed a formula for running constraints between powered supports and a coal plough under assumed geological conditions of the coal face and, on this basis, established an automatic control model of powered supports for the coal plough face. We introduced the working principle of the powered support control system of the plough at the mining face. We established three advanced characteristics of this control system： response speed, reliability and easy maintenance of the system. As well, we briefly introduced, the principal function of primary and subordinate controllers and the realization of the communication system by a Single Bus. Ten controllers were constructed and tested in our laboratorium. The results show that the control model is practical and meets actual conditions. It provides a theoretical basis for designing a comouter control system for a oowered support system of a plough at a mining face.展开更多
Sensitivity analysis is one of the effective methods in the dynamic modification. The sensitivity of the modal parameters such as the natural frequencies and mode shapes in undamped free vibration of mechanical transm...Sensitivity analysis is one of the effective methods in the dynamic modification. The sensitivity of the modal parameters such as the natural frequencies and mode shapes in undamped free vibration of mechanical transmission system is analyzed in this paper.In particular,the sensitivities of the modal parameters to physical parameters of shaft system such as the inertia and stiffness are given.A calculation formula for dynamic modification is presented based on the analysis of modal parameter.With a mechanical transmission system as an example, the sensitivities of natural frequencies and modes shape are calculated and analyzed. Furthermore, the dynamic modification is also carried out and a good result is obtained.展开更多
A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y t...A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y table. In addition, the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm. As a resuh, the manipulator＇s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. A quite ideal trade-off between the system＇ s flexibility and efficiency is got. Finally, some verified motion specification of the manipulator, the bonding experimental results and the verified qualities of the bonded devices are provided.展开更多
The rationale behind this research is the development of a zero-heM floating system using a conventional hydrokinetic water wheel as a model to examine and determine its performance in an open channel condition for en...The rationale behind this research is the development of a zero-heM floating system using a conventional hydrokinetic water wheel as a model to examine and determine its performance in an open channel condition for energy harvesting in Nigeria. The power is determined by flow of water in the stream which is responsible for rotating the blades. The research entails the water flow driven by a pump at 0.4 m/s and 0.6 m/s water velocities around a pool. The turbine is made to float under this free stream velocity. Feasibility study of its viability in Gari dam in Kano state of Nigeria was carried out and an average flow and discharge were determined during the dry season. Findings of this research were quite impressive and can be used to design a suitable floating zero-head turbine for energy harvesting in Nigerian rural areas where the head is low and energy is required not only for mechanization but also for lighting and irrigation purpose.展开更多
Silicon deep etching technique is the key fabrication step in the development of MEMS. The mask selectivity and the lateral etching control are the two primary factors that decide the result of deep etching process. T...Silicon deep etching technique is the key fabrication step in the development of MEMS. The mask selectivity and the lateral etching control are the two primary factors that decide the result of deep etching process. These two factors are studied in this paper. The experimental results show that the higher selectivity can be gotten when F - gas is used as etching gas and Al is introduced as mask layer. The lateral etching problems can be solved by adjusting the etching condition, such as increasing the RF power, changing the gas composition and flow volume of etching machine.展开更多
文摘随着工业技术的进步,高温高动态压力传感器的应用需求显著增加。提出一种集成专用补偿电路的高动态硅压阻式微电子机械系统(Micro-Electro-Mechanical Systems,MEMS)压力传感器,进行压力敏感芯片的结构设计和加工工艺设计,并对压力传感器进行封装和温度补偿电路设计。多层绝缘体上硅(Silicon On Insulator,SOI)材料能够使传感器在高温环境下正常工作。无引线的封装方式可有效提升传感器的频响性能。传感器后端集成了桥阻式专用集成电路(Application Specific Integrated Circuits,ASIC),能够显著减小传感器的体积,同时提升传感器整体性能。该MEMS传感器通过自动压力测试系统进行性能试验,结果表明MEMS压力传感器经过补偿后能够实现较高的线性度、稳定的零点输出特性以及理想的动态输出特性。
基金Financial support for this project, provided by the Key Basic Research Program of China (No.2006CB202200)the National Major Project of Ministry of Education (No.304005)the Program for Changjiang Scholars and Innovative Research Team in University of China (No.IRT0656)
文摘With the increase of mining depth, the temperature of the original rock in deep mines increases. High temperature heat hazards at working surfaces and driving faces are becoming increasingly more serious. Given the problem of mine cooling technologies at China and abroad and the actual conditions of a coal mine, we developed HEMS （High Temperature Exchange Machinery System） with inrushing mine water as the source of cold energy. Combined with the characteristics of a shortage of inrushing water in the coal mine, we proposed the Sanhejian model of HEMS with its lack of a cold source. The cooling engineer- ing construction, given the present conditions in the Sanhejian Coal Mine, consisted of two phases. In phase 1 horizontal water circulation was used as cold energy, while phase II was the geothermal utiliza- tion project. For the key equipment of HEMS-PT or HEMS-T, we provided the operational principle from theory and an actual application. Finally, we analyzed the operational effect of HEMS. After cooling, the temperature at the working face was below 30 ~C, which meets the national regulations. This system opens up new technology to solve the problem of deep mine heat hazards, which makes good sense in energy conservation and pollution reduction, improves the environment and realizes sustainable eco- nomic development.
