期刊文献+
共找到11篇文章
< 1 >
每页显示 20 50 100
单原子层沉积原理及其应用 被引量:13
1
作者 吴宜勇 李邦盛 王春青 《电子工业专用设备》 2005年第6期6-10,17,共6页
传统的薄膜材料制造方法已不能满足未来元器件和集成电路制造的要求,原子层沉积技术由于具有精确的厚度控制、沉积厚度均匀性和一致性等特点,已成为解决微电子制造相关超薄膜材料制造问题的主要解决方法之一,也将成为新的纳米材料和纳... 传统的薄膜材料制造方法已不能满足未来元器件和集成电路制造的要求,原子层沉积技术由于具有精确的厚度控制、沉积厚度均匀性和一致性等特点,已成为解决微电子制造相关超薄膜材料制造问题的主要解决方法之一,也将成为新的纳米材料和纳米结构的制造方法之一。综述了原子层沉积技术的原理、技术设备要求和应用。 展开更多
关键词 原子沉积 深亚微米器件 理论和应用
下载PDF
大脉冲能量单层CVD石墨烯被动调Q掺镱双包层光纤激光器 被引量:1
2
作者 吴健 吴端端 +3 位作者 黄义忠 罗正钱 许惠英 蔡志平 《厦门大学学报(自然科学版)》 CAS CSCD 北大核心 2014年第5期661-665,共5页
基于单层化学气相沉积(CVD)石墨烯可饱和吸收体的大脉冲能量被动调Q双包层光纤激光器.采用三明治结构,将CVD法生长的单层石墨烯通过聚甲基丙烯酸甲酯(PMMA)从铜箔上转移到光纤端面,制备成PMMA/石墨烯调Q器.采用全光纤线性腔结构,掺镱双... 基于单层化学气相沉积(CVD)石墨烯可饱和吸收体的大脉冲能量被动调Q双包层光纤激光器.采用三明治结构,将CVD法生长的单层石墨烯通过聚甲基丙烯酸甲酯(PMMA)从铜箔上转移到光纤端面,制备成PMMA/石墨烯调Q器.采用全光纤线性腔结构,掺镱双包层光纤和PMMA/单层石墨烯分别作为增益介质和被动调Q器件,大功率975nm半导体激光器作为泵浦源,大比例(95%)功率耦合输出,成功实现了中心波长为1 063.6nm大脉冲能量的稳定调Q光纤激光器.调Q脉冲序列重复频率在9.7~26.46kHz连续可调,当泵浦功率为756.1mW时,最大输出功率为46mW,最小脉宽为4.5μs,并且获得的最大单脉冲能量为1.7μJ.实验结果表明,单层CVD石墨烯性能优异,将有望在双包层光纤激光器中实现更大平均功率、单脉冲能量的激光输出. 展开更多
关键词 化学气相沉积石墨烯 双包光纤激光器 被动调Q 大脉冲能量
下载PDF
Cr2N/CrN多层复合涂层的生长和性能
3
作者 彭补之 《材料保护》 CAS CSCD 北大核心 2002年第9期69-69,共1页
关键词 Cr2N/CrN多复合涂 性能 磁控溅射技术 硅基体 沉积单层 氮化铬涂 沉积温度
下载PDF
往复式管坯喷射沉积的模型建立及运动参数优化
4
作者 韩伟 马万太 《金属学报》 SCIE EI CAS CSCD 北大核心 2008年第4期501-506,共6页
介绍了基底往复式喷射成形制备大壁厚管坯的工艺原理,并对雾化锥流率的空间分布和单层沉积轨迹进行了研究,在此基础上建立了单层沉积的数学模型.针对此模型和沉积轨迹的螺旋特性,分析了模型参数(m_(max),a,d)和基底运动参数(w,v)对单层... 介绍了基底往复式喷射成形制备大壁厚管坯的工艺原理,并对雾化锥流率的空间分布和单层沉积轨迹进行了研究,在此基础上建立了单层沉积的数学模型.针对此模型和沉积轨迹的螺旋特性,分析了模型参数(m_(max),a,d)和基底运动参数(w,v)对单层沉积特性的影响以及基底半径对单层沉积厚度的影响.通过对多旋转周期沉积轮廓叠加的单层沉积厚度的仿真,优化了管坯制备的运动参数(w,v). 展开更多
关键词 往复式喷射沉积 运动参数优化 沉积轨迹 沉积厚度 管坯
下载PDF
自组织InAs/GaAs量子点的X射线双晶衍射研究
5
作者 刘艳美 赵宗彦 +2 位作者 杨坤堂 徐章程 韩家骅 《材料科学与工程学报》 CAS CSCD 北大核心 2003年第6期862-864,共3页
用X射线双晶衍射方法测定了自组织生长的InAs GaAs量子点的摇摆曲线 ,根据Takagi Taupin方程对曲线进行了拟合。在考虑量子点层晶格失配的情况下 ,理论曲线和实验曲线符合得很好 ,从而确定了量子点垂直样品表面的失配度 ,约为 4~ 6 % ... 用X射线双晶衍射方法测定了自组织生长的InAs GaAs量子点的摇摆曲线 ,根据Takagi Taupin方程对曲线进行了拟合。在考虑量子点层晶格失配的情况下 ,理论曲线和实验曲线符合得很好 ,从而确定了量子点垂直样品表面的失配度 ,约为 4~ 6 % ,这与宏观连续体弹性理论的预测相近。结合电镜。 展开更多
关键词 INAS/GAAS量子点 自组织量子点 X射线双晶衍射法 摇摆曲线 光电性质 沉积
下载PDF
Single atom catalyst by atomic layer deposition technique 被引量:14
6
作者 Niancai Cheng Xueliang(Andy) Sun 《Chinese Journal of Catalysis》 CSCD 北大核心 2017年第9期1508-1514,共7页
