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Ti_(1-x)Al_xN薄膜的制备及性能研究 被引量:2
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作者 熊锐 李佐宜 +4 位作者 胡作启 杨晓非 徐瑛 林更琪 胡用时 《真空科学与技术》 EI CSCD 北大核心 1998年第1期22-25,共4页
介绍了利用反应溅射法制备Ti1-xAlxN薄膜的工艺过程,测量并分析了Ti1-xAlxN薄膜的光学性能及电阻率与薄膜成分的关系。结果表明,Ti1-zalxN薄膜的折射率和消光系数均随薄膜中Al含量x的增加而减小,电阻率则随x的增加而增大。并从薄膜... 介绍了利用反应溅射法制备Ti1-xAlxN薄膜的工艺过程,测量并分析了Ti1-xAlxN薄膜的光学性能及电阻率与薄膜成分的关系。结果表明,Ti1-zalxN薄膜的折射率和消光系数均随薄膜中Al含量x的增加而减小,电阻率则随x的增加而增大。并从薄膜的基本结构变化过程对实验结果作出解释。 展开更多
关键词 薄膜 射频反应溅射 光学性质 电阻率 薄膜
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反应溅射Ti-Si-N纳米晶复合薄膜研究
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作者 戴嘉维 胡祖光 +2 位作者 祝新发 陈练 李戈扬 《电子显微学报》 CAS CSCD 北大核心 2004年第4期372-372,共1页
关键词 -硅-复合薄膜 纳米晶体 反应溅射法 透射电子显微镜 结构分析
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纳米晶Fe-Ti-N软磁薄膜的研究
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作者 孟卫民 《甘肃教育学院学报(自然科学版)》 2002年第1期36-39,共4页
用射频反应溅射法制备了含Ti量高低不同的两种Fe Ti N合金薄膜 .研究发现 ,沉积态低Ti含量的薄膜是α Fe的多晶体 ,晶粒尺寸约 2 0nm ,沉积态高Ti含量的薄膜则是非晶结构 ,经适当热处理后 ,纳米晶α Fe从中晶化生成 ,晶粒尺寸约 10nm .... 用射频反应溅射法制备了含Ti量高低不同的两种Fe Ti N合金薄膜 .研究发现 ,沉积态低Ti含量的薄膜是α Fe的多晶体 ,晶粒尺寸约 2 0nm ,沉积态高Ti含量的薄膜则是非晶结构 ,经适当热处理后 ,纳米晶α Fe从中晶化生成 ,晶粒尺寸约 10nm .和低Ti含量Fe Ti N薄膜相比 ,高Ti含量Fe Ti 展开更多
关键词 软磁薄膜 纳米晶 射频反应溅射法 交换耦合 合金薄膜 非晶结构 软磁特性
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多弧离子镀TiCrAlCN薄膜及其微观结构与摩擦学性能研究 被引量:1
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作者 郭岩 叶智 +5 位作者 张超 徐勃 田树高 祖平文 杨文涛 聂海军 《电镀与涂饰》 CAS CSCD 北大核心 2019年第17期934-938,共5页
采用工业化多弧离子镀设备在4Cr5MoSiV1钢表面制备TiCrAlCN硬质薄膜,以便改善其力学和摩擦学性能。借助扫描电子显微镜、X射线衍射仪、维氏显微硬度计和摩擦磨损试验仪对不同工艺条件下所得TiCrAlCN薄膜的微观形貌、微观结构、力学性能... 采用工业化多弧离子镀设备在4Cr5MoSiV1钢表面制备TiCrAlCN硬质薄膜,以便改善其力学和摩擦学性能。借助扫描电子显微镜、X射线衍射仪、维氏显微硬度计和摩擦磨损试验仪对不同工艺条件下所得TiCrAlCN薄膜的微观形貌、微观结构、力学性能和耐磨性进行分析与测试。结果表明:TiCrAlCN薄膜为纳米晶(TiAl)(CN)固溶体,含少量Cr2N。高碳含量的TiCrAlCN薄膜还含非晶C相、且晶粒细小,具有(111)晶面取向,表现出高硬度和优异的耐磨减摩特性。 展开更多
关键词 -铬-铝-碳-薄膜 多弧离子镀 微观结构 显微硬度 耐磨 减摩
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TiN_x系统的电子结构及所关联的光学性质 被引量:1
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作者 张志鹏 李书平 +1 位作者 林海 沈耀文 《量子电子学报》 CAS CSCD 北大核心 2003年第1期109-113,共5页
本文使用LMTO-ASA能带方法和超原胞方法计算了Ti-N系统中三个稳定相(α-Ti,ε-Ti2N和δ-TiN)的电子结构,然后通过将这三个稳定相作为样本并借助于统计超原胞方法,本文全面计算了TiNx系统的电子结构。在这基础上,我们又进一步计算了TiNx... 本文使用LMTO-ASA能带方法和超原胞方法计算了Ti-N系统中三个稳定相(α-Ti,ε-Ti2N和δ-TiN)的电子结构,然后通过将这三个稳定相作为样本并借助于统计超原胞方法,本文全面计算了TiNx系统的电子结构。在这基础上,我们又进一步计算了TiNx系统的联合态密度,并利用所得结果初步探讨了TiNx系统的光学性质。通过与金的联合态密度的比较,我们得到了当组分x在0.4至0.6范围内,TiNx镀膜表观上可呈现金黄色。 展开更多
关键词 TiNx系统 电子结构 光学性质 化合物薄膜
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Effect of deposition parameters on mechanical properties of TiN films coated on 2A12 aluminum alloys by arc ion plating (AIP) 被引量:1
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作者 AWAD Samir Hamid 《Journal of Chongqing University》 CAS 2005年第1期28-32,共5页
TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were mea... TiN films were deposited on 2A12 aluminum alloy by arc ion plating (AIP). The Vickers hardness of the films deposited at different bias voltages and different nitrogen gas pressures, and that of the substrate were measured. The surface roughness of the TiN films diposited at –30 V and –80 V respectively and at different nitrogen gas pressure was measured also. The mass loss of TiN films deposited at 0 V, –30 V and –80 V respectively were analyzed in dry sand rubber wheel abrasive wear tests and wet ones in comparison with uncoated Al alloy and austenitic stainless steel (AISI 316L). It is revealed that the highest hardness of the TiN film is obtained at a bias voltage of –30 V and a N2 gas pressure of 0.5 Pa. The surface roughness of the film is larger at –80 V than that at –30 V and reduces as the increase of the N2 gas pressure. The mass loss of TiN-film coated 2A12 aluminum alloy is remarkably less than that of uncoated Al alloy and also that of AISI 316L, which indicates that the abrasive wear rate is greatly reduced by the application of TiN coating. TiN coating deposited by arc ion plating (AIP) technique on aluminum alloy can be a potential coating for machine parts requiring preciseness and lightness. 展开更多
