利用脉冲激光沉积(PLD)设备在蓝宝石衬底上制备了高质量Zn_(1-x)Mg_xO单晶薄膜,并对其结构和光学特性进行了深入细致的研究。通过能量衍射谱(EDS)确认Zn_(1-x)Mg_xO薄膜的Mg组分为45%。在Zn0.55Mg0.45O薄膜的X射线衍射谱(XRD)中观测到...利用脉冲激光沉积(PLD)设备在蓝宝石衬底上制备了高质量Zn_(1-x)Mg_xO单晶薄膜,并对其结构和光学特性进行了深入细致的研究。通过能量衍射谱(EDS)确认Zn_(1-x)Mg_xO薄膜的Mg组分为45%。在Zn0.55Mg0.45O薄膜的X射线衍射谱(XRD)中观测到了明显的位于36.67°的衍射峰,对应的是(111)晶向的立方相ZnMgO。从透射光谱中可以看出,Zn0.55Mg0.45O具有陡峭的吸收边,没有发生相分离,在透射电镜图谱中也得到了证实。该ZnMgO薄膜还表现出了优异的光学特性,在Zn0.55Mg0.45O材料体系中实现了峰位位于310 nm的紫外光泵浦受激发射,其激光发射的阈值仅为22 k W/cm2。展开更多
本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO...本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO的铅锌矿结构。通过优化磁控溅射参数的方法,获得了c轴方向生长良好的Mg_xZn_(1-x)O薄膜,并成功制得了串联谐振频率以及并联谐振频率分别在2.416 GHz和2.456 GHz的谐振器,测得其有效机电耦合系数为4.081%,回波损耗(S11)为-23.89 d B。这种SMR机械强度高、可靠性高、尺寸小,具有可立体集成到CMOS芯片表面的优势。展开更多
Within the framework of the macroscopic dielectric continuum model and Loudon＇s uniaxial crystal model, the phonon modes of a wurtzite/zinc-blende one-dimensional （1D） cylindrical nanowire （NW） are derived and st...Within the framework of the macroscopic dielectric continuum model and Loudon＇s uniaxial crystal model, the phonon modes of a wurtzite/zinc-blende one-dimensional （1D） cylindrical nanowire （NW） are derived and studied. The analytical phonon states of phonon modes are given. It is found that there exist two types of polar phonon modes, i.e. interface optical （IO） phonon modes and the quasi-confined （QC） phonon modes existing in 1D wurtzite/zinc-blende NWs. Via the standard procedure of field quantization, the Fr6hlich electron-phonon interaction Hamiltonians are obtained. Numerical calculations of dispersive behavior of these phonon modes on a wurtzite/zinc-blende ZnO/MgO NW are performed. The frequency ranges of the IO and QC phonon modes of the ZnO/MgO NWs are analyzed and discussed. It is found that the IO modes only exist in one frequency range, while QC modes may appear in three frequency ranges. The dispersive properties of the IO and QC modes on the free wave-number kz and the azimuthal quantum number m are discussed. The analytical Hamiltonians of electron-phonon interaction obtained here are quite useful for further investigating phonon influence on optoelectronics properties of wurtzite/zinc-blende 1D NW structures.展开更多
基金Supported by National Natural Science Foundation of China(61574063)Science and Technology Program of Guangdong Province(2016A040403106)Science and Technology Project of Guangzhou City(2016201604030047)~~
文摘利用脉冲激光沉积(PLD)设备在蓝宝石衬底上制备了高质量Zn_(1-x)Mg_xO单晶薄膜,并对其结构和光学特性进行了深入细致的研究。通过能量衍射谱(EDS)确认Zn_(1-x)Mg_xO薄膜的Mg组分为45%。在Zn0.55Mg0.45O薄膜的X射线衍射谱(XRD)中观测到了明显的位于36.67°的衍射峰,对应的是(111)晶向的立方相ZnMgO。从透射光谱中可以看出,Zn0.55Mg0.45O具有陡峭的吸收边,没有发生相分离,在透射电镜图谱中也得到了证实。该ZnMgO薄膜还表现出了优异的光学特性,在Zn0.55Mg0.45O材料体系中实现了峰位位于310 nm的紫外光泵浦受激发射,其激光发射的阈值仅为22 k W/cm2。
文摘本文研制了一种基于磁控溅射掺镁氧化锌(Mg_xZn_(1-x)O)压电薄膜的S波段固体装配型体声波谐振器(SMR-FBAR)。相比传统的氧化锌(ZnO)薄膜,Mg_xZn_(1-x)O具有高纵波声速,高电阻率优点,而且Mg原子以替位或填隙的方式进入晶格,没有改变ZnO的铅锌矿结构。通过优化磁控溅射参数的方法,获得了c轴方向生长良好的Mg_xZn_(1-x)O薄膜,并成功制得了串联谐振频率以及并联谐振频率分别在2.416 GHz和2.456 GHz的谐振器,测得其有效机电耦合系数为4.081%,回波损耗(S11)为-23.89 d B。这种SMR机械强度高、可靠性高、尺寸小,具有可立体集成到CMOS芯片表面的优势。
基金Supported by National Natural Science Foundation of China under Grant No.60906042by the National Basic Research Program of China under Grant No.2006CB921607
文摘Within the framework of the macroscopic dielectric continuum model and Loudon＇s uniaxial crystal model, the phonon modes of a wurtzite/zinc-blende one-dimensional （1D） cylindrical nanowire （NW） are derived and studied. The analytical phonon states of phonon modes are given. It is found that there exist two types of polar phonon modes, i.e. interface optical （IO） phonon modes and the quasi-confined （QC） phonon modes existing in 1D wurtzite/zinc-blende NWs. Via the standard procedure of field quantization, the Fr6hlich electron-phonon interaction Hamiltonians are obtained. Numerical calculations of dispersive behavior of these phonon modes on a wurtzite/zinc-blende ZnO/MgO NW are performed. The frequency ranges of the IO and QC phonon modes of the ZnO/MgO NWs are analyzed and discussed. It is found that the IO modes only exist in one frequency range, while QC modes may appear in three frequency ranges. The dispersive properties of the IO and QC modes on the free wave-number kz and the azimuthal quantum number m are discussed. The analytical Hamiltonians of electron-phonon interaction obtained here are quite useful for further investigating phonon influence on optoelectronics properties of wurtzite/zinc-blende 1D NW structures.
