期刊文献+
共找到5篇文章
< 1 >
每页显示 20 50 100
SiO2/4H-SiC界面氮化退火
1
作者 赵艳黎 李诚瞻 +2 位作者 陈喜明 王弋宇 申华军 《半导体技术》 CAS CSCD 北大核心 2017年第3期215-218,共4页
通过1 300℃高温干氧热氧化法在n型4H-SiC外延片上生长了厚度为60 nm的SiO2栅氧化层。为了开发适合于生长低界面态密度和高沟道载流子迁移率的SiC MOSFET器件产品的栅极氧化层退火条件,研究了不同退火条件下的SiO2/SiC界面电学特性参数... 通过1 300℃高温干氧热氧化法在n型4H-SiC外延片上生长了厚度为60 nm的SiO2栅氧化层。为了开发适合于生长低界面态密度和高沟道载流子迁移率的SiC MOSFET器件产品的栅极氧化层退火条件,研究了不同退火条件下的SiO2/SiC界面电学特性参数。制作了MOS电容和横向MOSFET器件,通过表征SiO2栅氧化层C-V特性和MOSFET器件I-V特性,提取平带电压、C-V磁滞电压、SiO2/SiC界面态密度和载流子沟道迁移率等电学参数。实验结果表明,干氧氧化形成SiO2栅氧化层后,在1 300℃通入N2退火30 min,随后在相同温度下进行NO退火120 min,为最佳栅极氧化层退火条件,此时,SiO2/SiC界面态密度能够降低至2.07×1012cm-2·e V^(-1)@0.2 e V,SiC MOSFET沟道载流子迁移率达到17 cm2·V^(-1)·s^(-1)。 展开更多
关键词 SiO2/4H-SiC 氮化退火 界面态密度 平带电压 C-V磁滞电压 迁移率
下载PDF
浦项脱碳氮化退火生产取向硅钢最新技术 被引量:1
2
作者 谌剑 卢凤喜 《金属材料研究》 2010年第4期52-54,共3页
新技术的特点是脱碳退火和氮化处理同时进行,其处理温度比常规的退火温度高。这种技术可节能高效地生产高磁感、低铁损的新型取向硅钢。
关键词 低温板坯加热 脱碳氮化退火 节能高效
原文传递
Effect of annealing on microstructure and properties of Si_3N_4-AlN composite ceramics 被引量:2
3
作者 徐鹏 杨建 +1 位作者 丘泰 陈兴 《Journal of Central South University》 SCIE EI CAS 2011年第4期960-965,共6页
Aiming at developing novel microwave-transparent ceramics with low dielectric loss, high thermal conductivity and high strength, Si3Na-AIN (30%, mass fraction) composite ceramics with La203 as sintering additive wer... Aiming at developing novel microwave-transparent ceramics with low dielectric loss, high thermal conductivity and high strength, Si3Na-AIN (30%, mass fraction) composite ceramics with La203 as sintering additive were prepared by hot-pressing at 1 800 ℃ and subsequently annealed at 1 450 ℃ and 1 850 ℃ for 2 h and 4 h, respectively. The materials were characterized by XRD and SEM. The effect of annealing process on the phase composition, sintering performance, microstructure, bending strength, dielectric loss and thermal conductivity of the materials was investigated. The results showed that both annealing at 1 850 ℃ and 1 450 ℃ promoted the phase transformation of α-Si3N4 to β-Si3N4. After annealing at 1 850 ℃, grain growth to a certain extent occurred in the materials. Especially, the elongated β-Si3N4 grains showed a slight increase in diameter from 0.2 μm to 0.6 μm approximately and a decrease in aspect ratio. As a result, as the annealing time increased to 4 h, the bending strength declined from 456 MPa to 390 MPa, whereas the dielectric loss decreased to 2.15× 10^-3 and the thermal conductivity increased to 16.3 W/(m.K) gradually. When annealed at 1 450 ℃, increasing the annealing time to 4 h significantly promoted the crystallization of glassy phase to La2Si6N803 phase in the materials, which led to the increase in bending strength to 619 MPa and thermal conductivity to 15.9 W/(m·K), respectively, and simultaneously the decrease in dielectric loss to 1.53× 10^-3. 展开更多
关键词 Si3N4-A1N composite ANNEALING La203 bending strength thermal conductivity dielectric loss
下载PDF
Growth of Semi-Insulating GaN Using N2 as Nucleation Layer Carrier Gas Combining with an Optimized Annealing Time
4
作者 周忠堂 邢志刚 +2 位作者 郭丽伟 陈弘 周均铭 《Chinese Physics Letters》 SCIE CAS CSCD 2007年第6期1645-1648,共4页
Semi-insulating (SI) GaN is grown using N2 as the nucleation layer (NL) carrier gas combined with an optimized annealing time by metalorganic chemical vapour deposition. Influence of using 1-12 and N2 as the NL ca... Semi-insulating (SI) GaN is grown using N2 as the nucleation layer (NL) carrier gas combined with an optimized annealing time by metalorganic chemical vapour deposition. Influence of using 1-12 and N2 as the NL carrier gas is investigated in our experiment. It is found that the sheet resistance of unintentionally doped GaN can be increased from 10^4 Ω/sq to 10^10 Ω/sq by changing the NL carrier gas from 1-12 to N2 while keeping the other growth parameters to be constant, however crystal quality and roughness of the tilm are degraded unambiguously. This situation can be improved by optimizing the NL annealing time. The high resistance of GaN grown on NL using N2 as the carrier gas is due to higher density of threading dislocations caused by the higher density of nucleation islands and small statistic diameter grain compared to the one using 1-12 as carrier gas. Annealing the NL for an optimized annealing time can decrease the density of threading dislocation and improve the tilm roughness and interface of AlGaN/GaN without degrading the sheet resistance of as-grown GaN signiticantly. High-quality SI GaN is grown after optimizing the annealing time, and AlGaN/GaN high electron mobility transistors are also prepared. 展开更多
关键词 UNINTENTIONALLY DOPED GAN FILMS DISLOCATIONS BUFFER
下载PDF
A model for thermal annealing on forming In—N clusters in InGaNP
5
作者 ZHAO ChuanZhen CHEN Lei +5 位作者 LI NaNa ZHANG HuanHuan CHEN YaFei WEI Tong TANG ChunXiao XIE ZiLi 《Science China(Physics,Mechanics & Astronomy)》 SCIE EI CAS 2012年第5期798-801,共4页
We develop a model for the effect of thermal annealing on forming In--N dusters in GalnNP according to thermodynamics. The average energy variation for forming an In--N bond in the model is estimated according to the ... We develop a model for the effect of thermal annealing on forming In--N dusters in GalnNP according to thermodynamics. The average energy variation for forming an In--N bond in the model is estimated according to the theoretical calculation. Using the model, the added number of In--N bonds per mol of InGaNP, the added number of nearest-neighbor In atoms per N atom and the average number of nearest-neighbor In atoms per N atom after annealing are calculated. The different function of In--N clusters in InGaNP and InGaN is also discussed, which is due to the different environments around the In--N clusters. 展开更多
关键词 InGaNP ANNEALING In--N clusters THERMODYNAMICS
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部