基金Project 104030 supported by the Ministry of Education of the People’s Republic of China
文摘Given the actual working of a fully mechanized plough at a mining face, we have proposed a formula for running constraints between powered supports and a coal plough under assumed geological conditions of the coal face and, on this basis, established an automatic control model of powered supports for the coal plough face. We introduced the working principle of the powered support control system of the plough at the mining face. We established three advanced characteristics of this control system： response speed, reliability and easy maintenance of the system. As well, we briefly introduced, the principal function of primary and subordinate controllers and the realization of the communication system by a Single Bus. Ten controllers were constructed and tested in our laboratorium. The results show that the control model is practical and meets actual conditions. It provides a theoretical basis for designing a comouter control system for a oowered support system of a plough at a mining face.
文摘Sensitivity analysis is one of the effective methods in the dynamic modification. The sensitivity of the modal parameters such as the natural frequencies and mode shapes in undamped free vibration of mechanical transmission system is analyzed in this paper.In particular,the sensitivities of the modal parameters to physical parameters of shaft system such as the inertia and stiffness are given.A calculation formula for dynamic modification is presented based on the analysis of modal parameter.With a mechanical transmission system as an example, the sensitivities of natural frequencies and modes shape are calculated and analyzed. Furthermore, the dynamic modification is also carried out and a good result is obtained.
基金Supported by the High Technology Research and Development Programme of China （No. 2003AA404060） and the National Natural Science Foundation of China （No.60405008）.
文摘A novel MEMS device boning system is presented. Aiming at the high velocity, high precision and high flexibility requirements, a novel manipulator of planar parallel structure is developed to substitute ordinary X-Y table. In addition, the machine vision is implemented to improve the system＇ s flexibility. The initial angular positions of the joints are estimated by the extended Kalman filter algorithm. As a resuh, the manipulator＇s absolute locating accuracy in its workspace is guaranteed indirectly. For any MEMS device, the bonding system itself can be used as measurement equipment to create the device＇ s geometry model, which is the base to do off-line programming. A quite ideal trade-off between the system＇ s flexibility and efficiency is got. Finally, some verified motion specification of the manipulator, the bonding experimental results and the verified qualities of the bonded devices are provided.
文摘The rationale behind this research is the development of a zero-heM floating system using a conventional hydrokinetic water wheel as a model to examine and determine its performance in an open channel condition for energy harvesting in Nigeria. The power is determined by flow of water in the stream which is responsible for rotating the blades. The research entails the water flow driven by a pump at 0.4 m/s and 0.6 m/s water velocities around a pool. The turbine is made to float under this free stream velocity. Feasibility study of its viability in Gari dam in Kano state of Nigeria was carried out and an average flow and discharge were determined during the dry season. Findings of this research were quite impressive and can be used to design a suitable floating zero-head turbine for energy harvesting in Nigerian rural areas where the head is low and energy is required not only for mechanization but also for lighting and irrigation purpose.
文摘Silicon deep etching technique is the key fabrication step in the development of MEMS. The mask selectivity and the lateral etching control are the two primary factors that decide the result of deep etching process. These two factors are studied in this paper. The experimental results show that the higher selectivity can be gotten when F - gas is used as etching gas and Al is introduced as mask layer. The lateral etching problems can be solved by adjusting the etching condition, such as increasing the RF power, changing the gas composition and flow volume of etching machine.
