A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substra...A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.展开更多
In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision sca...In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.展开更多
基金Projects(51875585, 51875584, 51935013) supported by the National Natural Science Foundation of ChinaProject(2020JJ4247) supported by the Natural Science Foundation of Hunan Province,ChinaProject(ZHD202001) supported by the Opening Project of Science and Technology on Reliability Physics and Application Technology of Electronic Component Laboratory,China。
文摘A micro-displacement sensor based on fiber Bragg grating(FBG) is proposed. The device consists of a pair of FBGs with different central wavelengths fabricated by femtosecond laser phase mask method and a metal substrate with lever structure. The displacement is amplified by lever structure and it converts into axial tension of FBG, which has a high displacement sensitivity. The amplification factors obtained by theoretical analysis and finite element simulation are 2.67 and 2.50, respectively. The experimental results show that in the range of 0-50 μm the shift of FBG center wavelength is linearly related to the displacement of measured object and displacement sensitivity reaches 121 pm/μm. In addition, the cascaded FBG is used to compensate the temperature.
基金National Key Research and Development Pragram of China(No.2016YFF0200602)National Natural Science Foundation of China(No.61973233)。
文摘In order to meet the requirements of nondestructive testing of true 3D topography of micro-nano structures,a novel three-dimensional atomic force microscope(3D-AFM)based on flared tip is developed.A high-precision scanning platform is designed to achieve fast servo through moving probe and sample simultaneously,and several combined nanopositioning stages are used to guarantee linearity and orthogonality of displacement.To eliminate the signal deviation caused by AFM-head movement,a traceable optical lever system is designed for cantilever deformation detection.In addition,a method of tailoring the cantilever of commercial probe with flared tip is proposed to reduce the lateral force applied on the tip in measurement.The tailored probe is mounted on the 3D-AFM,and 3D imaging experiments are conducted on different samples by use of adaptive-angle scanning strategy.The results show the roob-mean-square value of the vertical displacement noise(RMS)of the prototype is less than 0.1 nm and the high/width measurement repeatability(peak-to-peak)is less than 2.5 nm.
