In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for impr...In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.展开更多
In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low d...In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low damping gyroscope's output signal are given respectively, based on the motion equations of the silicon micromachined gyroscope. Theory proves that the output signal error of the silicon micromachined sensor is mainly caused by the instability of damping factor and the angular velocity of the rotating carrier itself. The experiment result indicates that the error of proportionality coefficient of output voltage which is caused by the instability of the angular velocity of the rotating carrier itself reaches to 4.1 %. Theoretical demonstration and experimental verification show that the instability of angular velocity of the rotating carrier itself has an important effect on the stability of low damping silicon micromachined gyroscope.展开更多
This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling mechanism ...This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling mechanism of the gyroscope is estab-lished through the gyro dynamic response matrix. The coupling components varying with ambient pressure and temperature induced by stiffness coupling, damping coupling and electrostatic force coupling are semi-analytically discussed. The overall coupling ratio is evaluated via experiments in the custom-built installation. The testing results show that the decoupling per-formance of the gyroscope is sensitive to the environmental parameters and all the non-ideal errors are determined as a function of ambient pressure and temperature. The coupling error varies from 0.05% to 0.25% within the pressure range of 100 Pa-100 kPa. The characteristics of coupling with temperature are measured from 20℃ to 100℃ with a variation from 0.35% to 0.41%. The results also indicate that within the range of measured ambient pressure and temperature, the minimum coupling ratio occurs at 100 Pa and room temperature. The overall performance of the gyroscope is tested under the pressure of about 2000 Pa and room temperature to achieve a relatively low coupling ratio. The scale factor is measured to be 7.8 mV （°）-1 s-1 with nonlinearity about 0.45% in the full-scale range of 600 （°） s-1. The short-term bias stability is approximately 0.06 （°）s-1 （1σ） for 20 min with noise equivalent angular rate evaluated to be 0.077 （°） s-1 Hz-1/2.展开更多
基金The National Natural Science Foundation of China (No.60974116)the Research Fund of Aeronautics Science (No. 20090869007)Specialized Research Fund for the Doctoral Program of Higher Education(No. 200802861063)
文摘In order to improve the bias stability of the micro-electro mechanical system（MEMS） gyroscope and reduce the impact on the bias from environmental temperature,a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode.Through the principle of bias signal generation,it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability.To fulfill the purpose of precise drive phase control,a digital signal processing circuit based on the field-programmable gate array（FPGA） with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given.Compared with the analog circuit,the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h.The new digital control method can greatly increase the drive phase accuracy,and thus improve the bias stability.
基金The author would like to thank the Nature Science Foundation of China (Grant No.60627001)the Beijing Key Laboratory for Sensor(No.KM200810772001)
文摘In order to find out the influence of the instability of angular velocity of the rotating carrier itself on the stability of silicon micromachined gyroscope, the digital models for relative error of the high and low damping gyroscope's output signal are given respectively, based on the motion equations of the silicon micromachined gyroscope. Theory proves that the output signal error of the silicon micromachined sensor is mainly caused by the instability of damping factor and the angular velocity of the rotating carrier itself. The experiment result indicates that the error of proportionality coefficient of output voltage which is caused by the instability of the angular velocity of the rotating carrier itself reaches to 4.1 %. Theoretical demonstration and experimental verification show that the instability of angular velocity of the rotating carrier itself has an important effect on the stability of low damping silicon micromachined gyroscope.
文摘This paper carries out an experiment study of decoupling performance for a novel lateral axis micromachined gyroscope with varying environmental parameters. The non-ideal mathematical model for the coupling mechanism of the gyroscope is estab-lished through the gyro dynamic response matrix. The coupling components varying with ambient pressure and temperature induced by stiffness coupling, damping coupling and electrostatic force coupling are semi-analytically discussed. The overall coupling ratio is evaluated via experiments in the custom-built installation. The testing results show that the decoupling per-formance of the gyroscope is sensitive to the environmental parameters and all the non-ideal errors are determined as a function of ambient pressure and temperature. The coupling error varies from 0.05% to 0.25% within the pressure range of 100 Pa-100 kPa. The characteristics of coupling with temperature are measured from 20℃ to 100℃ with a variation from 0.35% to 0.41%. The results also indicate that within the range of measured ambient pressure and temperature, the minimum coupling ratio occurs at 100 Pa and room temperature. The overall performance of the gyroscope is tested under the pressure of about 2000 Pa and room temperature to achieve a relatively low coupling ratio. The scale factor is measured to be 7.8 mV （°）-1 s-1 with nonlinearity about 0.45% in the full-scale range of 600 （°） s-1. The short-term bias stability is approximately 0.06 （°）s-1 （1σ） for 20 min with noise equivalent angular rate evaluated to be 0.077 （°） s-1 Hz-1/2.