Noble single‐atom catalysts have rapidly been attracting attention due to their unique catalytic properties and maximized utilization.Atomic layer deposition(ALD)is an emerging powerful technique for large‐scale syn... Noble single‐atom catalysts have rapidly been attracting attention due to their unique catalytic properties and maximized utilization.Atomic layer deposition(ALD)is an emerging powerful technique for large‐scale synthesis of stable single atom.In this review,we summarize recent developments of single atom synthesized by ALD as well as explore future research direction and trends. 展开更多
关键词 Single‐atom Atomic layer deposition CATALYSIS Noble catalyst MECHANISM
下载PDF
Developing a Coherent Stratigraphic Scheme of the Albertine Graben-East, Africa
7
作者 Joshua Lukaye David Worsley +9 位作者 Lyoidah Kiconco Proscovia Nabbanja Dozith Abeinomugisha Catherine Amusugut Nurudin Njabire Richard Nuwagaba Frank Mugisha Tonny Ddungu Tonny Sserubiri Vivienne Sempala 《Journal of Earth Science and Engineering》 2016年第5期264-294,共31页
The Albertine Graben is one of the most petroliferous onshore rifts in Africa. It forms the northemmost termination of the western arm of the East African Rift System. Its surface exposures were first studied by Wayla... The Albertine Graben is one of the most petroliferous onshore rifts in Africa. It forms the northemmost termination of the western arm of the East African Rift System. Its surface exposures were first studied by Wayland [1] and Pickford et al. [2] among others. Pickford et al. [2] especially developed the basic stratigraphic framework of the graben which was later modified by the government geoscientists and international oil companies using subsurface data. However, the stratigraphic units were not fully and formally described, and have been used informally in different and often confusing ways. The current study therefore aims to solve this challenge by establishing a coherent stratigraphic scheme for the entire graben through an integral study of surface and subsurface data. The study involves precise description of the type and reference sections for various formations both in exposure and wells; and has therefore led to the development of lithostratigraphic columns of different basins in the graben. The approach reveals that the Semliki area, south of Lake Albert, has the most complete sedimentary succession in the graben, spanning the period from middle Miocene (ca 15 Ma) to Recent. It also reveals that platform deposits, which form a small fraction of the thickness of the basinal succession, represent a highly condensed sequence which only saw deposition at times of Lake highstand. 展开更多
关键词 LITHOSTRATIGRAPHY subsurface and surface sediments correlation Albertine Graben.
