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氯化硅烷的相对挥发度及分离 被引量:4
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作者 伍钦 蔡梅琳 《化学工程》 CAS CSCD 北大核心 1997年第2期57-60,49,共5页
研究氯化氢硅精馏分离中相对挥发度随温度的变化关系,所得表达式与实验数据吻合很好;导出了三氯化硼-三氯氢硅、三氯氢硅-四氯化硅二元系汽液平衡关系,并在给定浓度下用计算机计算精馏理论板数随回流比的变化关系,最佳回流比控制... 研究氯化氢硅精馏分离中相对挥发度随温度的变化关系,所得表达式与实验数据吻合很好;导出了三氯化硼-三氯氢硅、三氯氢硅-四氯化硅二元系汽液平衡关系,并在给定浓度下用计算机计算精馏理论板数随回流比的变化关系,最佳回流比控制在8附近。 展开更多
关键词 三氯氢 四氢化 精馏 分离 氯化硅烷
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三(二乙胺基)氯化硅烷的合成 被引量:4
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作者 刘学建 陈耀峰 黄莉萍 《化学世界》 CAS CSCD 北大核心 2003年第10期532-534,共3页
随着半导体集成电路技术的发展,器件表面钝化保护膜的重要性日益显著。氮化硅薄膜是半导体集成电路中最具应用前景的表面钝化材料之一,发展低温的热化学气相沉积(CVD)工艺来沉积氮化硅表面钝化膜是集成电路发展的趋势,而开发新的硅源、... 随着半导体集成电路技术的发展,器件表面钝化保护膜的重要性日益显著。氮化硅薄膜是半导体集成电路中最具应用前景的表面钝化材料之一,发展低温的热化学气相沉积(CVD)工艺来沉积氮化硅表面钝化膜是集成电路发展的趋势,而开发新的硅源、氮源前驱体是实现低温淀积氮化硅薄膜的有效途径。设计了一种新的低温CVD氮化硅薄膜的有机硅源前驱体——三(二乙胺基)氯化硅烷,以四氯化硅和乙二胺为原料,在氮气气氛下,研究了原料预处理、二乙胺用量、反应温度和反应时间等工艺因素对合成收率的影响。最佳工艺条件下,收率达77.4%,并利用核磁共振、元素分析及红外光谱表征了产物的组成及结构。 展开更多
关键词 三(二乙胺基)氯化硅烷 合成 结构
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一种有机硅季铵盐抗菌剂的合成和性能 被引量:11
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作者 张昌辉 谢瑜 +1 位作者 徐旋 赵霞 《日用化学工业》 CAS CSCD 北大核心 2008年第2期99-102,共4页
利用γ-氯丙基三甲氧基硅烷(CTS)与N,N-二甲基十二烷基胺(DDA)反应,合成了N,N-二甲基-N-十二烷基氨丙基三甲氧基硅烷氯化铵(DDATAC)。研究了原料配比、反应温度和溶剂等因素对DDATAC收率的影响。较佳反应条件为:n(CTS)∶n(DDA)=1.0∶1.1... 利用γ-氯丙基三甲氧基硅烷(CTS)与N,N-二甲基十二烷基胺(DDA)反应,合成了N,N-二甲基-N-十二烷基氨丙基三甲氧基硅烷氯化铵(DDATAC)。研究了原料配比、反应温度和溶剂等因素对DDATAC收率的影响。较佳反应条件为:n(CTS)∶n(DDA)=1.0∶1.1,二甲亚砜为溶剂,于120℃反应30 h,DDATAC收率为91.37%。通过红外光谱、元素分析确定产物的化学结构,最后测定了产物的抗菌性能和耐洗性能。结果表明,制备得到的有机硅季铵盐具有良好的抗菌性能和一定的抗菌耐洗性。 展开更多
关键词 阳离子表面活性剂 N N-二甲基-N-十二基氨丙基三甲氧基氯化 合成 抗菌性能
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有机硅季铵盐的制备及其抗菌性能研究 被引量:6
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作者 张昌辉 谢瑜 赵霞 《中国胶粘剂》 CAS 2008年第12期18-21,共4页
利用三甲氧基硅烷(WD-930)与二甲基十八烷基烯丙基氯化铵(DAOAAC)进行反应,合成了阳离子抗菌剂[N,N-二甲基-N-十八烷基氨丙基三甲氧基硅烷氯化铵(DOATAC)]。以溴酚蓝为指示剂、二氯乙烷为分相溶剂,采用两相化学滴定法测定DOATAC的含量;... 利用三甲氧基硅烷(WD-930)与二甲基十八烷基烯丙基氯化铵(DAOAAC)进行反应,合成了阳离子抗菌剂[N,N-二甲基-N-十八烷基氨丙基三甲氧基硅烷氯化铵(DOATAC)]。以溴酚蓝为指示剂、二氯乙烷为分相溶剂,采用两相化学滴定法测定DOATAC的含量;用红外光谱(FT-IR)、元素分析和熔点测定仪等对DOATAC产物进行了理化分析;利用薄层色谱法,对所制备的阳离子抗菌剂的合成路线及其纯化过程进行跟踪;最后对产物的抗菌性能和耐洗性能进行测定。研究结果表明,当抗菌整理液中w(DOATAC)=0.06%时,经该整理液整理的棉布,对金黄色葡萄球菌和大肠杆菌的抑菌率均超过90%,并具有优良的抗菌耐洗性,洗涤50次后其抑菌率仍超过70%。 展开更多
关键词 有机季铵盐 N N-二甲基-N-十八基氨丙基三甲氧基氯化 阳离子抗菌剂 合成 抗菌性能
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Modification of methyl oleate for silicon-based biological lubricating base oil 被引量:1
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作者 Shixing Cui Zhi Yun Xia Gui 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2017年第1期130-136,共7页
A new kind of silicon-based biological lubricating base oil with good viscosity-temperature behavior,viscosity index,thermostability,oxidation stability and wear resistance performance was synthesized as a derivative ... A new kind of silicon-based biological lubricating base oil with good viscosity-temperature behavior,viscosity index,thermostability,oxidation stability and wear resistance performance was synthesized as a derivative of methyl oleate.Trimethylsilylation reaction was introduced to further improve methyl oleate oxidation stability and lubricity after epoxidation and open-ring reactions.The order of effectiveness of acid binding agent was N,N-diisopropylethylamine(DIEA) > pyridine > diethylamine > triethylamine,and the effects of various parameters on the trimethylsilylation reaction as well as on the silicon-oxygen bond stability and reaction yield were studied.A maximum yield of 34.54%was achieved at hydroxyl/trimethyl chlorosilane/DIEA molar ratio of1:1.25:1,reaction temperature 40℃,reaction time 1.5 h. 展开更多
