研究了热退火对InGaN/GaN多量子阱LED的Ni/Au p GaN欧姆接触的影响。发现在空气和N2气氛中交替地进行热退火的过程中Ni/Au接触特性显示出可逆现象。Ni/Au p GaN接触的串联电阻在空气中随合金化时间逐渐减小,在随后的N2中的热退火后会使...研究了热退火对InGaN/GaN多量子阱LED的Ni/Au p GaN欧姆接触的影响。发现在空气和N2气氛中交替地进行热退火的过程中Ni/Au接触特性显示出可逆现象。Ni/Au p GaN接触的串联电阻在空气中随合金化时间逐渐减小,在随后的N2中的热退火后会使该串联电阻增加,但在空气中再次热退火能使接触特性得到恢复。同时对Ni/Au p GaN接触在空气中合金化过程中的层反转的成因进行了讨论。展开更多
基金supported by the National Key Basic Research Program of China(973)(2015CB932202,2012CB933301)National Natural Science Foundation of China(61274065,51173081,61136003,BZ2010043,51372119,51172110,21304047,21373114,21003076)+7 种基金Innovation Team of the Ministry of Education of China(IRT1148)Ministry of Education Humanities and Social Science Research Projects,China(13YJCZH091)Natural Science Foundation of Jiangsu Province,China(BK20141424)Priority Academic Program Development of Jiangsu Provincial Higher Education Institutions,China(YX030001)Ordinary University Graduate Student Practical Innovation Projects of Jiangsu Province,China(SJLX15_0390)Pandeng Project of Nanjing University of Posts and Telecommunications,China(NY214085)Open Foundation from Jilin UniversityChina(IOSKL2015KF32)~~
文摘研究了热退火对InGaN/GaN多量子阱LED的Ni/Au p GaN欧姆接触的影响。发现在空气和N2气氛中交替地进行热退火的过程中Ni/Au接触特性显示出可逆现象。Ni/Au p GaN接触的串联电阻在空气中随合金化时间逐渐减小,在随后的N2中的热退火后会使该串联电阻增加,但在空气中再次热退火能使接触特性得到恢复。同时对Ni/Au p GaN接触在空气中合金化过程中的层反转的成因进行了讨论。