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气蚀工艺
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《国际化工信息》 2002年第4期31-31,共1页
关键词 IMat材料 可控流动 纳米材料 催化剂 活性药物 气蚀工艺
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Fabrication and Emission Properties of a n-ZnO/p-GaN Heterojunction Light-Emitting Diode
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作者 周昕 顾书林 +7 位作者 朱顺明 叶建东 刘伟 刘松民 胡立群 郑有炓 张荣 施毅 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2006年第2期249-253,共5页
We report the fabrication and characterization of light-emitting diodes based on n-ZnO/p-GaN heterojunctions. The n-type ZnO epilayer is deposited by metalorganic chemical vapor deposition (MOCVD) on a MOCVD grown M... We report the fabrication and characterization of light-emitting diodes based on n-ZnO/p-GaN heterojunctions. The n-type ZnO epilayer is deposited by metalorganic chemical vapor deposition (MOCVD) on a MOCVD grown Mg-doped p-GaN layer to form a p-n heterojunction. During the etching process, the relation between the etching depth and the etching time is linear in a HF and NH4 CI solution of a certain ratio. The etching rates of the SiO2 and ZnO are well controlled,which are essential for device fabrication. The current-voltage relationship of this heterojunction shows a diode-like rectifying behavior. In contrast to previous reports,electroluminescence (EL) emissions are observed by the naked eye at room temperature from the n-ZnO/p-GaN heterojunction under forward-and reverse-bias. The origins of these EL emissions are discussed in comparison with the pho- toluminescence spectra. 展开更多
关键词 ZnO/GaN heterojunction light-emitting diode metalorganic chemical vapor deposition etchingtechnology
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