A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine me...A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept in nano probe systems which can measure the displacement of shaft driven by the variation of surface topography. The nano probe mainly consisted of three parts： a capacitive displacement sensor, a porous type air slide and a contact probe part with various tip radiuses. The porous type air slide assured the shaft slided smoothly with controllable normal force in mN scale and had high positioning accuracy. The probe part which was directly in contact with target surface, can be applied to micro/nanoscale scratching as well as the measurement of sample topography by a simple tip change.展开更多
This paper presents a new design of a probe adjusting device intended to position pressure and temperature probes in a flow field. 5-hole, 3-hole and temperature probes can be moved in radial direction and freely rota...This paper presents a new design of a probe adjusting device intended to position pressure and temperature probes in a flow field. 5-hole, 3-hole and temperature probes can be moved in radial direction and freely rotated about their axis. The high actuation accuracy of 3.9 ktm in radial direction and 0.09~ in angular position is validated in a 2-stage-turbine test rig which is installed at the Institute of Power Plant Technology, Steam and Gas Turbines, RWTH Aachen University. To meet the challenge to calculate the efficiency of a turbo machine which is mainly influenced by the temperature, all probe adjusting devices are positioned simultaneously and controlled by the MAS （measuring acquisition system） so that the same radial position in each stage is measured at the same time. For this purpose a new program has been developed to synchronize actuation and measurement. The slim design of 60 mm width allows measurement between the stages of turbo machines with small axial distances between vane and blade. In addition a CFD/FEA shows how the design and combination of materials compensate the thermal expansion of the engine during operation. This allows a minimal safety distance of 0.2 mm between rotor and probe to enable measurement as close to the physical boundary as possible. The actuation accuracy is demonstrated with pressure, temperature and angle distribution plots. It is also shown that the resolution of the measuring points, and therefore the actuation distances, has a large impact on the flow field analysis and should be set as high as possible. However the measuring time has to be taken into account.展开更多
基金Project supported by National Core Research Center (NCRC) and Chosun University, Korea
文摘A nano probe system which can measure precise contact force in mN scale was demonstrated. The nano probe micro parts or optical parts in nanometer range resolution and scratch was originally designed for on-machine measuring applications and one kind of contact type measuring probes was designed for miniaturized or microfactory system. It ideally should be of small size and able to measure surface topography in nanometer scale. A commercial capacitive displacement sensor was proposed. It was a new concept in nano probe systems which can measure the displacement of shaft driven by the variation of surface topography. The nano probe mainly consisted of three parts： a capacitive displacement sensor, a porous type air slide and a contact probe part with various tip radiuses. The porous type air slide assured the shaft slided smoothly with controllable normal force in mN scale and had high positioning accuracy. The probe part which was directly in contact with target surface, can be applied to micro/nanoscale scratching as well as the measurement of sample topography by a simple tip change.
文摘This paper presents a new design of a probe adjusting device intended to position pressure and temperature probes in a flow field. 5-hole, 3-hole and temperature probes can be moved in radial direction and freely rotated about their axis. The high actuation accuracy of 3.9 ktm in radial direction and 0.09~ in angular position is validated in a 2-stage-turbine test rig which is installed at the Institute of Power Plant Technology, Steam and Gas Turbines, RWTH Aachen University. To meet the challenge to calculate the efficiency of a turbo machine which is mainly influenced by the temperature, all probe adjusting devices are positioned simultaneously and controlled by the MAS （measuring acquisition system） so that the same radial position in each stage is measured at the same time. For this purpose a new program has been developed to synchronize actuation and measurement. The slim design of 60 mm width allows measurement between the stages of turbo machines with small axial distances between vane and blade. In addition a CFD/FEA shows how the design and combination of materials compensate the thermal expansion of the engine during operation. This allows a minimal safety distance of 0.2 mm between rotor and probe to enable measurement as close to the physical boundary as possible. The actuation accuracy is demonstrated with pressure, temperature and angle distribution plots. It is also shown that the resolution of the measuring points, and therefore the actuation distances, has a large impact on the flow field analysis and should be set as high as possible. However the measuring time has to be taken into account.
