The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen ...The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen concentration is higher and the thermal conductivity decreases with the increase of oxygen concentration in AlN ceramic;Y 2O 3 acting as a sintering additive should be mixed more into the AlN powder with a lower oxygen concentration.Secondary phases affect the thermal conductivity of AlN significantly.The quantitative relationship between the thermal conductivity and oxygen,Y 2O 3 is developed.展开更多
文摘The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen concentration is higher and the thermal conductivity decreases with the increase of oxygen concentration in AlN ceramic;Y 2O 3 acting as a sintering additive should be mixed more into the AlN powder with a lower oxygen concentration.Secondary phases affect the thermal conductivity of AlN significantly.The quantitative relationship between the thermal conductivity and oxygen,Y 2O 3 is developed.