下载PDF
Chemical vapor deposition growth of monolayer MoSe2 nanosheets 被引量:30
8
作者 Jonathan C. Shaw Hailong Zhou +4 位作者 Yu Chen Nathan O. Weiss Yuan Liu Yu Huang Xiangfeng Duan 《Nano Research》 SCIE EI CAS CSCD 2014年第4期511-517,共7页
The synthesis of two-dimensional (2D) layered materials with controllable thickness is of considerable interest for diverse applications. Here we report the first chemical vapor deposition growth of single- and few-... The synthesis of two-dimensional (2D) layered materials with controllable thickness is of considerable interest for diverse applications. Here we report the first chemical vapor deposition growth of single- and few-layer MoSe2 nanosheets. By using Se and MoO3 as the chemical vapor supply, we demonstrate that highly crystalline MoSe2 can be directly grown on the 300 nm SiO2/Si substrates to form optically distinguishable single- and multi-layer nanosheets, typically in triangular shaped domains with edge lengths around 30 btm, which can merge into continuous thin films upon further growth. Micro-Raman spectroscopy and imaging was used to probe the thickness-dependent vibrational properties. Photoluminescence spectroscopy demonstrates that MoSe2 monolayers exhibit strong near band edge emission at 1.55 eV, while bilayers or multi-layers exhibit much weaker emission, indicating of the transition to a direct band gap semiconductor as the thickness is reduced to a monolayer. 展开更多
关键词 chemical vapor deposition molybdenum diselenide two-dimensional materials transition metaldichalcogenide layered materials semiconductor
原文传递
Enhanced electrical properties in bilayered ferroelectric thin films 被引量:2
9
作者 ZHANG Hao LONG WeiJie +1 位作者 CHEN YaQing GUO DongJie 《Science China Chemistry》 SCIE EI CAS 2013年第3期551-555,共5页
Sr2Bi4Ti5O18(SBTi) single layered and Sr2Bi4Ti5O18 /Pb(Zr0.53Ti0.47)O3(SBTi/PZT) bilayered thin films have been prepared on Pt/TiO2/SiO2/Si substrates by pulsed-laser deposition(PLD).The related structural characteriz... Sr2Bi4Ti5O18(SBTi) single layered and Sr2Bi4Ti5O18 /Pb(Zr0.53Ti0.47)O3(SBTi/PZT) bilayered thin films have been prepared on Pt/TiO2/SiO2/Si substrates by pulsed-laser deposition(PLD).The related structural characterizations and electrical properties have been comparatively investigated.X-ray diffraction reveals that both films have crystallized into perovskite phases and scanning electron microscopy shows the sharp interfaces.Both films show well-saturated ferroelectric hysteresis loops,however,compared with the single layered SBTi films,the SBTi/PZT bilayered films have significantly increased remnant polarization(Pr) and decreased coercive field(Ec),with the applied field of 260 kV/cm.The measured Pr and Ec of SBTi and SBTi/PZT films were 7.9 C/cm 2,88.1 kV/cm and 13.0 C/cm 2,51.2 kV/cm,respectively.In addition,both films showed good fatigue-free characteristics,the switchable polarization decreased by 9% and 11% of the initial values after 2.2 10 9 switching cycles for the SBTi single layered films and the SBTi/PZT bilayered films,respectively.Our results may provide some guidelines for further optimization of multilayered ferroelectric thin films. 展开更多
关键词 bilayered films X-ray diffraction scanning electron microscopy ferroelectric properties