关键词 Methyl oleate Trimethyl chlorosilane Acid binding agent N N-diisopropylethylamine Lubricity Silicon-based biological lubricating base oil
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Effect of Boundary Layers on Polycrystalline Silicon Chemical Vapor Deposition in a Trichlorosilane and Hydrogen System 被引量:4
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作者 张攀 王伟文 +1 位作者 陈光辉 李建隆 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2011年第1期1-9,共9页
This paper presents the numerical investigation of the effects of momentum, thermal and species boundary layers on the characteristics of polycrystalline silicon deposition by comparing the deposition rates in three c... This paper presents the numerical investigation of the effects of momentum, thermal and species boundary layers on the characteristics of polycrystalline silicon deposition by comparing the deposition rates in three chemical vapor deposition (CVD) reactors. A two-dimensional model for the gas flow, heat transfer, and mass transfer was coupled to the gas-phase reaction and surface reaction mechanism for the deposition of polycrystalline silicon from trichlorosilane (TCS)-hydrogen system. The model was verified by comparing the simulated growth rate with the experimental and numerical data in the open literature. Computed results in the reactors indicate that the deposition characteristics are closely related to the momentum, thermal and mass boundary layer thickness. To yield higher deposition rate, there should be higher concentration of TCS gas on the substrate, and there should also be thinner boundary layer of HCl gas so that HCl gas could be pushed away from the surface of the substrate immediately. 展开更多
关键词 boundary layer polycrystalline silicon numerical simulation mass diffusion
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Chemical vapor deposition of SiC at different molar ratios of hydrogen to methyltrichlorosilane 被引量:1
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作者 杨艳 张伟刚 《Journal of Central South University》 SCIE EI CAS 2009年第5期730-737,共8页
Chemical vapor deposition(CVD) of SiC from methyltrichlorosilane(MTS) was studied at two different molar ratios of H2 to MTS(n(H2) /n(MTS) ) . The total pressure was kept as 100 kPa and the temperature was varied from... Chemical vapor deposition(CVD) of SiC from methyltrichlorosilane(MTS) was studied at two different molar ratios of H2 to MTS(n(H2) /n(MTS) ) . The total pressure was kept as 100 kPa and the temperature was varied from 850 to 1 100 ℃ at a total residence time of 1 s. Steady-state deposition rates as functions of reactor length and of temperature,investigated at different n(H2) /n(MTS) values,show that hydrogen exhibits strongly influences on the deposition rate. Especially,the deposition of Si co-deposit can be obtained in broader substrate length and at higher temperatures with increasing hydrogen partial pressure. Influence of hydrogen on the deposition process was also studied using gas phase composition and deposit composition analysis at various n(H2) /n(MTS) . SEM micrographs directly show the variation of surface morphologies at various n(H2) /n(MTS) . It can be found that the crystal grain of the deposit at 1 100 ℃ is better developed and the crystallization is also improved with increasing n(H2) /n(MTS) . 展开更多
关键词 METHYLTRICHLOROSILANE silicon carbide H2 MTS
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Kinetic and Microstructure of SiC Deposited from SiCl_4-CH_4-H_2 被引量:1
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作者 杨艳 张伟刚 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2009年第3期419-426,共8页
