Micro/nano-thin films are widely used in the fields of micro/nano-electromechanical system(MEMS/NEMS)and flexible electronics,and their mechanical properties have an important impact on the stability and reliability o...Micro/nano-thin films are widely used in the fields of micro/nano-electromechanical system(MEMS/NEMS)and flexible electronics,and their mechanical properties have an important impact on the stability and reliability of components.However,accurate characterization of the mechanical properties of thin films still faces challenges due to the complexity of film-substrate structure,and the characterization efficiency of traditional techniques is insufficient.In this paper,a high-throughput determination method of the elastic modulus of thin films is proposed based on the strain variance method,the feasibility of which is analyzed by the finite element method(FEM),and the specific tensile configuration with array-distributed thin films is designed and optimized.Based on the strain difference between the film-substrate region and the uncoated region,the elastic modulus of multiple films is obtained simultaneously,and the influences of film width,spacing,thickness,and distribution on the measurement of elastic modulus are elucidated.The results show that the change in film width has a more obvious effect on the elastic modulus determination than film spacing and thickness,i.e.,the larger the film width is,the closer the calculation results are to the theoretical value,and the change in calculation results tends to be stabilized when the film width increases to a certain length.Specifically,the simultaneous measurement of the elastic modulus of eight metal films on a polyimide(PI)substrate with a length of 110 mm and a width of 30 mm can be realized,and the testing throughput can be further increased with the extension of the substrate length.This study provides an efficient and low-cost method for measuring the elastic modulus of thin films,which is expected to accelerate the development of new thin film materials.展开更多
In the generalized continuum mechanics(GCM)theory framework,asymmetric wave equations encompass the characteristic scale parameters of the medium,accounting for microstructure interactions.This study integrates two th...In the generalized continuum mechanics(GCM)theory framework,asymmetric wave equations encompass the characteristic scale parameters of the medium,accounting for microstructure interactions.This study integrates two theoretical branches of the GCM,the modified couple stress theory(M-CST)and the one-parameter second-strain-gradient theory,to form a novel asymmetric wave equation in a unified framework.Numerical modeling of the asymmetric wave equation in a unified framework accurately describes subsurface structures with vital implications for subsequent seismic wave inversion and imaging endeavors.However,employing finite-difference(FD)methods for numerical modeling may introduce numerical dispersion,adversely affecting the accuracy of numerical modeling.The design of an optimal FD operator is crucial for enhancing the accuracy of numerical modeling and emphasizing the scale effects.Therefore,this study devises a hybrid scheme called the dung beetle optimization(DBO)algorithm with a simulated annealing(SA)algorithm,denoted as the SA-based hybrid DBO(SDBO)algorithm.An FD operator optimization method under the SDBO algorithm was developed and applied to the numerical modeling of asymmetric wave equations in a unified framework.Integrating the DBO and SA algorithms mitigates the risk of convergence to a local extreme.The numerical dispersion outcomes underscore that the proposed SDBO algorithm yields FD operators with precision errors constrained to 0.5‱while encompassing a broader spectrum coverage.This result confirms the efficacy of the SDBO algorithm.Ultimately,the numerical modeling results demonstrate that the new FD method based on the SDBO algorithm effectively suppresses numerical dispersion and enhances the accuracy of elastic wave numerical modeling,thereby accentuating scale effects.This result is significant for extracting wavefield perturbations induced by complex microstructures in the medium and the analysis of scale effects.展开更多
文摘Micro/nano-thin films are widely used in the fields of micro/nano-electromechanical system(MEMS/NEMS)and flexible electronics,and their mechanical properties have an important impact on the stability and reliability of components.However,accurate characterization of the mechanical properties of thin films still faces challenges due to the complexity of film-substrate structure,and the characterization efficiency of traditional techniques is insufficient.In this paper,a high-throughput determination method of the elastic modulus of thin films is proposed based on the strain variance method,the feasibility of which is analyzed by the finite element method(FEM),and the specific tensile configuration with array-distributed thin films is designed and optimized.Based on the strain difference between the film-substrate region and the uncoated region,the elastic modulus of multiple films is obtained simultaneously,and the influences of film width,spacing,thickness,and distribution on the measurement of elastic modulus are elucidated.The results show that the change in film width has a more obvious effect on the elastic modulus determination than film spacing and thickness,i.e.,the larger the film width is,the closer the calculation results are to the theoretical value,and the change in calculation results tends to be stabilized when the film width increases to a certain length.Specifically,the simultaneous measurement of the elastic modulus of eight metal films on a polyimide(PI)substrate with a length of 110 mm and a width of 30 mm can be realized,and the testing throughput can be further increased with the extension of the substrate length.This study provides an efficient and low-cost method for measuring the elastic modulus of thin films,which is expected to accelerate the development of new thin film materials.
基金supported by project XJZ2023050044,A2309002 and XJZ2023070052.
文摘In the generalized continuum mechanics(GCM)theory framework,asymmetric wave equations encompass the characteristic scale parameters of the medium,accounting for microstructure interactions.This study integrates two theoretical branches of the GCM,the modified couple stress theory(M-CST)and the one-parameter second-strain-gradient theory,to form a novel asymmetric wave equation in a unified framework.Numerical modeling of the asymmetric wave equation in a unified framework accurately describes subsurface structures with vital implications for subsequent seismic wave inversion and imaging endeavors.However,employing finite-difference(FD)methods for numerical modeling may introduce numerical dispersion,adversely affecting the accuracy of numerical modeling.The design of an optimal FD operator is crucial for enhancing the accuracy of numerical modeling and emphasizing the scale effects.Therefore,this study devises a hybrid scheme called the dung beetle optimization(DBO)algorithm with a simulated annealing(SA)algorithm,denoted as the SA-based hybrid DBO(SDBO)algorithm.An FD operator optimization method under the SDBO algorithm was developed and applied to the numerical modeling of asymmetric wave equations in a unified framework.Integrating the DBO and SA algorithms mitigates the risk of convergence to a local extreme.The numerical dispersion outcomes underscore that the proposed SDBO algorithm yields FD operators with precision errors constrained to 0.5‱while encompassing a broader spectrum coverage.This result confirms the efficacy of the SDBO algorithm.Ultimately,the numerical modeling results demonstrate that the new FD method based on the SDBO algorithm effectively suppresses numerical dispersion and enhances the accuracy of elastic wave numerical modeling,thereby accentuating scale effects.This result is significant for extracting wavefield perturbations induced by complex microstructures in the medium and the analysis of scale effects.
