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基于硅基MEMS和氮化铝工艺的高集成度射频电路设计技术
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作者 王驰 卢伊伶 《信息记录材料》 2019年第6期65-66,共2页
小型化和高效散热是综合电子系统设计的两个主要需求。基于硅基MEMS工艺的射频电路具有集成度高、一致性好的特点;基于氮化铝基板工艺的射频电路具有高散热效率、易于多层布线的特点。本文将两者的优势结合起来,采用新型工艺和设计理念... 小型化和高效散热是综合电子系统设计的两个主要需求。基于硅基MEMS工艺的射频电路具有集成度高、一致性好的特点;基于氮化铝基板工艺的射频电路具有高散热效率、易于多层布线的特点。本文将两者的优势结合起来,采用新型工艺和设计理念对集成的射频前端的三维结构中的垂直互连进行了仿真测试,实现X频段插入损耗小于0.2dB。利用氮化铝工艺实现的功分网络在8GHz^12GHz的频率范围内,S21和S31不小于-4dB,且波动不大于0.1dB。 展开更多
关键词 射频前端 MEMS工艺 氮化铝工艺 微型化
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Removal of AlN from secondary aluminum dross by pyrometallurgical treatment 被引量:11
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作者 WANG Jian-hui ZHONG Ye-qing +2 位作者 TONG Yue XU Xun-lin LIN Gao-yong 《Journal of Central South University》 SCIE EI CAS CSCD 2021年第2期386-397,共12页
A new process of AlN removal from secondary aluminum dross(SAD)by pyrometallurgical treatment with added cryolite was applied for solving the problem of recycling the secondary aluminum dross.The response surface meth... A new process of AlN removal from secondary aluminum dross(SAD)by pyrometallurgical treatment with added cryolite was applied for solving the problem of recycling the secondary aluminum dross.The response surface methodology(RSM)was used to design experiments and optimize parameters.The results show that adding the appropriate amount of cryolite can effectively promote the oxidation of AlN in the SAD,and too much cryolite will reduce the promotion effect.The effects of roasting temperature and cryolite on the denitrification rate are the most significant(p<0.0001)followed by holding time.Predicted values of the denitrification rate are found to be in good agreement with experimental values(R^(2)=0.9894 and R_(adj)^(2)=0.9775),which confirms the validity of the model employed.The optimum conditions of roasting temperature of 750°C,holding time of 194 min,mass fraction of cryolite of 17.7%are obtained according to the quadratic model.Under these conditions,the maximum actual denitrification rate reaches 94.71%and the AlN content in the SAD is only 0.55 wt%.The unfired brick with compressive strength of 18.62 MPa(GB/T 2542−2012)was prepared based on the roasted SAD. 展开更多
关键词 secondary aluminum dross(SAD) ALN pyrometallurgy treatment denitrification rate response surface methodology(RSM)
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