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基于石墨烯的集成化气体传感单元设计 被引量:1
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作者 吴超 王峥 +3 位作者 庞振江 李良 孙海全 王海宝 《传感器与微系统》 CSCD 2020年第10期73-76,共4页
针对目前气体传感器敏感对象单一化的问题,利用新型二维纳米薄膜材料石墨烯,设计了一种集成化的多功能气敏传感单元,提出了一整套制造石墨烯气敏传感单元的工艺方案。敏感单元分为4个模块,利用同一片经过不同处理的石墨烯薄膜实现对三... 针对目前气体传感器敏感对象单一化的问题,利用新型二维纳米薄膜材料石墨烯,设计了一种集成化的多功能气敏传感单元,提出了一整套制造石墨烯气敏传感单元的工艺方案。敏感单元分为4个模块,利用同一片经过不同处理的石墨烯薄膜实现对三种不同气体的检测。NH 3检测模块核心敏感薄膜为氧化石墨烯,H 2检测模块核心敏感薄膜为钯掺杂石墨烯薄膜,NO 2检测模块核心敏感薄膜为氧化锌(Z nO)掺杂石墨烯薄膜。基于微机电系统(MEMS)工艺和石墨烯薄膜转移工艺可将上述3个气敏模块集成于一块芯片,实现一种新型集成化石墨烯气敏传感单元。 展开更多
关键词 石墨烯 气体传感单元 集成化 多功能
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A self-powered gas sensor based on PDMS/Ppy triboelectric-gas-sensing arrays for the real-time monitoring of automotive exhaust gas at room temperature 被引量:6
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作者 Haoxuan He Mengyang Zhang +3 位作者 Tianming Zhao Hui Zeng Lili Xing Xinyu Xue 《Science China Materials》 SCIE EI CSCD 2019年第10期1433-1444,共12页
A new self-powered active gas sensor for realtime monitoring of automotive exhaust gas was devised.The pipe-shaped device was fabricated from polydimethylsiloxane/polypyrrole(PDMS/Ppy)triboelectric gas-sensing unit ar... A new self-powered active gas sensor for realtime monitoring of automotive exhaust gas was devised.The pipe-shaped device was fabricated from polydimethylsiloxane/polypyrrole(PDMS/Ppy)triboelectric gas-sensing unit arrays.The gas-sensing units can actively convert the mechanical energy of gas flow into a triboelectric current.The output current signal depends on the species and concentrations of the target chemical gases(CO,NH3,NO)in the gas flow,and thus can be used as a sensing signal.The device consists of seven gas-sensing units with different Ppy derivatives.As the different sensing units respond to the gases in different ways,the device can differentiate between gas species.The working mechanism is attributed to the coupling effect between the triboelectric effect of PDMS/Ppy and the gas-sensing properties of Ppy.The device can be installed in the tailpipe of an automobile,and can thus analyze the exhaust gas in real time without the need for any external electrical power.The results of the present study spur a new research direction for the development of automotive exhaust gas monitoring systems,thus playing an important role in the detection of air pollution. 展开更多
关键词 SELF-POWERED gas sensing TRIBOELECTRIFICATION automotive exhaust gas coupling effect
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A new method of rapid quality detection of vacuum insulation panels
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作者 WANG ShaoJie FENG YongJian +2 位作者 HUANG YuanQing WU JunChao YE YongHan 《Science China(Technological Sciences)》 SCIE EI CAS 2014年第8期1602-1609,共8页
A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measur... A new method of measuring gas pressure in vacuum insulation panels(VIPs)is reported in this study,which provides a fast and efficient quality control option of production.Although there are different methods of measuring gas pressure for VIPs,connecting an internal measurement gauge to external data acquisition units is problematic.The thin high barrier film covering the panel’s core usually prevents external electrical wires or mechanical devices being connected to the inside of the VIPs.To solve this problem,a micro capacitive pressure sensor with 0 to 250 Pa detection range is developed to detect the vacuum pressure.The sensor has high linearity and a sensitivity of 10 mV/Pa.Moreover,through the communication mode study,an ultrasound communications system for VIPs is designed.It shows from operation that this system is stable and reliable,and quick for communication speed.This new method enables the quality detection of VIPs to be completed within 1 second.The minimum detectable pressure of VIPs is below 1 Pa,and the measurement error can be controlled around 5%. 展开更多
关键词 vacuum insulation panels quality detection pressure sensor ultrasonic communication
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