关键词 aluminum alloys arc ion plating HARDNESS wear resistance TiN film.
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Characterization of DC magnetron sputtering deposited thin films of TiN for SBN/MgO/TiN/Si structural waveguide
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作者 徐玄前 叶辉 邹桐 《Journal of Zhejiang University-Science A(Applied Physics & Engineering)》 SCIE EI CAS CSCD 2006年第3期472-476,共5页
Optimal parameters for depositing Titanium nitride (TIN) thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si (100) substrates by DC reactive magnetron sputtering, at... Optimal parameters for depositing Titanium nitride (TIN) thin films by DC reactive magnetron sputtering were determined. TiN thin films were deposited on Si (100) substrates by DC reactive magnetron sputtering, at different temperatures, different electrical current values, and different N2/Ar ratios. Structural characteristics of TiN thin films were measured by X-ray diffraction (XRD); surface morphology of the thin films was characterized using an atomic force microscope (AFM). The electric resistivity of the TiN films was measured by a four-point probe. In the result, temperature is 500℃, electrical current value is 1.6 A, pure N2 is the reacting gas, TiN thin film has the preferred (200) orientation, resistance is small enough for its use as bottom electrodes. 展开更多
关键词 Titanium nitride (TIN) Thin film SPUTTERING ORIENTATION WAVEGUIDE
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脉冲高能量密度等离子体法制备TiN薄膜及其摩擦磨损性能研究 被引量:27
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作者 刘元富 张谷令 +2 位作者 王久丽 刘赤子 杨思泽 《物理学报》 SCIE EI CAS CSCD 北大核心 2004年第2期503-507,共5页
利用脉冲高能量密度等离子体技术在室温条件下在 4 5号钢基材上制备出了超硬耐磨TiN薄膜 .利用XRD ,XPS ,AES ,SEM等手段分析了薄膜的成分及显微组织结构 ,并测试了薄膜的硬度分布及摩擦磨损性能 .结果表明 :薄膜主要组成相为TiN ,薄膜... 利用脉冲高能量密度等离子体技术在室温条件下在 4 5号钢基材上制备出了超硬耐磨TiN薄膜 .利用XRD ,XPS ,AES ,SEM等手段分析了薄膜的成分及显微组织结构 ,并测试了薄膜的硬度分布及摩擦磨损性能 .结果表明 :薄膜主要组成相为TiN ,薄膜组织致密、均匀 ,与基材之间存在较宽的混合界面 ;薄膜硬度高 。 展开更多
关键词 氮钛薄膜 脉冲高能量密度等离子体 薄膜生长 耐磨性 显微组织 结构分析
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Study on Titanium Nitride Film Modified for Intraocular Lens
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作者 ZHANG Bai-ming GU Han-qing 《Chinese Journal of Biomedical Engineering(English Edition)》 2009年第4期171-177,184,共8页
Objective:To study the characteristics of the intraocular lens using ion beam sputtering depositing titanium nitride thin film on the intraocular lens(IOLs).Methods:To deposite titanium nitride thin film on the top of... Objective:To study the characteristics of the intraocular lens using ion beam sputtering depositing titanium nitride thin film on the intraocular lens(IOLs).Methods:To deposite titanium nitride thin film on the top of intraocular lens by ion beam sputtering depositing.We analyzed the surface morphology of intraocular lens through SEM and AFM.We detected intraocular lens resolution through the measurement of intraocular lens.Biocompatibility of intraocular lens is preliminary evaluated in this test.Results:The surface morphology of intraocular lens material was not changed,and was in line with the requirements of smoothness.Resolution was in line with national requirements.Unmodified and modified IOLs's cytotoxicity were 1 and 0.6 grade respectively.Hemolytic rates of modified and unmodified were both less than 5%.Conclusion:Ion beam sputtering deposition of objects didn't only affect the surface morphology and the basic optical performance,but also can enhance the biocompatibility of intraocular lens.Ion beam sputtering deposition technique has provided new methods for the surface modification of IOLs and PMMA materials. 展开更多
