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MEMS用硅单晶缺陷对各向异性腐蚀的影响 被引量:2
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作者 韩焕鹏 杨静 杨洪星 《微纳电子技术》 北大核心 2017年第10期720-724,共5页
为了满足微电子机械系统(MEMS)器件制作要求,各向异性腐蚀加工后的硅衬底需具有良好的表面质量。针对MEMS用硅单晶在各向异性腐蚀加工过程中出现的腐蚀表面粗糙、不平整问题,采用常规直拉(Cz)单晶、掺锗直拉单晶和磁场直拉单晶等不同工... 为了满足微电子机械系统(MEMS)器件制作要求,各向异性腐蚀加工后的硅衬底需具有良好的表面质量。针对MEMS用硅单晶在各向异性腐蚀加工过程中出现的腐蚀表面粗糙、不平整问题,采用常规直拉(Cz)单晶、掺锗直拉单晶和磁场直拉单晶等不同工艺制备了多种硅单晶样品,并测试了其常规电参数、氧杂质浓度和微缺陷等参数。针对各种硅单晶样品,模拟了器件制作过程中各向异性腐蚀实验,获得了硅单晶的腐蚀表面情况,对比得出了影响硅单晶各向异性腐蚀质量的关键因素在于硅单晶内的氧杂质浓度及氧沉淀密度的控制,并从原子表面能和应力等方面推断晶体中氧沉淀缺陷对各向异性腐蚀质量的影响机理。 展开更多
关键词 微电子机械系统(MEMS) 硅单晶 各向异性腐蚀 氧杂质浓度 微缺陷 沉淀
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Simulation of high conversion efficiency and open-circuit voltages of α-si/poly-silicon solar cell 被引量:2
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作者 CHEN AQing SHAO QingYi 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2011年第8期1466-1470,共5页
The P+ α-Si /N+ polycrystalline solar cell is molded using the AMPS-1D device simulator to explore the new high efficiency thin film poly-silicon solar cell. In order to analyze the characteristics of this device and... The P+ α-Si /N+ polycrystalline solar cell is molded using the AMPS-1D device simulator to explore the new high efficiency thin film poly-silicon solar cell. In order to analyze the characteristics of this device and the thickness of N+ poly-silicon, we consider the impurity concentration in the N+ poly-silicon layer and the work function of transparent conductive oxide (TCO) in front contact in the calculation. The thickness of N+ poly-silicon has little impact on the device when the thickness varies from 20 μm to 300 μm. The effects of impurity concentration in polycrystalline are analyzed. The conclusion is drawn that the open-circuit voltage (Voc) of P+ α-Si /N+ polycrystalline solar cell is very high, reaching 752 mV, and the conversion efficiency reaches 9.44%. Therefore, based on the above optimum parameters the study on the device formed by P+ α-Si/N+ poly-silicon is significant in exploring the high efficiency poly-silicon solar cell. 展开更多
关键词 P+ α-Si/N+ poly-silicon solar cell photovoltaics thin-film polycrystalline-silicon
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Oxygen vacancies effects on phase diagram of epitaxial La1-xSrxMnO3 thin films
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作者 Qian Wan KuiJuan Jin +9 位作者 QingQing Li YaQing Feng Can Wang Chen Ge Meng He HuiBin Lu HaiZhong Guo XiaoLong Li YuPing Yang GuoZhen Yang 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS CSCD 2017年第5期67-72,共6页
We investigated the effects of oxygen vacancies on the structural, magnetic, and transport properties of Lal-xSrxMnO3 (x=0.1, 0.2, 0.33, 0.4, and 0.5) grown around a critical point (without/with oxygen vacancies) ... We investigated the effects of oxygen vacancies on the structural, magnetic, and transport properties of Lal-xSrxMnO3 (x=0.1, 0.2, 0.33, 0.4, and 0.5) grown around a critical point (without/with oxygen vacancies) under low oxygen pressure (10 Pa) and high oxygen pressure (40 Pa). We found that all films exhibit ferromagnetic behavior below the magnetic critical temperature, and that the films grown under low oxygen pressures have degraded magnetic properties with lower Curie temperatures and smaller magnetic moments. These results show that in epitaxial La1-xSrxMnO3 thin films, the magnetic and transport properties are very sensitive to doping concentration and oxygen vacancies. Phase diagrams of the films based on the doping concentration and oxygen vacancies were plotted and discussed. 展开更多
关键词 Lal-xSrxMnO3 thin films phase diagram oxygen vacancies
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