Nitrogen implantation in silicon substrate at fixed energy of 35keV and split dose of 10 14～5×10 14cm -2 is performed before gate oxidation.The experiment results indicate that with the increasing of implanta...Nitrogen implantation in silicon substrate at fixed energy of 35keV and split dose of 10 14～5×10 14cm -2 is performed before gate oxidation.The experiment results indicate that with the increasing of implantation dose of nitrogen,oxidation rate of gate decreases.The retardation in oxide growth is weakened due to thermal annealing after nitrogen implantation.After nitrogen is implanted at the dose of 2×10 14cm -2,initial O 2 injection method which is composed of an O 2 injection/N 2 annealing/main oxidation,is applied for preparation of 3 4nm gate oxide.Compared with the control process,which is composed of N 2 annealing/main oxidation,initial O 2 injection process suppresses leakage current of the gate oxide.But Q bd and HF C-V characteristics are almost identical for the samples fabricated by two different oxidation processes.展开更多
In order to enhance the antibacterial ability of titanium components,an antibacterial coating was fabricated on Ti surface by micro-arc oxidation(MAO)and further nitrogen plasma immersion ion implantation(N-PIII).The ...In order to enhance the antibacterial ability of titanium components,an antibacterial coating was fabricated on Ti surface by micro-arc oxidation(MAO)and further nitrogen plasma immersion ion implantation(N-PIII).The XPS spectra demonstrated that nitrogen was incorporated into TiO2 coatings by N-PIII and the nitrogen content on the surface of TiO2 coatings increased as the N-PIII time increased.Nitrogen-incorporated samples exhibited remarkably increased absorbance in the visible region and the light absorption edge of nitrogen-incorporated samples showed a redshift compared to MAO samples.Escherichia coli and Staphylococcus aureus were seeded on the samples to assess their antibacterial ability.The bacterial experiment demonstrated that nitrogen-incorporated TiO2 could effectively reduce the bacterial viability in visible light.Thus,the antibacterial TiO2 coatings fabricated by MAO and further N-PIII might have large potential in the medical and marine fields.展开更多
文摘Nitrogen implantation in silicon substrate at fixed energy of 35keV and split dose of 10 14～5×10 14cm -2 is performed before gate oxidation.The experiment results indicate that with the increasing of implantation dose of nitrogen,oxidation rate of gate decreases.The retardation in oxide growth is weakened due to thermal annealing after nitrogen implantation.After nitrogen is implanted at the dose of 2×10 14cm -2,initial O 2 injection method which is composed of an O 2 injection/N 2 annealing/main oxidation,is applied for preparation of 3 4nm gate oxide.Compared with the control process,which is composed of N 2 annealing/main oxidation,initial O 2 injection process suppresses leakage current of the gate oxide.But Q bd and HF C-V characteristics are almost identical for the samples fabricated by two different oxidation processes.
基金Projects(51831011,31670980)supported by the National Natural Science Foundation of ChinaProject(51525207)supported by the National Natural Science Foundation for Distinguished Young Scholars of ChinaProjects(18YF1426900,18410760600)supported by the Science and Technology Commission of Shanghai Municipality,China.
文摘In order to enhance the antibacterial ability of titanium components,an antibacterial coating was fabricated on Ti surface by micro-arc oxidation(MAO)and further nitrogen plasma immersion ion implantation(N-PIII).The XPS spectra demonstrated that nitrogen was incorporated into TiO2 coatings by N-PIII and the nitrogen content on the surface of TiO2 coatings increased as the N-PIII time increased.Nitrogen-incorporated samples exhibited remarkably increased absorbance in the visible region and the light absorption edge of nitrogen-incorporated samples showed a redshift compared to MAO samples.Escherichia coli and Staphylococcus aureus were seeded on the samples to assess their antibacterial ability.The bacterial experiment demonstrated that nitrogen-incorporated TiO2 could effectively reduce the bacterial viability in visible light.Thus,the antibacterial TiO2 coatings fabricated by MAO and further N-PIII might have large potential in the medical and marine fields.