关键词 titanium nitride intraocular lens surface modification RESOLUTION BIOCOMPATIBILITY
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An Efficient Experimental Remedy to Protect Bell-Metal from Losing Its Bright Golden Colour
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作者 Sankar Moni Borah 《Journal of Physical Science and Application》 2014年第7期440-443,共4页
Bell-metal, mainly an alloy of copper and tin has been in different uses since many years in the history of human civilization. This work provides an efficient and eco-friendly method to protect bell-metal from oxidat... Bell-metal, mainly an alloy of copper and tin has been in different uses since many years in the history of human civilization. This work provides an efficient and eco-friendly method to protect bell-metal from oxidation when left in the atmosphere for a long duration which enables the bell-metal to retain its bright golden yellow colour. Titanium nitride thin film deposition by reactive cylindrical magnetron sputtering method is done for this purpose. Besides retaining the bright golden colour of the bell-metal, the deposited titanium nitride film also provides hardness and corrosion resistance to the bell-metal surface thereby providing durability to the material. 展开更多
关键词 Bell-metal MAGNETRON sputtering titanium nitride
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(Ti,Zr)N复合薄膜的微观结构及性能 被引量:8
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作者 高玉周 史雅琴 +1 位作者 林国强 严立 《大连海事大学学报》 CAS CSCD 北大核心 2002年第2期81-84,共4页
利用电弧离子镀方法 ,对独立的Ti靶和Zr靶的电流进行控制 ,成功地在高速钢基体上制备了不同成分配比的 (Ti,Zr)N薄膜 .透射电子显微镜结果表明 :(Ti,Zr)N薄膜为单一的fcc结构 .采用X射线衍射分析显示 :(Ti,Zr)N薄膜出现分离的 (Ti,Zr)N... 利用电弧离子镀方法 ,对独立的Ti靶和Zr靶的电流进行控制 ,成功地在高速钢基体上制备了不同成分配比的 (Ti,Zr)N薄膜 .透射电子显微镜结果表明 :(Ti,Zr)N薄膜为单一的fcc结构 .采用X射线衍射分析显示 :(Ti,Zr)N薄膜出现分离的 (Ti,Zr)N、(Zr ,Ti)N、TiN、ZrN的混合相结构 .(Ti,Zr)N膜层随弧电流的增加 ,择优取向从 (2 2 0 )→ (111) (2 2 0 )→ (111)变化 .显微硬度测试表明 ,薄膜具有很高的硬度 ,在较宽的成分范围内硬度基本保持一致 .同时探讨了 (Ti,Zr)N薄膜的宏观残余应力、显微硬度之间的关系及其微观机制 . 展开更多
关键词 复合薄膜 微观结构 电弧离子镀 显微硬度 TIN薄膜 超硬涂层 复合薄膜
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Microstructure controlling of Ti/N particles dissipated energy to superficial layer of titanium nitride film
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作者 MAZhongquan ZHANGQin 《Chinese Science Bulletin》 SCIE EI CAS 2004年第3期230-234,共5页
The titanium nitride (TiNx) thin film with a controllable surface structure was fabricated by the dc-reactive magnetron sputtering technique, and the variation of microstructure in the surface layer with the energy of... The titanium nitride (TiNx) thin film with a controllable surface structure was fabricated by the dc-reactive magnetron sputtering technique, and the variation of microstructure in the surface layer with the energy of condensed adatom was investigated through X-ray diffraction (XRD) pattern and transmission electron microscope(TEM). It was found that the lattice parameters and the full width at half maximum (fwhm) of XRD peak on the top layers in the preferred orientation of (111) and (002) were closely correlated to the impacting induced phase composition, compressive strain, crystallite size and the fault density of the thin films. In the theory, a new means was used to model the atomistic process of per condensed adatom. The average energy at least in the minimum energy state of the incorporate adatom on TiN surface layer was statistically formulized through a careful consideration of dynamical process, which properly interpreted the experimental observations. 展开更多
关键词 微观结构 /薄膜 耗散能量 X射线衍射 腐蚀防护
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