The fabrication of the oxidized porous silicon waveguide prism is reported by selectively electrochemical anodisation process. The direction changes of light beams in TE and TM polarization out of this waveguide prism...The fabrication of the oxidized porous silicon waveguide prism is reported by selectively electrochemical anodisation process. The direction changes of light beams in TE and TM polarization out of this waveguide prism were respectively measured,and the experimental results were analyzed.展开更多
文摘The fabrication of the oxidized porous silicon waveguide prism is reported by selectively electrochemical anodisation process. The direction changes of light beams in TE and TM polarization out of this waveguide prism were respectively measured,and the experimental results were analyzed.