The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen ...The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen concentration is higher and the thermal conductivity decreases with the increase of oxygen concentration in AlN ceramic;Y 2O 3 acting as a sintering additive should be mixed more into the AlN powder with a lower oxygen concentration.Secondary phases affect the thermal conductivity of AlN significantly.The quantitative relationship between the thermal conductivity and oxygen,Y 2O 3 is developed.展开更多
基金supported by the Jiangxi Provincial Natural Science Foundation,China(No.20192BAB216009)the Science and Technology Planning Project of Hunan Province,China(No.2019WK2051)Science and Technology Project of Changsha,Hunan,China(No.kh2003023)。
文摘The experiments and theoretical analysis on the thermal conductivity of AlN ceramic substrate are carried out.All the results prove the following viewpoints:the maximum thermal conductivity of AlN with a lower oxygen concentration is higher and the thermal conductivity decreases with the increase of oxygen concentration in AlN ceramic;Y 2O 3 acting as a sintering additive should be mixed more into the AlN powder with a lower oxygen concentration.Secondary phases affect the thermal conductivity of AlN significantly.The quantitative relationship between the thermal conductivity and oxygen,Y 2O 3 is developed.