原文传递
Electrocatalytic oxidation of GMP on an ITO electrode modified by the photodeposition of Pd nanoparticles onto a monolayer TiO_2 nanosheets/[Ru(phen)_2(dC18bpy)]^(2+) hybrid film
10
作者 CHEN Xi' An WANG Shun LIN JuanJuan LIU AiLi HUANG ShaoMing 《Science China Chemistry》 SCIE EI CAS 2011年第3期483-489,共7页
An indium tin oxide(ITO)electrode coated with monolayer TiO2/[Ru(phen)2(dC18bpy)] 2+ (phen=1,10-phenanthroline, dC18bpy=4,4′-dioctadecyl-2,2′-bipyridyl)hybrid film(denoted as ITO/TiO2-Ru)has been prepared using the ... An indium tin oxide(ITO)electrode coated with monolayer TiO2/[Ru(phen)2(dC18bpy)] 2+ (phen=1,10-phenanthroline, dC18bpy=4,4′-dioctadecyl-2,2′-bipyridyl)hybrid film(denoted as ITO/TiO2-Ru)has been prepared using the modified Langmuir-Blodgett(LB)method,and the electrocatalytic oxidation of mononucleotide of guanosine 5′-monophosphate(GMP)on an ITO/TiO2-Ru electrode after Pd-photodeposition(denoted as ITO/TiO2-Ru/Pd)has been studied.Atomic force microscopy reveals that the single-layered hybrid film of TiO2 nanosheets/[Ru(phen)2(dC18bpy)] 2+is closely packed at a surface pressure of 25 mN m 1and has a thickness of(3.20±0.5)nm.X-ray photoelectron spectra show the formation of Pd nanoparticles on the surface of hybrid film with radii of 20–200 nm by the reduction of[Pd(NH3)4] 2+ under light irradiation.When it is applied to oxidize GMP,a larger catalytic oxidative current is achieved on the ITO/TiO2-Ru/Pd electrode at the external potential above 700 mV(vs.Ag|AgCl|KCl)in comparison with the naked ITO electrode and ITO/TiO2-Ru electrode.Such a result indicates that the Pd nanoparticles are able to hamper the combination of electron hole pairs and reduce the counterwork of insulating long alkyl chains of amphiphilic Ru(II)complexes,and thus develops the electron transfer efficiency and produces the enhanced redox current. 展开更多
关键词 Langmuir-Blodgett method TiO2/[Ru(phen)2(dC18bpy)] 2+ hybrid film Pd nanoparticles modified electrode electrocatalysis
原文传递
Jurassic rocks,bivalves,and depositional environments of the source area of the Yangtze River,Qinghai Province,western China 被引量:4
11
作者 YAO HuaZhou ZHANG RenJie +5 位作者 DUAN QiFa SHENG XianCai NIU ZhiJun WANG JianXiong ZENG BoFu WU JianHui 《Science China Earth Sciences》 SCIE EI CAS 2011年第8期1136-1148,共13页
Jurassic rocks are abundantly developed in the source area of the Yangtze River,South Qinghai,with the greatest thickness of 6311 m,including five stratigraphic units:Qoimaco Formation,Buqu Formation,Xiali Formation,S... Jurassic rocks are abundantly developed in the source area of the Yangtze River,South Qinghai,with the greatest thickness of 6311 m,including five stratigraphic units:Qoimaco Formation,Buqu Formation,Xiali Formation,Suowa Formation,and Xueshan Formation.Based on sufficient fossils of bivalves,ammonites,and brachiopods,the major part of these formations is ascribed to the Middle Jurassic Bathonian to Callovian.No diagnostic fossils have been found from the Lower Qoimaco Formation or Upper Xueshan Formation,which could possibly contain in part Bajocian and Oxfordian taxa respectively. 展开更多
关键词 Source area of Yangtze River JURASSIC ROCKS bivalves depositional environments
原文传递
上一页 1 下一页 到第
使用帮助 返回顶部