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快速热工艺系统中的氮-硅反应
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作者 黄宜平 CarlosA.PazDeAraujo 《固体电子学研究与进展》 CAS CSCD 北大核心 1989年第2期208-214,共7页
本文报道了以卤素钨灯为辐射源的快速热工艺(RTP)系统中的氮-硅直接热反应并和在常规电阻丝加热氧化炉中的氮-硅反应作了比较。并研究了RTP系统中氮-硅反应生成的超薄含氮表面层对氧化的抑制效应。实验结果表明,含氮表面层的生成以及对... 本文报道了以卤素钨灯为辐射源的快速热工艺(RTP)系统中的氮-硅直接热反应并和在常规电阻丝加热氧化炉中的氮-硅反应作了比较。并研究了RTP系统中氮-硅反应生成的超薄含氮表面层对氧化的抑制效应。实验结果表明,含氮表面层的生成以及对氧化的抑制效应和硅片初始氧化层厚度、氮-硅反应时的条件有关。 展开更多
关键词 氮-硅反应 热工艺 卤素钨灯 RTP
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Monte Carlo simulation for the sputtering yield of Si_3N_4 thin film milled by focused ion beams 被引量:1
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作者 TAN Yong-wen SONG Yu-min +2 位作者 ZHOU Peng WANG Cheng-yu YANG Hal 《Optoelectronics Letters》 EI 2008年第4期273-275,共3页
The sputtering yield of the Si3N4 thin film is calculated by Monte Carlo method with different parameters. The dependences of the sputtering yield on the incident ion energy, the incident angle and the number of Galli... The sputtering yield of the Si3N4 thin film is calculated by Monte Carlo method with different parameters. The dependences of the sputtering yield on the incident ion energy, the incident angle and the number of Gallium (Ga) and Arsenic (As) ions are predicted. The abnormal sputtering yield for As at 90 keV occurs when the incident angle reaches the range between 82° and 84°. 展开更多
关键词 薄膜 反应溅射法 聚焦离子束 蒙特卡洛法
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Coking and Deactivation of Catalyst Inhibited by Silanization Modification in Oxidation of Benzene to Phenol with Nitrous Oxide
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作者 翟丕沐 王立秋 +1 位作者 刘长厚 张守臣 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2005年第1期37-42,共6页
The main cause to the deactivation of ZSM-5 catalyst, used for oxidation of benzene to phenol (BTOP) by nitrous oxide, is that the carbon deposition on the catalyst surface blocks the mouth of pores of the catalyst.In... The main cause to the deactivation of ZSM-5 catalyst, used for oxidation of benzene to phenol (BTOP) by nitrous oxide, is that the carbon deposition on the catalyst surface blocks the mouth of pores of the catalyst.In the experiments, ZSM-5 catalyst was modified by chemical surface deposition of silicon, and then the effect of modification condition on the catalyst activation was studied. The catalyst samples were characterized by XRF,EPS, XRD, TEM, N2 adsorption at low temperature, pyridine adsorption-infrared technique and etc. All the above results show that the uniform SiO2 membrane can be formed on ZSM-5 crystal surface. The SiO2 membrane covers the acid centers on ZSM-5 surface to inhibit surface coking, to avoid or decrease the possibility of ZSM-5 pore blockage so that the catalyst activity and stability can be improved efficiently. The optimum siliconiting conditions determined by the experiments are as follows: 4% load of silanizing agent, volume (ml)/mass (g) ratio of hexane/ZSM-5=15/1, and 16 h of modification time. Compared with the samples without siliconiting treatment,the samples treated under the above optimum condition can increase the productivity of phenol by 14% for 3 h reaction time and by 41% for 6 h reaction time respectively. 展开更多
关键词 nitrous oxide PHENOL oxidation of benzene to phenol (BTOP) reaction COKING DEACTIVATION silaniza-tion SiO2 membrane
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