Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot befo...Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot before and after deformed. A hardware testing system for linear CCD array, data gathering and processing was therefore developed for this purpose. Experimental results showed that the system has a good accuracy and can be used to measure stress and strain of metal surface in a real-time and quantitative manner.展开更多
The continuous downsizing of device has sustained Moore's law in the past 40 years.As the power dissipation becomes more and more serious,a lot of emerging technologies have been adopted in the past decade to solv...The continuous downsizing of device has sustained Moore's law in the past 40 years.As the power dissipation becomes more and more serious,a lot of emerging technologies have been adopted in the past decade to solve the short channel effect,leakage and performance degradation problems.In this paper,the emerging scaling technologies and device innovations,including high-k/metal gate,strain,ultra-shallow junction,tri-gate FinFET,extremely thin SOI and silicon nanowire FET will be reviewed and discussed in terms of the potential and challenge for post-Moore era.展开更多
文摘Crossed grating stuck to metal surface was used as a strain sensor in the present work, and stress as well as strain were then investigated by accurately determining the change in the position of diffraction spot before and after deformed. A hardware testing system for linear CCD array, data gathering and processing was therefore developed for this purpose. Experimental results showed that the system has a good accuracy and can be used to measure stress and strain of metal surface in a real-time and quantitative manner.
文摘The continuous downsizing of device has sustained Moore's law in the past 40 years.As the power dissipation becomes more and more serious,a lot of emerging technologies have been adopted in the past decade to solve the short channel effect,leakage and performance degradation problems.In this paper,the emerging scaling technologies and device innovations,including high-k/metal gate,strain,ultra-shallow junction,tri-gate FinFET,extremely thin SOI and silicon nanowire FET will be reviewed and discussed in terms of the potential and challenge for post-Moore era.
