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基于磁控溅射的Pt/PtRh高温薄膜热电偶传感器集成工艺
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作者 张文琦 沈统 +2 位作者 王林斌 赵未昀 邓元 《材料工程》 EI CAS CSCD 北大核心 2024年第9期27-33,共7页
Pt/PtRh为高温薄膜热电偶敏感材料,Al_(2)O_(3)和SiO_(2)为复合绝缘层材料,采用磁控溅射法成功制备Pt/PtRh薄膜热电偶及Al_(2)O_(3)/SiO_(2)复合型上下绝缘层,并通过掩膜-沉积法实现薄膜热电偶图案化制备。结果表明:制备的复合绝缘层Al_... Pt/PtRh为高温薄膜热电偶敏感材料,Al_(2)O_(3)和SiO_(2)为复合绝缘层材料,采用磁控溅射法成功制备Pt/PtRh薄膜热电偶及Al_(2)O_(3)/SiO_(2)复合型上下绝缘层,并通过掩膜-沉积法实现薄膜热电偶图案化制备。结果表明:制备的复合绝缘层Al_(2)O_(3)/SiO_(2)能够有效保证高温薄膜热电偶传感器在1200℃高温下的绝缘性和化学稳定性。Pt/PtRh热电偶阵列精度达到200μm,可在1200℃下稳定工作超过2200 min,经过4000 min升降温循环测试后,热电偶输出热电动势偏差小于1%。热电偶传感器整体厚度小于20μm,集成于合金与热障涂层之间的热电偶在高温服役环境下可稳定工作并测量合金表面温度。多层结构的样件在服役测试中无分层、脱落现象,热电偶稳定输出信号。 展开更多
关键词 高温薄膜热电偶 铂-铂铑热电偶 塞贝克效应 氧化铝绝缘层 氧化绝缘层
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Low voltage organic devices and circuits with aluminum oxide thin film dielectric layer 被引量:2
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作者 SHANG LiWei JI ZhuoYu +4 位作者 CHEN YingPin WANG Hong LIU Xin HAN MaiXin LIU Ming 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第1期95-98,共4页
Low voltage operating organic devices and circuits have been realized using atomic layer deposition deposited aluminum oxide thin film as dielectric layer. The dielectric film has per unit area capacitance of 165 nF/c... Low voltage operating organic devices and circuits have been realized using atomic layer deposition deposited aluminum oxide thin film as dielectric layer. The dielectric film has per unit area capacitance of 165 nF/cm2 and leakage current of 1 nA/cm2 at 1 MV/cm. The devices and circuits use the small-molecule hydrocarbon pentacene as the active semiconductor material. Transistors,inverters,and ring oscillators with operating voltage lower than 5 V were obtained. The mobility of organic field-effect transistors was extracted to be 0.16 cm2/Vs in saturation range,the threshold voltage is 0.3 V,and the on/off current ratio is larger than 105. The gain of inverters is estimated to be 12 at -5 V supply voltage,and the propagation delay is 0.25 ms per stage in 5-stage ring oscillators. 展开更多
关键词 OFET low voltage atomic layer deposition Al2O3 thin film high-k dielectric
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