The Effect of Discharge Power on the Atmospheric Pressure Non-equilibrium Ar/O_2/TiCl_4 Plasma Deposition of TiO_2 Film

Deposition of TiO2 film from atmospheric pressure non- equilibrium Ar/O2/TiCl4 plasma was done to study the effect of discharge power during the film deposition process in this paper. TiO2 films with kinds of morphologies and controlled crystallization were deposited from mixtures of TiCl4 and O2 on quartz substrate by one step process. Scanning electron microscope （SEM） and transmission electron microscope （TEM） were used to analyze the morphology and crystallization of the deposited TiO2 films. It was found that the discharge power played a key role in the morphology and crystallization of the deposited TiO2 film whether the flow of TiCl4was large or small. When the flow of TiCl4 was large, the deposited TiO2 film was amorphous particles at low discharge power and was multi-crystalline at high discharge power. When the flow of TiCl4 was small, the deposited TiO2 film became more compact and the crystallization was enhanced as the discharge power increased. The dependence of the discharge current and the applied voltage with the discharge power indicated that it was a glow discharge. The gas temperature which increases with the discharge power is one of the main causes that affect the morphology and crystallization of the deposited film.

Base Pressure Plays an Important Role for Production of Plasma Blob in Argon Plasma

Magnetic confinement of fusion plasma has a wide range of issues to be addressed. Convective transport of plasma in the scrape-off layer of magnetic confinement devices is an interesting research topic for scientists and engineers. The interest in scrape-off layer convective transport has grown in last two decades because of its effect on plasma interaction with the first wall and divertor. By increasing the particle flux into the far scrape-off layer, blobs negatively affect limiters, radio frequency antennas and the first wall. Increased convective heat transport influences core plasma confinement, at least in L-mode plasmas. Here we have reported blob formation in the absent of external magnetic field. It is observed that at low pressure -0.01 rob, transport seems to be dominated by diffusive process. At pressure 〉 1 mb, we observe convective transport in high speed imaging experiments. The role of background neutrals outside plasma boundary has the befitting answer for this phenomenon. Plasma temperature is the other key player. Another interesting observation is that at diffusive transport regime plasma life time is of the order of voltage pulse duration fed to plasma source, where as at convective transport regime plasma life time is increased appreciably.