Silicon carbide was prepared from SiCl4-CH4-H2 gaseous precursors by isothermal, isobaric chemical vapor deposition (CVD) at atmospheric pressure and temperatures ranging from 900°C to 1100°C. Kinetic studie... Silicon carbide was prepared from SiCl4-CH4-H2 gaseous precursors by isothermal, isobaric chemical vapor deposition (CVD) at atmospheric pressure and temperatures ranging from 900°C to 1100°C. Kinetic studies showed that carbosilane of SiH2Cl2, SiHCl3 and SiCl2 formed from decomposition of SiCl4 and CH4 contributed to the deposition of hexangular facet and granular pebble structured SiC. An average apparent activation energy of 152 kJ·mol-1 was determined. The overall CVD process was controlled not only by the surface reactions but also by complex gas phase reactions. The as-deposited thin film was characterized using scanning electron microscopy, X-ray diffraction and transmission electron microscopy, these analysis showed that the deposited thin film consisted of pure phase of the β-SiC, the growth morphology of β-SiC differs from hexangular facet to granular pebble struc-tures, which varied with substrate length and CVD temperature. 展开更多
关键词 chemical vapor deposition SIC KINETICS MICROSTRUCTURE
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Variation of Surface Adhesion Force During the Formation of OTS Self-assembled Monolayer Investigated by AFM
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作者 徐国华 HigashitaniKo 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 1999年第4期345-350,共6页
Variation of the surface adhesion force during the formation of octadecyl trichlorosilane (OTS) self-assembled monolayer on a glass substrate surface was investigated by atomic force microscope (AFM). The research sho... Variation of the surface adhesion force during the formation of octadecyl trichlorosilane (OTS) self-assembled monolayer on a glass substrate surface was investigated by atomic force microscope (AFM). The research shows that the hydrophobicity and the adhesion force of the sample surface increases gradually while the substrate surface is covered by OTS molecules as the reaction proceeds. After 15min reaction, a close-packed and smooth OTS self-assembled monolayer could form on the glass substrate surface with an advancing contact angle of 105° and an interfacial energy of 55.79mJ·m-2. 展开更多
关键词 surface adhesion force atomic force microscope octadecyl trichlorosilane selfassembled monolayer
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A Bi-component Cu Catalyst for the Direct Synthesis of Methylchlorosilane from Silicon and Methyl Chloride 被引量:2
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作者 汪超 王光润 王金福 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2014年第3期299-304,共6页
A bi-component catalyst comprising CuC1 and metallic copper was used in the direct synthesis of me- thylchlorosilane to study the catalytic synergy between the different copper sources. The catalyst exhibited high ac-... A bi-component catalyst comprising CuC1 and metallic copper was used in the direct synthesis of me- thylchlorosilane to study the catalytic synergy between the different copper sources. The catalyst exhibited high ac- tivity and high selectivity of dimethyldichlorosilane (M2) in the stirred bed reactor. The effect of the proportion of CuC1 used was studied and 10%-30% CuC1 gave the best yield of M2. The use of CuC1 decreased the induction pe- riod of reaction, improved the selectivity in the induction stage, and gave a longer stable stage. These results sug- gest that bi-comoonent catalyst has advantazes in the direct synthesis reaction. 展开更多
关键词 methylchlorosiiane direct synthesis bi-component catalyst SYNERGY
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