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硅基集成电路的发展和新一代栅极氧化物材料的研究现状 被引量:3
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作者 相文峰 颜雷 +5 位作者 谈国太 郭海中 刘丽峰 吕惠宾 周岳亮 陈正豪 《物理》 CAS 北大核心 2003年第4期228-234,共7页
随着科学技术的进步和集成电路市场日益扩大的需求 ,硅基集成电路的集成度越来越高 ,而集成度的提高是以其核心器件金属氧化物半导体场效应晶体管 (MOSFET)的特征尺寸逐渐减小为基础的 .当栅极SiO2 介电层的厚度减小到原子尺度大小时 ,... 随着科学技术的进步和集成电路市场日益扩大的需求 ,硅基集成电路的集成度越来越高 ,而集成度的提高是以其核心器件金属氧化物半导体场效应晶体管 (MOSFET)的特征尺寸逐渐减小为基础的 .当栅极SiO2 介电层的厚度减小到原子尺度大小时 ,由于量子效应的影响 ,SiO2 将失去介电特性 ,因此必须寻找一种新的高介电常数 (high -K)的氧化物材料来代替它 .如今世界上许多国家都开展了替代SiO2 的介电氧化物材料的研究工作 .文章介绍了栅极介电层厚度减小带来的影响 ,栅极SiO2 介电层的高K氧化物材料的要求和粗选 ,并对近期高介电常数氧化物材料的研究状况作了简要的介绍和评述 . 展开更多
关键词 硅基集成 发展 栅极氧化物材料 金属氧化物半导体场效应晶体管 栅极介电层 常数
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A flexible magnetoelectric field-effect transistor with magnetically responsive nanohybrid gate dielectric layer 被引量:1
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作者 Nguyen Minh Triet Tran Quang Trung +4 位作者 Nguyen Thi Dieu Hien Saqib Siddiqui Do-ll Kim Jai Chan Lee Nae-Eung Lee 《Nano Research》 SCIE EI CAS CSCD 2015年第10期3421-3429,共9页
Flexible magnetoelectric (ME) materials have been studied for new applications such as memory, energy harvesters, and magnetic field sensors. Herein, with the widely studied and progressive advantages of ME phenomen... Flexible magnetoelectric (ME) materials have been studied for new applications such as memory, energy harvesters, and magnetic field sensors. Herein, with the widely studied and progressive advantages of ME phenomena in the multiferroic field, we demonstrate a new approach for utilizing flexible ME materials as gate dielectric layers in ME organic field-effect transistors (ME-OFET) that can be used for sensing a magnetic field and extracting the ME properties of the gate dielectric itself. The magnetoelectric nanohybrid gate dielectric layer comprises sandwiched stacks of magnetostrictive CoFe2O4 nanoparticles and a highly piezoelectric poly(vinylidene fluoride-co-trifluoroethylene) layer. While varying the magnetic field applied to the ME gate dielectric, the ME effect in the functional gate dielectric modulates the channel conductance of the ME-OFET owing to a change in the effective gate field. The clear separation of the ME responses in the gate dielectric layer of ME-OFET from those of the other parameters was demonstrated using the AC gate biasing method and enabled the extraction of the ME coefficient of ME materials. Additionally, the device shows high stability after cyclic bending of 10,000 cycles at a banding radius of 1.2 cm. The device has significant potential for not only the extraction of the intrinsic characterization of ME materials but also the sensing of a magnetic field in integrated flexible electronic systems. 展开更多
关键词 MAGNETOELECTRIC MAGNETOSTRICTION CoFe2O4 nanoparticles P(VDF-TrFE) organic field-effecttransistor magnetic sensor
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